GB2145243B - Optical lithographic processes - Google Patents
Optical lithographic processesInfo
- Publication number
- GB2145243B GB2145243B GB08416345A GB8416345A GB2145243B GB 2145243 B GB2145243 B GB 2145243B GB 08416345 A GB08416345 A GB 08416345A GB 8416345 A GB8416345 A GB 8416345A GB 2145243 B GB2145243 B GB 2145243B
- Authority
- GB
- United Kingdom
- Prior art keywords
- lithographic processes
- optical lithographic
- optical
- processes
- lithographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/091—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers characterised by antireflection means or light filtering or absorbing means, e.g. anti-halation, contrast enhancement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
- H01L21/0276—Photolithographic processes using an anti-reflective coating
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Architecture (AREA)
- Structural Engineering (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US52449783A | 1983-08-18 | 1983-08-18 |
Publications (3)
Publication Number | Publication Date |
---|---|
GB8416345D0 GB8416345D0 (en) | 1984-08-01 |
GB2145243A GB2145243A (en) | 1985-03-20 |
GB2145243B true GB2145243B (en) | 1987-08-26 |
Family
ID=24089455
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB08416345A Expired GB2145243B (en) | 1983-08-18 | 1984-06-27 | Optical lithographic processes |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS6074529A (en) |
DE (1) | DE3428565A1 (en) |
GB (1) | GB2145243B (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2170649A (en) * | 1985-01-18 | 1986-08-06 | Intel Corp | Sputtered silicon as an anti-reflective coating for metal layer lithography |
JPH0719842B2 (en) * | 1985-05-23 | 1995-03-06 | 三菱電機株式会社 | Redundant circuit of semiconductor device |
JPH01241125A (en) * | 1988-03-23 | 1989-09-26 | Sony Corp | Manufacture of semiconductor device |
DE3930655A1 (en) * | 1988-09-13 | 1990-03-22 | Mitsubishi Electric Corp | Semiconductor module with laminated coupling layer - has coupling section, extending over insulating film on semiconductor substrate main surface |
JPH0279463A (en) * | 1988-09-14 | 1990-03-20 | Mitsubishi Electric Corp | Semiconductor memory |
ATE123345T1 (en) * | 1989-01-23 | 1995-06-15 | Siemens Ag | METHOD FOR PRODUCING A SILICON NITRIDE LAYER AS USED AS AN ANTIREFLECTION LAYER IN PHOTOLITHOGRAPHY PROCESSES IN THE PRODUCTION OF HIGHLY INTEGRATED SEMICONDUCTOR CIRCUITS. |
KR950011563B1 (en) * | 1990-11-27 | 1995-10-06 | 가부시끼가이샤 도시바 | Manufacturing method of semiconductor device |
US5302240A (en) * | 1991-01-22 | 1994-04-12 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor device |
JPH0590224A (en) * | 1991-01-22 | 1993-04-09 | Toshiba Corp | Manufacture of semiconductor device |
DE4231312C2 (en) * | 1992-09-18 | 1996-10-02 | Siemens Ag | Anti-reflective layer and method for the lithographic structuring of a layer |
US6300253B1 (en) | 1998-04-07 | 2001-10-09 | Micron Technology, Inc. | Semiconductor processing methods of forming photoresist over silicon nitride materials, and semiconductor wafer assemblies comprising photoresist over silicon nitride materials |
US6323139B1 (en) | 1995-12-04 | 2001-11-27 | Micron Technology, Inc. | Semiconductor processing methods of forming photoresist over silicon nitride materials |
US5926739A (en) | 1995-12-04 | 1999-07-20 | Micron Technology, Inc. | Semiconductor processing method of promoting photoresist adhesion to an outer substrate layer predominately comprising silicon nitride |
US5985771A (en) | 1998-04-07 | 1999-11-16 | Micron Technology, Inc. | Semiconductor wafer assemblies comprising silicon nitride, methods of forming silicon nitride, and methods of reducing stress on semiconductive wafers |
US6316372B1 (en) | 1998-04-07 | 2001-11-13 | Micron Technology, Inc. | Methods of forming a layer of silicon nitride in a semiconductor fabrication process |
US6635530B2 (en) | 1998-04-07 | 2003-10-21 | Micron Technology, Inc. | Methods of forming gated semiconductor assemblies |
WO2001009683A1 (en) * | 1999-08-02 | 2001-02-08 | Infineon Technologies North America Corp. | Reduction of resist poisoning |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS561533A (en) * | 1979-06-18 | 1981-01-09 | Hitachi Ltd | Method of photoetching |
GB2061615A (en) * | 1979-10-25 | 1981-05-13 | Gen Electric | Composite conductors for integrated circuits |
JPS5680133A (en) * | 1979-12-06 | 1981-07-01 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Formation of pattern |
-
1984
- 1984-06-27 GB GB08416345A patent/GB2145243B/en not_active Expired
- 1984-07-27 JP JP15563384A patent/JPS6074529A/en active Pending
- 1984-08-02 DE DE19843428565 patent/DE3428565A1/en not_active Ceased
Also Published As
Publication number | Publication date |
---|---|
JPS6074529A (en) | 1985-04-26 |
GB2145243A (en) | 1985-03-20 |
DE3428565A1 (en) | 1985-03-07 |
GB8416345D0 (en) | 1984-08-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB8427109D0 (en) | Optical system | |
DE3375329D1 (en) | Optical system | |
GB2135475B (en) | Optical de-polarizer | |
GB2145243B (en) | Optical lithographic processes | |
GB2119112B (en) | Optical elements | |
EP0136421A3 (en) | Microlithographic process | |
GB2138163B (en) | Optical projection system | |
GB2152401B (en) | Clarifier | |
GB8402209D0 (en) | Slab-shaped lens | |
GB8424131D0 (en) | Optical method | |
GB2126037B (en) | Optical parametrons | |
EP0149035A3 (en) | Photographic roll-printer | |
GB8416247D0 (en) | Optical apparatus | |
GB2149098B (en) | Optical metrology | |
GB2196441B (en) | Optical apparatus | |
GB2121978B (en) | Optical elements | |
GB8400681D0 (en) | Projection optical system | |
GB8424466D0 (en) | Optical system | |
GB8410551D0 (en) | Scanninin lens arrangement | |
GB8419754D0 (en) | Exposure system | |
BG36322A1 (en) | Optical mask | |
GB8318033D0 (en) | Optical process | |
GB2382150B (en) | Optical apparatus | |
BG35713A1 (en) | Deflector- modulator for light | |
GB2109121B (en) | Optical retromodulator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |