GB1534140A - Floating convection barrier for evaporation source - Google Patents
Floating convection barrier for evaporation sourceInfo
- Publication number
- GB1534140A GB1534140A GB53292/75A GB5329275A GB1534140A GB 1534140 A GB1534140 A GB 1534140A GB 53292/75 A GB53292/75 A GB 53292/75A GB 5329275 A GB5329275 A GB 5329275A GB 1534140 A GB1534140 A GB 1534140A
- Authority
- GB
- United Kingdom
- Prior art keywords
- uranium
- electron beam
- crucible
- isotopes
- vapour
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000008020 evaporation Effects 0.000 title abstract 2
- 238000001704 evaporation Methods 0.000 title abstract 2
- 230000004888 barrier function Effects 0.000 title 1
- 229910052770 Uranium Inorganic materials 0.000 abstract 8
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 abstract 8
- 238000010894 electron beam technology Methods 0.000 abstract 4
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D59/00—Separation of different isotopes of the same chemical element
- B01D59/34—Separation by photochemical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Physical Vapour Deposition (AREA)
- Manufacture And Refinement Of Metals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/538,881 US3996469A (en) | 1975-01-06 | 1975-01-06 | Floating convection barrier for evaporation source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1534140A true GB1534140A (en) | 1978-11-29 |
Family
ID=24148815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB53292/75A Expired GB1534140A (en) | 1975-01-06 | 1975-12-31 | Floating convection barrier for evaporation source |
Country Status (14)
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4124801A (en) * | 1976-09-24 | 1978-11-07 | Phrasor Technology Incorporated | Apparatus and process for separating materials |
| US4251725A (en) * | 1979-08-06 | 1981-02-17 | Honeywell Inc. | Programmed sample pyrolysis for mass spectrometer |
| US4472453A (en) * | 1983-07-01 | 1984-09-18 | Rca Corporation | Process for radiation free electron beam deposition |
| JPS6270576A (ja) * | 1985-09-21 | 1987-04-01 | Kawasaki Steel Corp | 大量蒸気流発生用蒸発源装置 |
| CA2023044A1 (en) * | 1990-08-09 | 1992-02-10 | Naoum Araj | Vessel for evaporation of low-temperature melting material |
| DE102021129537A1 (de) | 2021-11-12 | 2023-05-17 | VON ARDENNE Asset GmbH & Co. KG | Verfahren, Verdampfungsanordnung und Verwendung einer Konvektionsbarriere |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3329524A (en) * | 1963-06-12 | 1967-07-04 | Temescal Metallurgical Corp | Centrifugal-type vapor source |
| CH452313A (de) * | 1965-12-18 | 1968-05-31 | Balzers Patent Beteilig Ag | Vorrichtung zur Verdampfung von Stoffen im Vakuum |
| US3414655A (en) * | 1966-01-26 | 1968-12-03 | Nat Res Corp | Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material |
| SE345881B (US08124317-20120228-C00060.png) * | 1969-06-13 | 1972-06-12 | Aga Ab | |
| US3772519A (en) * | 1970-03-25 | 1973-11-13 | Jersey Nuclear Avco Isotopes | Method of and apparatus for the separation of isotopes |
-
1975
- 1975-01-06 US US05/538,881 patent/US3996469A/en not_active Expired - Lifetime
- 1975-12-24 IL IL48720A patent/IL48720A/xx unknown
- 1975-12-24 AU AU87884/75A patent/AU508034B2/en not_active Expired
- 1975-12-30 NL NL7515181A patent/NL7515181A/xx not_active Application Discontinuation
- 1975-12-30 DE DE19752559065 patent/DE2559065A1/de not_active Withdrawn
- 1975-12-30 SE SE7514744A patent/SE7514744L/xx unknown
- 1975-12-31 GB GB53292/75A patent/GB1534140A/en not_active Expired
- 1975-12-31 CA CA242,882A patent/CA1043874A/en not_active Expired
-
1976
- 1976-01-05 FR FR7600083A patent/FR2296457A1/fr active Granted
- 1976-01-05 ES ES444100A patent/ES444100A1/es not_active Expired
- 1976-01-05 IT IT47526/76A patent/IT1052892B/it active
- 1976-01-06 CH CH7076A patent/CH603225A5/xx not_active IP Right Cessation
- 1976-01-06 BE BE163325A patent/BE837327A/xx unknown
- 1976-01-06 JP JP51000103A patent/JPS5193781A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| AU508034B2 (en) | 1980-03-06 |
| AU8788475A (en) | 1977-06-30 |
| SE7514744L (sv) | 1976-07-07 |
| CH603225A5 (US08124317-20120228-C00060.png) | 1978-08-15 |
| FR2296457A1 (fr) | 1976-07-30 |
| IL48720A0 (en) | 1976-03-31 |
| ES444100A1 (es) | 1977-08-16 |
| BE837327A (fr) | 1976-05-03 |
| IL48720A (en) | 1979-01-31 |
| IT1052892B (it) | 1981-07-20 |
| FR2296457B1 (US08124317-20120228-C00060.png) | 1979-07-20 |
| NL7515181A (nl) | 1976-07-08 |
| US3996469A (en) | 1976-12-07 |
| JPS5193781A (US08124317-20120228-C00060.png) | 1976-08-17 |
| CA1043874A (en) | 1978-12-05 |
| DE2559065A1 (de) | 1976-07-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |