GB8311495D0 - Film deposition - Google Patents

Film deposition

Info

Publication number
GB8311495D0
GB8311495D0 GB838311495A GB8311495A GB8311495D0 GB 8311495 D0 GB8311495 D0 GB 8311495D0 GB 838311495 A GB838311495 A GB 838311495A GB 8311495 A GB8311495 A GB 8311495A GB 8311495 D0 GB8311495 D0 GB 8311495D0
Authority
GB
United Kingdom
Prior art keywords
film deposition
deposition
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GB838311495A
Other versions
GB2138843A (en
GB2138843B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB08311495A priority Critical patent/GB2138843B/en
Publication of GB8311495D0 publication Critical patent/GB8311495D0/en
Publication of GB2138843A publication Critical patent/GB2138843A/en
Application granted granted Critical
Publication of GB2138843B publication Critical patent/GB2138843B/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB08311495A 1983-04-27 1983-04-27 Reactive vapour deposition Expired GB2138843B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB08311495A GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB08311495A GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Publications (3)

Publication Number Publication Date
GB8311495D0 true GB8311495D0 (en) 1983-06-02
GB2138843A GB2138843A (en) 1984-10-31
GB2138843B GB2138843B (en) 1986-01-08

Family

ID=10541786

Family Applications (1)

Application Number Title Priority Date Filing Date
GB08311495A Expired GB2138843B (en) 1983-04-27 1983-04-27 Reactive vapour deposition

Country Status (1)

Country Link
GB (1) GB2138843B (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3342619A (en) * 1964-04-16 1967-09-19 Westinghouse Electric Corp Method for growing germania films

Also Published As

Publication number Publication date
GB2138843A (en) 1984-10-31
GB2138843B (en) 1986-01-08

Similar Documents

Publication Publication Date Title
GB8420725D0 (en) Forming deposition film
GB2141584B (en) Thin film capacitor
GB8302743D0 (en) Film
GB8601878D0 (en) Film
GB8518833D0 (en) Forming moncrystalline thin film
GB8401356D0 (en) Coating
GB8601877D0 (en) Film
GB8427012D0 (en) Carrier film
GB8420531D0 (en) Substrate
GB8518834D0 (en) Forming moncrystalline thin film
GB2134008B (en) Coated substrate
GB8317607D0 (en) Film
GB2119970B (en) Film deposition equipment
GB8413825D0 (en) Coating
EP0149035A3 (en) Photographic roll-printer
JPS57165832A (en) Thin film
GB8411889D0 (en) Resin deposition
GB8418549D0 (en) Deposition
DE3461227D1 (en) Film cassette
GB8413803D0 (en) Cassette
GB8423251D0 (en) Coating
GB2154119B (en) Beancurd film
GB8305071D0 (en) Cassette
GB8508485D0 (en) Tape
GB8332325D0 (en) Thin film structure

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee