GB1486171A - Plasma gun for ionmilling machine - Google Patents
Plasma gun for ionmilling machineInfo
- Publication number
- GB1486171A GB1486171A GB1544/76A GB154476A GB1486171A GB 1486171 A GB1486171 A GB 1486171A GB 1544/76 A GB1544/76 A GB 1544/76A GB 154476 A GB154476 A GB 154476A GB 1486171 A GB1486171 A GB 1486171A
- Authority
- GB
- United Kingdom
- Prior art keywords
- electrode
- plasma
- chamber
- opposed
- gas filling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000992 sputter etching Methods 0.000 title abstract 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- 239000007789 gas Substances 0.000 abstract 2
- 150000002500 ions Chemical class 0.000 abstract 2
- 229910052582 BN Inorganic materials 0.000 abstract 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 239000011888 foil Substances 0.000 abstract 1
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract 1
- 239000011819 refractory material Substances 0.000 abstract 1
- 239000012858 resilient material Substances 0.000 abstract 1
- 239000013077 target material Substances 0.000 abstract 1
- 229910052724 xenon Inorganic materials 0.000 abstract 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Electron Sources, Ion Sources (AREA)
- Welding Or Cutting Using Electron Beams (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US05/571,659 US3995186A (en) | 1975-04-25 | 1975-04-25 | Ion-plasma gun for ion-milling machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1486171A true GB1486171A (en) | 1977-09-21 |
Family
ID=24284562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1544/76A Expired GB1486171A (en) | 1975-04-25 | 1976-01-15 | Plasma gun for ionmilling machine |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US3995186A (enExample) |
| JP (1) | JPS51138998A (enExample) |
| CA (1) | CA1039363A (enExample) |
| CH (1) | CH596732A5 (enExample) |
| DE (1) | DE2617042A1 (enExample) |
| FR (1) | FR2308460A1 (enExample) |
| GB (1) | GB1486171A (enExample) |
| IT (1) | IT1086435B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4495399A (en) * | 1981-03-26 | 1985-01-22 | Cann Gordon L | Micro-arc milling of metallic and non-metallic substrates |
| US4937456A (en) * | 1988-10-17 | 1990-06-26 | The Boeing Company | Dielectric coated ion thruster |
| US6123093A (en) * | 1998-04-30 | 2000-09-26 | D'antonio Consultants International, Inc. | System for controlling fluid flow |
| USD535673S1 (en) * | 2004-01-16 | 2007-01-23 | Thermal Dynamics Corporation | Gas distributor for a plasma arc torch |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1263201B (de) * | 1959-11-14 | 1968-03-14 | Kralovopolska Strojirna Zd Y C | Vorrichtung zur Erzeugung und Aufrechterhaltung eines im Inneren eines laenglichen Fluessigkeitswirbels brennenden elektrischen Lichtbogens |
| US3347698A (en) * | 1964-01-10 | 1967-10-17 | Metco Inc | Radio frequency plasma flame spraying |
| US3579028A (en) * | 1968-10-23 | 1971-05-18 | Nasa | Converging-barrel plasma accelerator |
-
1975
- 1975-04-25 US US05/571,659 patent/US3995186A/en not_active Expired - Lifetime
-
1976
- 1976-01-13 CA CA243,458A patent/CA1039363A/en not_active Expired
- 1976-01-15 GB GB1544/76A patent/GB1486171A/en not_active Expired
- 1976-02-27 JP JP51021068A patent/JPS51138998A/ja active Pending
- 1976-04-17 DE DE19762617042 patent/DE2617042A1/de active Pending
- 1976-04-22 CH CH518676A patent/CH596732A5/xx not_active IP Right Cessation
- 1976-04-23 IT IT83620/76A patent/IT1086435B/it active
- 1976-04-23 FR FR7612153A patent/FR2308460A1/fr active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| CH596732A5 (enExample) | 1978-03-15 |
| JPS51138998A (en) | 1976-11-30 |
| DE2617042A1 (de) | 1976-11-04 |
| US3995186A (en) | 1976-11-30 |
| USB571659I5 (enExample) | 1976-04-13 |
| FR2308460A1 (fr) | 1976-11-19 |
| FR2308460B3 (enExample) | 1979-01-12 |
| CA1039363A (en) | 1978-09-26 |
| IT1086435B (it) | 1985-05-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |