GB2232792B - Control of radiation assisted chemical vapour deposition process - Google Patents

Control of radiation assisted chemical vapour deposition process

Info

Publication number
GB2232792B
GB2232792B GB9005861A GB9005861A GB2232792B GB 2232792 B GB2232792 B GB 2232792B GB 9005861 A GB9005861 A GB 9005861A GB 9005861 A GB9005861 A GB 9005861A GB 2232792 B GB2232792 B GB 2232792B
Authority
GB
United Kingdom
Prior art keywords
control
deposition process
vapour deposition
chemical vapour
assisted chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9005861A
Other languages
English (en)
Other versions
GB2232792A (en
GB9005861D0 (en
Inventor
Carl Murray Penney
Tushar Shashikant Chande
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Co filed Critical General Electric Co
Publication of GB9005861D0 publication Critical patent/GB9005861D0/en
Publication of GB2232792A publication Critical patent/GB2232792A/en
Application granted granted Critical
Publication of GB2232792B publication Critical patent/GB2232792B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/60—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature
    • G01J5/601—Radiation pyrometry, e.g. infrared or optical thermometry using determination of colour temperature using spectral scanning
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44—Electric circuits
    • G01J2001/4413—Type
    • G01J2001/442—Single-photon detection or photon counting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G01J2003/2813—2D-array

Landscapes

  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Radiation Pyrometers (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Chemical Vapour Deposition (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
GB9005861A 1989-03-27 1990-03-15 Control of radiation assisted chemical vapour deposition process Expired - Fee Related GB2232792B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US07/329,054 US4959244A (en) 1989-03-27 1989-03-27 Temperature measurement and control for photohermal processes

Publications (3)

Publication Number Publication Date
GB9005861D0 GB9005861D0 (en) 1990-05-09
GB2232792A GB2232792A (en) 1990-12-19
GB2232792B true GB2232792B (en) 1993-11-24

Family

ID=23283674

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9005861A Expired - Fee Related GB2232792B (en) 1989-03-27 1990-03-15 Control of radiation assisted chemical vapour deposition process

Country Status (6)

Country Link
US (1) US4959244A (enExample)
JP (1) JPH02267270A (enExample)
DE (1) DE4008816A1 (enExample)
FR (1) FR2644797A1 (enExample)
GB (1) GB2232792B (enExample)
IT (1) IT1239491B (enExample)

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US5200230A (en) * 1987-06-29 1993-04-06 Dunfries Investments Limited Laser coating process
US5026979A (en) * 1990-03-05 1991-06-25 General Electric Company Method and apparatus for optically monitoring laser materials processing
US5240736A (en) * 1992-10-26 1993-08-31 Ford Motor Company Method and apparatus for in-situ measuring filament temperature and the thickness of a diamond film
US5365876A (en) * 1993-02-01 1994-11-22 The United States Of America As Represented By The United States Department Of Energy Crystal face temperature determination means
JPH0929472A (ja) * 1995-07-14 1997-02-04 Hitachi Ltd 割断方法、割断装置及びチップ材料
US6400833B1 (en) 1998-06-19 2002-06-04 Oms-Optical Measuring Systems Method and apparatus for discrimination of product units from spread spectrum images of thin portions of product units
US6303411B1 (en) 1999-05-03 2001-10-16 Vortek Industries Ltd. Spatially resolved temperature measurement and irradiance control
CN101324470B (zh) 2001-12-26 2011-03-30 加拿大马特森技术有限公司 测量温度和热处理的方法及系统
US7341673B2 (en) 2003-08-12 2008-03-11 Lam Research Corporation Methods and apparatus for in situ substrate temperature monitoring by electromagnetic radiation emission
TWI320951B (en) * 2002-08-13 2010-02-21 Lam Res Corp Methods for in situ substrate temperature monitoring by electromagnetic radiation emission
JP4988202B2 (ja) 2002-12-20 2012-08-01 マトソン テクノロジー カナダ インコーポレイテッド 工作物の支持及び熱処理の方法とシステム
WO2005059991A1 (en) 2003-12-19 2005-06-30 Mattson Technology Canada Inc. Apparatuses and methods for suppressing thermally induced motion of a workpiece
US7360945B2 (en) * 2005-03-31 2008-04-22 Intel Corporation Apparatus for determining temperature of a portable computer system
DE102005047433B4 (de) * 2005-09-30 2009-12-24 Wolfgang Erdmann Verfahren zum computergestützten Optimieren des Betriebs eines Rollenofens, Computerprogramm und computerlesbarer Datenträger
WO2008058397A1 (en) 2006-11-15 2008-05-22 Mattson Technology Canada, Inc. Systems and methods for supporting a workpiece during heat-treating
WO2009137940A1 (en) 2008-05-16 2009-11-19 Mattson Technology Canada, Inc. Workpiece breakage prevention method and apparatus
US8309883B2 (en) * 2010-05-20 2012-11-13 Ipg Photonics Corporation Methods and systems for laser processing of materials
US9757902B2 (en) 2014-09-02 2017-09-12 Product Innovation and Engineering L.L.C. Additive layering method using improved build description
US9573224B2 (en) 2014-09-02 2017-02-21 Product Innovation & Engineering, LLC System and method for determining beam power level along an additive deposition path
US10632566B2 (en) 2014-12-02 2020-04-28 Product Innovation and Engineering L.L.C. System and method for controlling the input energy from an energy point source during metal processing
CN105506733A (zh) * 2015-12-23 2016-04-20 圆融光电科技股份有限公司 外延生长设备
US9720243B1 (en) * 2015-12-31 2017-08-01 X Development Llc Wavelength division monolithic optical device
CN106843316B (zh) * 2017-03-01 2018-11-09 华中科技大学 一种基于光热式的快速升温控制方法、装置及升温炉
US11839915B2 (en) 2021-01-20 2023-12-12 Product Innovation and Engineering LLC System and method for determining beam power level along an additive deposition path
CN114216566A (zh) * 2021-12-27 2022-03-22 中国工程物理研究院流体物理研究所 一种瞬态连续温度的单点测量方法及系统

Citations (4)

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JPS62296512A (ja) * 1986-06-17 1987-12-23 Fujitsu Ltd 気相成長装置
GB2196155A (en) * 1986-09-20 1988-04-20 Mitsubishi Electric Corp Control apparatus for energy beam hardening
GB2212910A (en) * 1987-11-25 1989-08-02 Bosch Gmbh Robert Workpiece-treatment apparatus
EP0309973B1 (de) * 1987-10-01 1990-05-23 Messer Griesheim Gmbh Verfahren zum thermischen Bearbeiten von Bauteilen in festem Zustand mit einem Laserstrahl

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GB1118303A (en) * 1964-11-27 1968-06-26 British Iron Steel Research Heating control system
GB1372753A (en) * 1971-01-11 1974-11-06 Honeywell Inc Apparatus for processing a workpiece with a laser beam
US4081215A (en) * 1976-05-18 1978-03-28 General Electric Company Stable two-channel, single-filter spectrometer
CH634424A5 (fr) * 1978-08-18 1983-01-31 Nat Res Dev Procede et appareil de detection et de commande de depot d'une pellicule fine.
DE3123427C2 (de) * 1981-06-12 1985-10-24 Siemens AG, 1000 Berlin und 8000 München Anordnung zum Messen des elektrischen Widerstandes und der Temperatur von durch Aufdampfen oder Aufstäuben auf Substraten abgeschiedenen dünnen, metallischleitenden Schichten während der Schichtherstellung
FR2545007B1 (fr) * 1983-04-29 1986-12-26 Commissariat Energie Atomique Procede et dispositif pour le revetement d'une piece par projection de plasma
US4582431A (en) * 1983-10-11 1986-04-15 Honeywell Inc. Optical monitor for direct thickness control of transparent films
FR2572523B1 (fr) * 1984-10-25 1987-06-12 Bertin & Cie Procede et dispositif pyrometriques pour determiner a distance, par voie optique, la temperature et/ou l'emissivite d'un corps ou milieu quelconque
US4676646A (en) * 1985-10-15 1987-06-30 Energy Conversion Devices, Inc. Method and apparatus for controlling thickness of a layer of an optical data storage device by measuring an optical property of the layer
JPS6217178A (ja) * 1985-07-17 1987-01-26 Nec Corp 薄膜形成装置
JPS6217179A (ja) * 1985-07-17 1987-01-26 Nec Corp 薄膜形成方法
EP0209131B1 (en) * 1985-07-17 1991-12-04 Nec Corporation Optical cvd method with a strong optical intensity used during an initial period and device therefor
DD254114A3 (de) * 1985-07-30 1988-02-17 Univ Dresden Tech Pyrometrisches messverfahren
DE3634800A1 (de) * 1985-12-30 1987-07-02 Weinert E Messgeraetewerk Mehrkanalmesskopf fuer ein strahlungspyrometer
CA1302803C (en) * 1986-02-15 1992-06-09 Hiroji Kawai Method and apparatus for vapor deposition
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Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62296512A (ja) * 1986-06-17 1987-12-23 Fujitsu Ltd 気相成長装置
GB2196155A (en) * 1986-09-20 1988-04-20 Mitsubishi Electric Corp Control apparatus for energy beam hardening
EP0309973B1 (de) * 1987-10-01 1990-05-23 Messer Griesheim Gmbh Verfahren zum thermischen Bearbeiten von Bauteilen in festem Zustand mit einem Laserstrahl
GB2212910A (en) * 1987-11-25 1989-08-02 Bosch Gmbh Robert Workpiece-treatment apparatus

Also Published As

Publication number Publication date
US4959244A (en) 1990-09-25
FR2644797A1 (fr) 1990-09-28
GB2232792A (en) 1990-12-19
IT9019833A1 (it) 1991-09-27
DE4008816C2 (enExample) 1991-12-19
IT1239491B (it) 1993-11-03
DE4008816A1 (de) 1990-10-04
IT9019833A0 (it) 1990-03-27
GB9005861D0 (en) 1990-05-09
JPH02267270A (ja) 1990-11-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19940315