GB201712067D0 - System for chemical and/or electrolytic surface treatment - Google Patents

System for chemical and/or electrolytic surface treatment

Info

Publication number
GB201712067D0
GB201712067D0 GBGB1712067.6A GB201712067A GB201712067D0 GB 201712067 D0 GB201712067 D0 GB 201712067D0 GB 201712067 A GB201712067 A GB 201712067A GB 201712067 D0 GB201712067 D0 GB 201712067D0
Authority
GB
United Kingdom
Prior art keywords
chemical
surface treatment
electrolytic surface
electrolytic
treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1712067.6A
Other versions
GB2564894A (en
GB2564894B (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semsysco GmbH
Original Assignee
Semsysco GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semsysco GmbH filed Critical Semsysco GmbH
Priority to GB1712067.6A priority Critical patent/GB2564894B/en
Publication of GB201712067D0 publication Critical patent/GB201712067D0/en
Priority to JP2018139054A priority patent/JP7229690B2/en
Priority to TW109142185A priority patent/TWI751817B/en
Priority to TW108147586A priority patent/TWI711726B/en
Priority to TW107125886A priority patent/TWI678437B/en
Priority to CN201810847212.1A priority patent/CN109306476A/en
Publication of GB2564894A publication Critical patent/GB2564894A/en
Application granted granted Critical
Publication of GB2564894B publication Critical patent/GB2564894B/en
Priority to JP2023021450A priority patent/JP2023062067A/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005—Apparatus specially adapted for electrolytic conversion coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/02—Anodisation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/02—Tanks; Installations therefor
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/12—Process control or regulation
    • C25D21/14—Controlled addition of electrolyte components
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D21/00—Processes for servicing or operating cells for electrolytic coating
    • C25D21/16—Regeneration of process solutions
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00—Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrochemistry (AREA)
  • Automation & Control Theory (AREA)
  • Sustainable Development (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Chemically Coating (AREA)
GB1712067.6A 2017-07-27 2017-07-27 System for chemical and/or electrolytic surface treatment Active GB2564894B (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
GB1712067.6A GB2564894B (en) 2017-07-27 2017-07-27 System for chemical and/or electrolytic surface treatment
JP2018139054A JP7229690B2 (en) 2017-07-27 2018-07-25 System for chemical and/or electrolytic surface treatment
TW109142185A TWI751817B (en) 2017-07-27 2018-07-26 System for chemical and/or electrolytic surface treatment
TW108147586A TWI711726B (en) 2017-07-27 2018-07-26 System for chemical and/or electrolytic surface treatment
TW107125886A TWI678437B (en) 2017-07-27 2018-07-26 System for chemical and/or electrolytic surface treatment
CN201810847212.1A CN109306476A (en) 2017-07-27 2018-07-27 For chemistry and/or the system of electrolytic surface processing
JP2023021450A JP2023062067A (en) 2017-07-27 2023-02-15 System for chemical and/or electrolytic surface treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1712067.6A GB2564894B (en) 2017-07-27 2017-07-27 System for chemical and/or electrolytic surface treatment

Publications (3)

Publication Number Publication Date
GB201712067D0 true GB201712067D0 (en) 2017-09-13
GB2564894A GB2564894A (en) 2019-01-30
GB2564894B GB2564894B (en) 2021-11-24

Family

ID=59778981

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1712067.6A Active GB2564894B (en) 2017-07-27 2017-07-27 System for chemical and/or electrolytic surface treatment

Country Status (4)

Country Link
JP (2) JP7229690B2 (en)
CN (1) CN109306476A (en)
GB (1) GB2564894B (en)
TW (3) TWI711726B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3828316B1 (en) * 2019-11-26 2023-09-13 Semsysco GmbH Distribution system for a process fluid for chemical and/or electrolytic surface treatment of a substrate
EP4286560A1 (en) * 2022-05-31 2023-12-06 Semsysco GmbH Module kit for a chemical and/or electrolytic surface treatment of a substrate

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6299753B1 (en) 1999-09-01 2001-10-09 Applied Materials, Inc. Double pressure vessel chemical dispenser unit
JP2002115096A (en) 2000-10-10 2002-04-19 Applied Materials Inc Plating apparatus
WO2004081261A2 (en) * 2003-03-11 2004-09-23 Ebara Corporation Plating apparatus
JP4553632B2 (en) 2004-05-21 2010-09-29 株式会社荏原製作所 Substrate plating method and substrate plating apparatus
US20060191784A1 (en) 2005-02-28 2006-08-31 Hitachi Global Storage Technologies Methods and systems for electroplating wafers
JP6397620B2 (en) 2012-12-11 2018-09-26 ノベラス・システムズ・インコーポレーテッドＮｏｖｅｌｌｕｓ Ｓｙｓｔｅｍｓ Ｉｎｃｏｒｐｏｒａｔｅｄ Electroplating method and apparatus
CN205171008U (en) 2015-09-30 2016-04-20 东莞市威力固电路板设备有限公司 Plating bath liquid level control system

Also Published As

Publication number Publication date
TWI751817B (en) 2022-01-01
JP2023062067A (en) 2023-05-02
JP7229690B2 (en) 2023-02-28
CN109306476A (en) 2019-02-05
TW202014559A (en) 2020-04-16
JP2019052370A (en) 2019-04-04
GB2564894A (en) 2019-01-30
GB2564894B (en) 2021-11-24
TWI678437B (en) 2019-12-01
TWI711726B (en) 2020-12-01
TW202120749A (en) 2021-06-01
TW201910562A (en) 2019-03-16

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