GB2127493A - An arrangement and a method for the rapid regeneration of self-contained cryopumps - Google Patents
An arrangement and a method for the rapid regeneration of self-contained cryopumps Download PDFInfo
- Publication number
- GB2127493A GB2127493A GB08323565A GB8323565A GB2127493A GB 2127493 A GB2127493 A GB 2127493A GB 08323565 A GB08323565 A GB 08323565A GB 8323565 A GB8323565 A GB 8323565A GB 2127493 A GB2127493 A GB 2127493A
- Authority
- GB
- United Kingdom
- Prior art keywords
- cryogenerator
- gas
- stage
- temperature
- contained
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000000034 method Methods 0.000 title claims description 25
- 230000008929 regeneration Effects 0.000 title description 8
- 238000011069 regeneration method Methods 0.000 title description 8
- 239000007789 gas Substances 0.000 claims description 50
- 238000009833 condensation Methods 0.000 claims description 15
- 230000005494 condensation Effects 0.000 claims description 14
- 238000010257 thawing Methods 0.000 claims description 10
- 230000001172 regenerating effect Effects 0.000 claims description 7
- 238000005086 pumping Methods 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000001816 cooling Methods 0.000 description 14
- 239000001257 hydrogen Substances 0.000 description 9
- 229910052739 hydrogen Inorganic materials 0.000 description 9
- 238000001179 sorption measurement Methods 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 239000003795 chemical substances by application Substances 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910000906 Bronze Inorganic materials 0.000 description 2
- 239000010974 bronze Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000010792 warming Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
- Y10S417/901—Cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CH550182 | 1982-09-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| GB8323565D0 GB8323565D0 (en) | 1983-10-05 |
| GB2127493A true GB2127493A (en) | 1984-04-11 |
Family
ID=4294670
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB08323565A Withdrawn GB2127493A (en) | 1982-09-17 | 1983-09-02 | An arrangement and a method for the rapid regeneration of self-contained cryopumps |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US4485631A (enExample) |
| DE (1) | DE3330146A1 (enExample) |
| FR (1) | FR2533270A1 (enExample) |
| GB (1) | GB2127493A (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985005410A1 (en) * | 1984-05-18 | 1985-12-05 | Helix Technology Corporation | Cryopump with improved second stage array |
| EP0349577B1 (en) * | 1987-01-27 | 1994-11-30 | Helix Technology Corporation | An optimally staged cryopump |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4679401A (en) * | 1985-07-03 | 1987-07-14 | Helix Technology Corporation | Temperature control of cryogenic systems |
| US4718241A (en) * | 1985-10-31 | 1988-01-12 | Helix Technology Corporation | Cryopump with quicker adsorption |
| US4763483A (en) * | 1986-07-17 | 1988-08-16 | Helix Technology Corporation | Cryopump and method of starting the cryopump |
| US4724677A (en) * | 1986-10-09 | 1988-02-16 | Foster Christopher A | Continuous cryopump with a device for regenerating the cryosurface |
| US5010737A (en) * | 1989-03-30 | 1991-04-30 | Aisin Seiki Kabushiki Kaisha | Multi-headed cryopump apparatus |
| JPH03258976A (ja) * | 1990-03-08 | 1991-11-19 | Mitsubishi Electric Corp | 真空装置における真空の再生方法 |
| US5211022A (en) * | 1991-05-17 | 1993-05-18 | Helix Technology Corporation | Cryopump with differential pumping capability |
| AU2675192A (en) * | 1991-09-19 | 1993-04-27 | United States Of America, As Represented By The Secretary Of The Department Of Health And Human Services, The | Miniature cryosorption vacuum pump |
| DE19547030A1 (de) * | 1995-12-15 | 1997-06-19 | Leybold Ag | Tieftemperatur-Refrigerator mit einem Kaltkopf sowie Verfahren zur Optimierung des Kaltkopfes für einen gewünschten Temperaturbereich |
