GB2138843B - Reactive vapour deposition - Google Patents

Reactive vapour deposition

Info

Publication number
GB2138843B
GB2138843B GB08311495A GB8311495A GB2138843B GB 2138843 B GB2138843 B GB 2138843B GB 08311495 A GB08311495 A GB 08311495A GB 8311495 A GB8311495 A GB 8311495A GB 2138843 B GB2138843 B GB 2138843B
Authority
GB
United Kingdom
Prior art keywords
vapour deposition
reactive vapour
reactive
deposition
vapour
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB08311495A
Other versions
GB2138843A (en
GB8311495D0 (en
Inventor
Miles Patrick Drake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB08311495A priority Critical patent/GB2138843B/en
Publication of GB8311495D0 publication Critical patent/GB8311495D0/en
Publication of GB2138843A publication Critical patent/GB2138843A/en
Application granted granted Critical
Publication of GB2138843B publication Critical patent/GB2138843B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB08311495A 1983-04-27 1983-04-27 Reactive vapour deposition Expired GB2138843B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08311495A GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08311495A GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Publications (3)

Publication Number Publication Date
GB8311495D0 GB8311495D0 (en) 1983-06-02
GB2138843A GB2138843A (en) 1984-10-31
GB2138843B true GB2138843B (en) 1986-01-08

Family

ID=10541786

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08311495A Expired GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Country Status (1)

Country Link
GB (1) GB2138843B (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342619A (en) * 1964-04-16 1967-09-19 Westinghouse Electric Corp Method for growing germania films

Also Published As

Publication number Publication date
GB2138843A (en) 1984-10-31
GB8311495D0 (en) 1983-06-02

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee