GB2149098B - Optical metrology - Google Patents

Optical metrology

Info

Publication number
GB2149098B
GB2149098B GB08424997A GB8424997A GB2149098B GB 2149098 B GB2149098 B GB 2149098B GB 08424997 A GB08424997 A GB 08424997A GB 8424997 A GB8424997 A GB 8424997A GB 2149098 B GB2149098 B GB 2149098B
Authority
GB
United Kingdom
Prior art keywords
optical metrology
metrology
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08424997A
Other versions
GB2149098A (en
GB8424997D0 (en
Inventor
Derek Stanley Moore
Christopher Paul Kirk
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vinters Ltd
Original Assignee
Vickers PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vickers PLC filed Critical Vickers PLC
Publication of GB8424997D0 publication Critical patent/GB8424997D0/en
Publication of GB2149098A publication Critical patent/GB2149098A/en
Application granted granted Critical
Publication of GB2149098B publication Critical patent/GB2149098B/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
GB08424997A 1983-10-26 1984-10-03 Optical metrology Expired GB2149098B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB838328562A GB8328562D0 (en) 1983-10-26 1983-10-26 Optical metrology

Publications (3)

Publication Number Publication Date
GB8424997D0 GB8424997D0 (en) 1984-11-07
GB2149098A GB2149098A (en) 1985-06-05
GB2149098B true GB2149098B (en) 1986-08-28

Family

ID=10550745

Family Applications (3)

Application Number Title Priority Date Filing Date
GB838328562A Pending GB8328562D0 (en) 1983-10-26 1983-10-26 Optical metrology
GB848404664A Pending GB8404664D0 (en) 1983-10-26 1984-02-22 Optical metrology
GB08424997A Expired GB2149098B (en) 1983-10-26 1984-10-03 Optical metrology

Family Applications Before (2)

Application Number Title Priority Date Filing Date
GB838328562A Pending GB8328562D0 (en) 1983-10-26 1983-10-26 Optical metrology
GB848404664A Pending GB8404664D0 (en) 1983-10-26 1984-02-22 Optical metrology

Country Status (1)

Country Link
GB (3) GB8328562D0 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8507843D0 (en) * 1985-03-26 1985-05-01 Vickers Plc Automated optical linewidth measurement
GB8512727D0 (en) * 1985-05-20 1985-06-26 Vickers Plc Optical metrology
GB8607592D0 (en) * 1986-03-26 1986-04-30 Int Computers Ltd Measuring resolution of cathode-ray tube
IES20010218A2 (en) * 2000-03-09 2001-09-19 Athlone Extrusions Dev Ltd A method of testing co-extruded panels

Also Published As

Publication number Publication date
GB2149098A (en) 1985-06-05
GB8404664D0 (en) 1984-03-28
GB8328562D0 (en) 1983-11-30
GB8424997D0 (en) 1984-11-07

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Legal Events

Date Code Title Description
732 Registration of transactions, instruments or events in the register (sect. 32/1977)
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19921003