| US6116032A (en) * | 1999-01-12 | 2000-09-12 | Applied Materials, Inc. | Method for reducing particulate generation from regeneration of cryogenic vacuum pumps |
| US7191600B2 (en) * | 2002-03-05 | 2007-03-20 | Shi-Apd Cryogenics, Inc. | Fast warm up pulse tube |
| CN100458310C (zh) * | 2004-08-25 | 2009-02-04 | 爱发科低温泵株式会社 | 蓄冷器及克莱欧泵 |
| US7275901B2 (en) * | 2004-11-24 | 2007-10-02 | Blaine Carroll | Combination passenger and cargo carrier |
| JP5462272B2 (ja) * | 2009-10-05 | 2014-04-02 | キヤノンアネルバ株式会社 | 基板冷却装置、スパッタリング装置および電子デバイスの製造方法 |
| CN120231712B (zh) * | 2025-06-03 | 2025-09-23 | 合肥航谱时代科技有限公司 | 斯特林低温真空泵及其控制系统 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3218815A (en) * | 1964-06-17 | 1965-11-23 | Little Inc A | Cryogenic refrigeration apparatus operating on an expansible fluid and embodying a regenerator |
| US3338063A (en) * | 1966-01-17 | 1967-08-29 | 500 Inc | Cryopanels for cryopumps and cryopumps incorporating them |
| CH476215A (de) * | 1968-08-20 | 1969-07-31 | Balzers Patent Beteilig Ag | Verfahren zum Betrieb einer kryogenen Pumpstufe und Hochvakuumpumpanordnung zur Durchführung des Verfahrens |
| BE791888A (fr) * | 1971-11-26 | 1973-05-24 | Air Liquide | Dispositif de cryopompage |
| SU547549A1 (ru) * | 1974-07-05 | 1977-02-25 | Предприятие П/Я А-3605 | Адсорбционный насос |
| US4055960A (en) * | 1976-07-06 | 1977-11-01 | St Clair John Craig | Stirling cycle engine |
| IT1174725B (it) * | 1978-03-16 | 1987-07-01 | Galileo Spa Off | Apparecchiatura criogenica per bassissime temperature |
-
1983
- 1983-08-20 DE DE19833330146 patent/DE3330146A1/de not_active Withdrawn
- 1983-09-02 GB GB08323565A patent/GB2127493A/en not_active Withdrawn
- 1983-09-13 US US06/531,690 patent/US4485631A/en not_active Expired - Fee Related
- 1983-09-16 FR FR8314759A patent/FR2533270A1/fr active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1985005410A1 (en) * | 1984-05-18 | 1985-12-05 | Helix Technology Corporation | Cryopump with improved second stage array |
| EP0349577B1 (en) * | 1987-01-27 | 1994-11-30 | Helix Technology Corporation | An optimally staged cryopump |
Also Published As
| Publication number | Publication date |
|---|---|
| US4485631A (en) | 1984-12-04 |
| GB8323565D0 (en) | 1983-10-05 |
| DE3330146A1 (de) | 1984-03-22 |
| FR2533270A1 (fr) | 1984-03-23 |
| FR2533270B3 (enExample) | 1985-02-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| GB2127493A (en) | An arrangement and a method for the rapid regeneration of self-contained cryopumps | |
| US5513499A (en) | Method and apparatus for cryopump regeneration using turbomolecular pump | |
| US4724677A (en) | Continuous cryopump with a device for regenerating the cryosurface | |
| US5582017A (en) | Cryopump | |
| US4679401A (en) | Temperature control of cryogenic systems | |
| US4597267A (en) | Fast cycle water vapor cryopump | |
| US5862671A (en) | Purge and rough cryopump regeneration process, cryopump and controller | |
| JP3888691B2 (ja) | クライオポンプの再生方法及びクライオポンプ | |
| WO1994019608A1 (en) | Cryogenic vacuum pump with electronically controlled regeneration | |
| US4535597A (en) | Fast cycle water vapor cryopump | |
| US6216467B1 (en) | Cryogenic refrigerator with a gaseous contaminant removal system | |
| JP4084418B2 (ja) | 第一群気体用絞りサイクル・クライオポンプ・システム | |
| US4339927A (en) | Gas-driven fluid flow control valve and cryopump incorporating the same | |
| JP4394717B2 (ja) | 吸着冷凍システムの作動方法 | |
| US3364654A (en) | Ultrahigh vacuum pumping process and apparatus | |
| JP2001510523A (ja) | 改良型シールド付きクライオポンプ | |
| US5775109A (en) | Enhanced cooldown of multiple cryogenic refrigerators supplied by a common compressor | |
| JP2005515386A (ja) | ２段パルス管冷凍機を備えたクライオポンプ | |
| JP4210568B2 (ja) | 冷凍方法及びシステム | |
| US5829270A (en) | Cryogenics | |
| JP3029243B2 (ja) | クライオポンプの再生方法及びクライオポンプ | |
| CN100579619C (zh) | 改进的低温泵 | |
| US4860546A (en) | Vacuum system with molecular flow line | |
| JPH0893643A (ja) | クライオポンプ | |
| CN119573293B (zh) | 工质净化装置及制冷系统 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WAP | Application withdrawn, taken to be withdrawn or refused ** after publication under section 16(1) |