GB2217860B - Circuit arrangement for non-contact measurement of the ohmic resistance of thin layers - Google Patents

Circuit arrangement for non-contact measurement of the ohmic resistance of thin layers

Info

Publication number
GB2217860B
GB2217860B GB8909488A GB8909488A GB2217860B GB 2217860 B GB2217860 B GB 2217860B GB 8909488 A GB8909488 A GB 8909488A GB 8909488 A GB8909488 A GB 8909488A GB 2217860 B GB2217860 B GB 2217860B
Authority
GB
United Kingdom
Prior art keywords
circuit arrangement
thin layers
ohmic resistance
contact measurement
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
GB8909488A
Other languages
English (en)
Other versions
GB8909488D0 (en
GB2217860A (en
Inventor
Gernot Thorn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of GB8909488D0 publication Critical patent/GB8909488D0/en
Publication of GB2217860A publication Critical patent/GB2217860A/en
Application granted granted Critical
Publication of GB2217860B publication Critical patent/GB2217860B/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
GB8909488A 1988-04-30 1989-04-26 Circuit arrangement for non-contact measurement of the ohmic resistance of thin layers Expired - Lifetime GB2217860B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3815010A DE3815010A1 (de) 1988-04-30 1988-04-30 Schaltungsanordnung fuer den kombinierten einsatz einer induktiven und einer kapazitiven einrichtung fuer die zerstoerungsfreie messung des ohmschen wiederstands duenner schichten

Publications (3)

Publication Number Publication Date
GB8909488D0 GB8909488D0 (en) 1989-06-14
GB2217860A GB2217860A (en) 1989-11-01
GB2217860B true GB2217860B (en) 1992-09-30

Family

ID=6353499

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8909488A Expired - Lifetime GB2217860B (en) 1988-04-30 1989-04-26 Circuit arrangement for non-contact measurement of the ohmic resistance of thin layers

Country Status (5)

Country Link
US (1) US4958131A (en, 2012)
JP (1) JPH0257984A (en, 2012)
DE (1) DE3815010A1 (en, 2012)
GB (1) GB2217860B (en, 2012)
IT (1) IT1229315B (en, 2012)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5278512A (en) * 1992-05-15 1994-01-11 Richard Goldstein Apparatus and method for continuously monitoring grounding conductor resistance in power distribution systems
DE4227734C2 (de) * 1992-08-21 1996-05-15 Leybold Ag Anordnung und Verfahren zum Messen der Dicke einer Schicht
DE4227735C2 (de) * 1992-08-21 1995-10-12 Leybold Ag Anordnung zum berührungslosen Messen der Dicke von Schichten
US5602486A (en) * 1994-03-14 1997-02-11 Sandia Corporation Impedance sensing of flaws in non-homogenous materials
US5537048A (en) * 1994-03-14 1996-07-16 Sandia Corporation Sensing roller for in-process thickness measurement
US6401046B1 (en) * 1999-09-22 2002-06-04 Visteon Global Technologies, Inc. Modulated interface for remote signals
US6891380B2 (en) * 2003-06-02 2005-05-10 Multimetrixs, Llc System and method for measuring characteristics of materials with the use of a composite sensor
DE102004032031A1 (de) * 2004-07-02 2006-01-19 Hella Kgaa Hueck & Co. Vorrichtung zum Erfassen der Resonanzfrequenz und Güte eines Schwingkreises in einem Sensor
CA2577930A1 (en) * 2004-08-24 2006-03-02 Siemens Aktiengesellschaft Arrangement for supplying electrical energy to a measuring instrument
NL1033148C2 (nl) * 2006-12-29 2008-07-01 Univ Delft Tech Elektrische meetinrichting, werkwijze en computer programma product.
GB2514114A (en) * 2013-05-13 2014-11-19 Univ Bath Apparatus and method for measuring electromagnetic properties
US11525881B1 (en) * 2021-08-17 2022-12-13 Fluke Corporation Systems and methods for calibration using impedance simulation
DE102021123261B3 (de) 2021-09-08 2022-06-15 Helmholtz-Zentrum Berlin für Materialien und Energie Gesellschaft mit beschränkter Haftung Vorrichtung zur Ermittlung von Oberflächenwiderständen

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1163105A (en) * 1965-12-03 1969-09-04 Commissariat Energie Atomique A Method of and Apparatus for Measuring Surface Resistivity
GB1552948A (en) * 1975-08-21 1979-09-19 Western Electric Co Measuring the electrical conductivity of a lamella

Family Cites Families (20)

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Publication number Priority date Publication date Assignee Title
US3064184A (en) * 1958-06-11 1962-11-13 Ass Elect Ind Woolwich Ltd Apparatus for measuring the thickness of electrically conducting films
DE1271823B (de) * 1960-02-25 1968-07-04 Tsugami Seisakujo Kk Schaltung zur Messung der Blind- oder der Wirkwiderstandkomponente eines Prueflings
DE1295075B (de) * 1967-07-29 1969-05-14 Dr Heinz Matthias Verfahren zum elektrodenlosen Bestimmen des spezifischen elektrischen Widerstandes eines Prueflings mit Hilfe eines Resonanzkreises
US3679968A (en) * 1970-03-16 1972-07-25 Jean Claude Commercon Method and device for measuring the thickness of a metal deposit on an insulating support
US3711774A (en) * 1971-03-01 1973-01-16 Perkin Elmer Corp Automatic gain calibration
DE2115437C3 (de) * 1971-03-30 1978-04-27 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur berührungslosen Leitfähigkeitsmessung
CA1020631A (en) * 1974-03-04 1977-11-08 Edward I. Parker Control and gauging method and apparatus using locked oscillators
GB1510103A (en) * 1974-03-19 1978-05-10 Agfa Gevaert Metallic particle detection apparatus
US4095180A (en) * 1975-12-29 1978-06-13 K. J. Law Engineers, Inc. Method and apparatus for testing conductivity using eddy currents
US4208625A (en) * 1976-02-23 1980-06-17 Micro Sensors, Inc. Capacitive measuring system with automatic calibration
US4050019A (en) * 1976-07-26 1977-09-20 The United States Of America As Represented By The Secretary Of The Army Range switching circuit for solid state electrometer
JPS5612502A (en) * 1979-07-12 1981-02-06 Nippon Kokan Kk <Nkk> Feedback amplification type vortex flow range finder
GB2116793B (en) * 1982-03-03 1986-01-29 Perkin Elmer Corp Variable gain amplifier
DE3221379A1 (de) * 1982-06-05 1983-12-08 M.A.N.- Roland Druckmaschinen AG, 6050 Offenbach Messvorrichtung fuer bogendicken in der transportbahn von boegen bei papierverarbeitungsmaschinen
JPS6012265A (ja) * 1983-07-01 1985-01-22 Nippon Kokan Kk <Nkk> 凝固層厚さの測定方法
DE3335766A1 (de) * 1983-10-01 1985-04-11 Leybold-Heraeus GmbH, 5000 Köln Anordnung zur elektrischen messung von schichtdicken an laufenden baendern
DD224946B1 (de) * 1983-11-01 1989-04-12 Paedagogische Hochschule L Her Anordnung zur magnetinduktiven zerstoerungsfreien werkstoffpruefung nach der resonanzmethode
DE3401466A1 (de) * 1984-01-18 1985-07-25 Elektro-Physik Hans Nix & Dr.-Ing. E. Steingroever KG, 5000 Köln Sonde fuer die kontinuierliche messung der dicke von schichten oder baendern
GB8432438D0 (en) * 1984-12-21 1985-02-06 De La Rue Syst Sensing sheets
US4791353A (en) * 1987-08-14 1988-12-13 Impact Systems, Inc. Scanning combination thickness and moisture gauge for moving sheet material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1163105A (en) * 1965-12-03 1969-09-04 Commissariat Energie Atomique A Method of and Apparatus for Measuring Surface Resistivity
GB1552948A (en) * 1975-08-21 1979-09-19 Western Electric Co Measuring the electrical conductivity of a lamella

Also Published As

Publication number Publication date
IT8920336A0 (it) 1989-04-28
US4958131A (en) 1990-09-18
DE3815010A1 (de) 1989-11-09
IT1229315B (it) 1991-08-08
JPH0257984A (ja) 1990-02-27
DE3815010C2 (en, 2012) 1993-06-09
GB8909488D0 (en) 1989-06-14
GB2217860A (en) 1989-11-01

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19990426