GB1513362A - Electron beam generating apparatus - Google Patents
Electron beam generating apparatusInfo
- Publication number
- GB1513362A GB1513362A GB5768/77A GB576877A GB1513362A GB 1513362 A GB1513362 A GB 1513362A GB 5768/77 A GB5768/77 A GB 5768/77A GB 576877 A GB576877 A GB 576877A GB 1513362 A GB1513362 A GB 1513362A
- Authority
- GB
- United Kingdom
- Prior art keywords
- frame
- window frame
- feb
- window
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
- H01J33/02—Details
- H01J33/04—Windows
Landscapes
- Electron Sources, Ion Sources (AREA)
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2606169A DE2606169C2 (de) | 1976-02-17 | 1976-02-17 | Elektronenaustrittsfenster für eine Elektronenstrahlquelle |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1513362A true GB1513362A (en) | 1978-06-07 |
Family
ID=5970032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5768/77A Expired GB1513362A (en) | 1976-02-17 | 1977-02-11 | Electron beam generating apparatus |
Country Status (5)
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2166284A (en) * | 1984-10-26 | 1986-04-30 | Polymer Physik Gmbh | Electron beam irradiation apparatus |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4631444A (en) * | 1982-09-29 | 1986-12-23 | Tetra Pak Developpement Sa | Readily attachable and detachable electron-beam permeable window assembly |
JPS60129700A (ja) * | 1983-12-16 | 1985-07-10 | 日新ハイボルテ−ジ株式会社 | 電子線照射装置 |
DE3403726A1 (de) * | 1984-02-03 | 1985-08-08 | Polymer-Physik GmbH & Co KG, 2844 Lemförde | Verfahren und vorrichtung zur entschwefelung und denitrierung von rauchgasen durch elektronenbestrahlung |
US4694222A (en) * | 1984-04-02 | 1987-09-15 | Rpc Industries | Ion plasma electron gun |
GB2159322A (en) * | 1984-05-18 | 1985-11-27 | Philips Electronic Associated | Electron image projector |
JPS6138500A (ja) * | 1984-07-30 | 1986-02-24 | 日新ハイボルテ−ジ株式会社 | 照射窓 |
ATA331185A (de) * | 1985-11-13 | 1994-05-15 | Ims Ionen Mikrofab Syst | Verfahren zum stabilisieren von masken |
DE3602865C2 (de) * | 1986-01-31 | 1995-12-21 | Polymer Physik Gmbh | Verfahren und Vorrichtung zur Beseitigung von Restmonomeren in Verpackungsfolien durch Elektronenbestrahlung |
DE3709462A1 (de) * | 1987-03-23 | 1988-10-06 | Polymer Physik Gmbh | Ein- oder mehrstufiger elektronenbeschleuniger mit sprungstrahl |
JPS63285499A (ja) * | 1987-05-18 | 1988-11-22 | Nissin High Voltage Co Ltd | ロ−ル方式窓箔自動交換装置 |
AT393925B (de) * | 1987-06-02 | 1992-01-10 | Ims Ionen Mikrofab Syst | Anordnung zur durchfuehrung eines verfahrens zum positionieren der abbildung der auf einer maske befindlichen struktur auf ein substrat, und verfahren zum ausrichten von auf einer maske angeordneten markierungen auf markierungen, die auf einem traeger angeordnet sind |
US5093602A (en) * | 1989-11-17 | 1992-03-03 | Charged Injection Corporation | Methods and apparatus for dispersing a fluent material utilizing an electron beam |
CA2094673C (en) * | 1992-10-01 | 2000-10-24 | Joseph R. Lovin | Hydronic cooling of particle accelerator window |
DE4432984C2 (de) * | 1994-09-16 | 1996-08-14 | Messer Griesheim Schweistechni | Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen |
DE19518623C2 (de) * | 1995-05-24 | 2002-12-05 | Igm Robotersysteme Ag Wiener N | Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen |
US5608224A (en) * | 1995-08-15 | 1997-03-04 | Alvord; C. William | Target changer for an accelerator |
SE533567C2 (sv) * | 2009-03-11 | 2010-10-26 | Tetra Laval Holdings & Finance | Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner |
WO2011011278A1 (en) * | 2009-07-20 | 2011-01-27 | Advanced Electron Beams, Inc. | Emitter exit window |
JP6731328B2 (ja) * | 2016-11-09 | 2020-07-29 | 日立造船株式会社 | 電子線照射装置 |
EP3528273B1 (de) * | 2018-02-20 | 2023-08-23 | Bühler AG | Vorrichtung und verfahren zum pasteurisieren und/oder sterilisieren von partikelförmigem gut |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE333700A (US20100012521A1-20100121-C00001.png) * | 1925-04-28 | |||
FR964172A (US20100012521A1-20100121-C00001.png) * | 1946-11-08 | 1950-08-08 | ||
NL234550A (US20100012521A1-20100121-C00001.png) * | 1957-12-23 | |||
US3440466A (en) * | 1965-09-30 | 1969-04-22 | Ford Motor Co | Window support and heat sink for electron-discharge device |
GB1175539A (en) * | 1966-11-04 | 1969-12-23 | John De Sola Mosely | Improvements in or relating to Electron and Heavy Particle Beam Scanning Systems |
US3742230A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask support substrate |
-
1976
- 1976-02-17 DE DE2606169A patent/DE2606169C2/de not_active Expired
-
1977
- 1977-02-09 US US05/767,027 patent/US4112307A/en not_active Expired - Lifetime
- 1977-02-10 FR FR7703814A patent/FR2341941A1/fr active Granted
- 1977-02-11 GB GB5768/77A patent/GB1513362A/en not_active Expired
- 1977-02-14 JP JP52014331A patent/JPS5935500B2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2166284A (en) * | 1984-10-26 | 1986-04-30 | Polymer Physik Gmbh | Electron beam irradiation apparatus |
Also Published As
Publication number | Publication date |
---|---|
US4112307A (en) | 1978-09-05 |
JPS5299763A (en) | 1977-08-22 |
DE2606169A1 (de) | 1977-08-18 |
DE2606169C2 (de) | 1983-09-01 |
FR2341941A1 (fr) | 1977-09-16 |
FR2341941B1 (US20100012521A1-20100121-C00001.png) | 1982-11-26 |
JPS5935500B2 (ja) | 1984-08-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950211 |