GB1513362A - Electron beam generating apparatus - Google Patents

Electron beam generating apparatus

Info

Publication number
GB1513362A
GB1513362A GB5768/77A GB576877A GB1513362A GB 1513362 A GB1513362 A GB 1513362A GB 5768/77 A GB5768/77 A GB 5768/77A GB 576877 A GB576877 A GB 576877A GB 1513362 A GB1513362 A GB 1513362A
Authority
GB
United Kingdom
Prior art keywords
frame
window frame
feb
window
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5768/77A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Polymer Physik GmbH and Co KG
Original Assignee
Polymer Physik GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Polymer Physik GmbH and Co KG filed Critical Polymer Physik GmbH and Co KG
Publication of GB1513362A publication Critical patent/GB1513362A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02—Details
    • H01J33/04—Windows

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • X-Ray Techniques (AREA)
GB5768/77A 1976-02-17 1977-02-11 Electron beam generating apparatus Expired GB1513362A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2606169A DE2606169C2 (de) 1976-02-17 1976-02-17 Elektronenaustrittsfenster für eine Elektronenstrahlquelle

Publications (1)

Publication Number Publication Date
GB1513362A true GB1513362A (en) 1978-06-07

Family

ID=5970032

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5768/77A Expired GB1513362A (en) 1976-02-17 1977-02-11 Electron beam generating apparatus

Country Status (5)

Country Link
US (1) US4112307A (US08063081-20111122-C00044.png)
JP (1) JPS5935500B2 (US08063081-20111122-C00044.png)
DE (1) DE2606169C2 (US08063081-20111122-C00044.png)
FR (1) FR2341941A1 (US08063081-20111122-C00044.png)
GB (1) GB1513362A (US08063081-20111122-C00044.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166284A (en) * 1984-10-26 1986-04-30 Polymer Physik Gmbh Electron beam irradiation apparatus

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4631444A (en) * 1982-09-29 1986-12-23 Tetra Pak Developpement Sa Readily attachable and detachable electron-beam permeable window assembly
JPS60129700A (ja) * 1983-12-16 1985-07-10 日新ハイボルテ−ジ株式会社 電子線照射装置
DE3403726A1 (de) * 1984-02-03 1985-08-08 Polymer-Physik GmbH & Co KG, 2844 Lemförde Verfahren und vorrichtung zur entschwefelung und denitrierung von rauchgasen durch elektronenbestrahlung
US4694222A (en) * 1984-04-02 1987-09-15 Rpc Industries Ion plasma electron gun
GB2159322A (en) * 1984-05-18 1985-11-27 Philips Electronic Associated Electron image projector
JPS6138500A (ja) * 1984-07-30 1986-02-24 日新ハイボルテ−ジ株式会社 照射窓
ATA331185A (de) * 1985-11-13 1994-05-15 Ims Ionen Mikrofab Syst Verfahren zum stabilisieren von masken
DE3602865C2 (de) * 1986-01-31 1995-12-21 Polymer Physik Gmbh Verfahren und Vorrichtung zur Beseitigung von Restmonomeren in Verpackungsfolien durch Elektronenbestrahlung
DE3709462A1 (de) * 1987-03-23 1988-10-06 Polymer Physik Gmbh Ein- oder mehrstufiger elektronenbeschleuniger mit sprungstrahl
JPS63285499A (ja) * 1987-05-18 1988-11-22 Nissin High Voltage Co Ltd ロ−ル方式窓箔自動交換装置
AT393925B (de) * 1987-06-02 1992-01-10 Ims Ionen Mikrofab Syst Anordnung zur durchfuehrung eines verfahrens zum positionieren der abbildung der auf einer maske befindlichen struktur auf ein substrat, und verfahren zum ausrichten von auf einer maske angeordneten markierungen auf markierungen, die auf einem traeger angeordnet sind
US5093602A (en) * 1989-11-17 1992-03-03 Charged Injection Corporation Methods and apparatus for dispersing a fluent material utilizing an electron beam
CA2094673C (en) * 1992-10-01 2000-10-24 Joseph R. Lovin Hydronic cooling of particle accelerator window
DE4432984C2 (de) * 1994-09-16 1996-08-14 Messer Griesheim Schweistechni Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen
DE19518623C2 (de) * 1995-05-24 2002-12-05 Igm Robotersysteme Ag Wiener N Vorrichtung zum Bestrahlen von Oberflächen mit Elektronen
US5608224A (en) * 1995-08-15 1997-03-04 Alvord; C. William Target changer for an accelerator
SE533567C2 (sv) * 2009-03-11 2010-10-26 Tetra Laval Holdings & Finance Förfarande för montering av ett fönster för utgående elektroner och en fönsterenhet för utgående elektroner
WO2011011278A1 (en) * 2009-07-20 2011-01-27 Advanced Electron Beams, Inc. Emitter exit window
JP6731328B2 (ja) * 2016-11-09 2020-07-29 日立造船株式会社 電子線照射装置
EP3528273B1 (de) * 2018-02-20 2023-08-23 Bühler AG Vorrichtung und verfahren zum pasteurisieren und/oder sterilisieren von partikelförmigem gut

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE333700A (US08063081-20111122-C00044.png) * 1925-04-28
FR964172A (US08063081-20111122-C00044.png) * 1946-11-08 1950-08-08
BE573614A (US08063081-20111122-C00044.png) * 1957-12-23
US3440466A (en) * 1965-09-30 1969-04-22 Ford Motor Co Window support and heat sink for electron-discharge device
GB1175539A (en) * 1966-11-04 1969-12-23 John De Sola Mosely Improvements in or relating to Electron and Heavy Particle Beam Scanning Systems
US3742230A (en) * 1972-06-29 1973-06-26 Massachusetts Inst Technology Soft x-ray mask support substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2166284A (en) * 1984-10-26 1986-04-30 Polymer Physik Gmbh Electron beam irradiation apparatus

Also Published As

Publication number Publication date
DE2606169C2 (de) 1983-09-01
DE2606169A1 (de) 1977-08-18
JPS5935500B2 (ja) 1984-08-29
FR2341941B1 (US08063081-20111122-C00044.png) 1982-11-26
FR2341941A1 (fr) 1977-09-16
US4112307A (en) 1978-09-05
JPS5299763A (en) 1977-08-22

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee

Effective date: 19950211