GB2052317B - Rotors for turbo-molecular pumps - Google Patents

Rotors for turbo-molecular pumps

Info

Publication number
GB2052317B
GB2052317B GB8013318A GB8013318A GB2052317B GB 2052317 B GB2052317 B GB 2052317B GB 8013318 A GB8013318 A GB 8013318A GB 8013318 A GB8013318 A GB 8013318A GB 2052317 B GB2052317 B GB 2052317B
Authority
GB
United Kingdom
Prior art keywords
rotors
turbo
molecular pumps
pumps
molecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8013318A
Other languages
English (en)
Other versions
GB2052317A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of GB2052317A publication Critical patent/GB2052317A/en
Application granted granted Critical
Publication of GB2052317B publication Critical patent/GB2052317B/en
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/02—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass turbine or like blades from one piece
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
GB8013318A 1979-06-11 1980-04-23 Rotors for turbo-molecular pumps Expired GB2052317B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792923632 DE2923632A1 (de) 1979-06-11 1979-06-11 Verfahren zur herstellung eines schaufelkranzes fuer den rotor einer tubomolekularpumpe und mit schaufelkraenzen dieser art ausgeruesteter rotor

Publications (2)

Publication Number Publication Date
GB2052317A GB2052317A (en) 1981-01-28
GB2052317B true GB2052317B (en) 1982-12-01

Family

ID=6072988

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8013318A Expired GB2052317B (en) 1979-06-11 1980-04-23 Rotors for turbo-molecular pumps

Country Status (5)

Country Link
JP (1) JPS56593A (enrdf_load_stackoverflow)
CH (1) CH646229A5 (enrdf_load_stackoverflow)
DE (1) DE2923632A1 (enrdf_load_stackoverflow)
FR (1) FR2458351B1 (enrdf_load_stackoverflow)
GB (1) GB2052317B (enrdf_load_stackoverflow)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58190590U (ja) * 1982-06-14 1983-12-17 東京ブラインド工業株式会社 間仕切り
JPS6136479A (ja) * 1983-11-30 1986-02-21 八木　清行 折戸式自動扉の駆動装置
DE3507274A1 (de) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Scheiben mit schaufeln hoher stabilitaet fuer turbomolekularpumpen
JPH01195992A (ja) * 1988-01-30 1989-08-07 Naoto Ibarada ターボ分子ポンプの動翼
IT1238201B (it) * 1989-11-03 1993-07-09 Varian Spa Metodo di fabbricazione mediante elettroerosione di una girante o di un rotore a una o piu' giranti di una turbopompa, particolarmente di una pompa turbomolecolare, e prodotti cosi' ottenuti.
IT1293907B1 (it) * 1997-05-28 1999-03-11 Varian Spa Procedimento di fresatura di rotori di pompe turbomolecolari con inglobamento in resina del particolare da fresare.
JP3092063B2 (ja) 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
DE10053664A1 (de) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanische kinetische Vakuumpumpe
EP1249612B1 (en) * 2001-03-15 2004-01-28 VARIAN S.p.A. Method of manufacturing a stator stage for a turbine pump
CN101438063A (zh) * 2006-04-29 2009-05-20 欧瑞康莱宝真空公司 制备涡轮分子泵转子或定子的方法
DE102009015652A1 (de) * 2009-03-31 2010-10-07 Light Style Gmbh Verfahren zur Herstellung eines Gebrauchsproduktes aus Aluminium und danach hergestelltes Produkt
DE102011117920B4 (de) * 2011-11-09 2013-08-01 Voith Patent Gmbh Verfahren zum Herstellen eines Schaufelrades, sowie danach hergestelltes Schaufelrad
DE102014114326A1 (de) * 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
EP3091235B1 (de) * 2015-05-04 2020-03-11 Pfeiffer Vacuum Gmbh Rotorscheibe
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH159747A (fr) * 1930-01-11 1933-01-31 Westinghouse Electric Corp Hélice et procédé pour sa fabrication.
FR81075E (fr) * 1962-01-23 1963-07-26 Snecma Pompe à vide turbomoléculaire perfectionnée
US3623826A (en) * 1969-10-27 1971-11-30 Sargent Welch Scientific Co Turbine pump with improved rotor and seal constructions
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
JPS5227367Y1 (enrdf_load_stackoverflow) * 1975-09-30 1977-06-22
DE2627309A1 (de) * 1976-06-18 1977-12-22 Daimler Benz Ag Verfahren und vorrichtung zur herstellung eines keramischen turbinenrades
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe

Also Published As

Publication number Publication date
FR2458351A1 (fr) 1981-01-02
JPS56593A (en) 1981-01-07
GB2052317A (en) 1981-01-28
CH646229A5 (de) 1984-11-15
JPS649475B2 (enrdf_load_stackoverflow) 1989-02-17
FR2458351B1 (fr) 1985-07-12
DE2923632A1 (de) 1980-12-18

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Legal Events

Date Code Title Description
PE20 Patent expired after termination of 20 years

Effective date: 20000422