CA1039363A - Ion-plasma gun for ion-milling machine - Google Patents

Ion-plasma gun for ion-milling machine

Info

Publication number
CA1039363A
CA1039363A CA243,458A CA243458A CA1039363A CA 1039363 A CA1039363 A CA 1039363A CA 243458 A CA243458 A CA 243458A CA 1039363 A CA1039363 A CA 1039363A
Authority
CA
Canada
Prior art keywords
electrode
plasma
sleeve
ion
elongated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA243,458A
Other languages
English (en)
French (fr)
Inventor
Thomas J. Campana (Jr.)
Manfred S. Kaminsky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
US Department of Energy
Original Assignee
US Department of Energy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by US Department of Energy filed Critical US Department of Energy
Application granted granted Critical
Publication of CA1039363A publication Critical patent/CA1039363A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
CA243,458A 1975-04-25 1976-01-13 Ion-plasma gun for ion-milling machine Expired CA1039363A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/571,659 US3995186A (en) 1975-04-25 1975-04-25 Ion-plasma gun for ion-milling machine

Publications (1)

Publication Number Publication Date
CA1039363A true CA1039363A (en) 1978-09-26

Family

ID=24284562

Family Applications (1)

Application Number Title Priority Date Filing Date
CA243,458A Expired CA1039363A (en) 1975-04-25 1976-01-13 Ion-plasma gun for ion-milling machine

Country Status (8)

Country Link
US (1) US3995186A (enExample)
JP (1) JPS51138998A (enExample)
CA (1) CA1039363A (enExample)
CH (1) CH596732A5 (enExample)
DE (1) DE2617042A1 (enExample)
FR (1) FR2308460A1 (enExample)
GB (1) GB1486171A (enExample)
IT (1) IT1086435B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4495399A (en) * 1981-03-26 1985-01-22 Cann Gordon L Micro-arc milling of metallic and non-metallic substrates
US4937456A (en) * 1988-10-17 1990-06-26 The Boeing Company Dielectric coated ion thruster
US6123093A (en) * 1998-04-30 2000-09-26 D'antonio Consultants International, Inc. System for controlling fluid flow
USD535673S1 (en) * 2004-01-16 2007-01-23 Thermal Dynamics Corporation Gas distributor for a plasma arc torch

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1263201B (de) * 1959-11-14 1968-03-14 Kralovopolska Strojirna Zd Y C Vorrichtung zur Erzeugung und Aufrechterhaltung eines im Inneren eines laenglichen Fluessigkeitswirbels brennenden elektrischen Lichtbogens
US3347698A (en) * 1964-01-10 1967-10-17 Metco Inc Radio frequency plasma flame spraying
US3579028A (en) * 1968-10-23 1971-05-18 Nasa Converging-barrel plasma accelerator

Also Published As

Publication number Publication date
CH596732A5 (enExample) 1978-03-15
JPS51138998A (en) 1976-11-30
GB1486171A (en) 1977-09-21
DE2617042A1 (de) 1976-11-04
US3995186A (en) 1976-11-30
USB571659I5 (enExample) 1976-04-13
FR2308460A1 (fr) 1976-11-19
FR2308460B3 (enExample) 1979-01-12
IT1086435B (it) 1985-05-28

Similar Documents

Publication Publication Date Title
EP0158970B1 (en) Nonthermionic hollow anode gas discharge electron beam source
US6171461B1 (en) Sputtering cathode
DE2824289C2 (de) Target für Sprüh-Beschichtungsgeräte
US6147354A (en) Universal cold-cathode type ion source with closed-loop electron drifting and adjustable ionization gap
US3839182A (en) Triode device for sputtering material by means of a low voltage discharge
US3678334A (en) Non-thermionic glow discharge devices
CA1039363A (en) Ion-plasma gun for ion-milling machine
US6236054B1 (en) Ion source for generating ions of a gas or vapor
Juttner On the plasma density of metal vapour arcs
Yamano et al. Charging characteristics and electric field distribution on alumina as affected by triple junctions in vacuum
US6967334B2 (en) Ion source and ion beam device
CA2220605A1 (en) Ion source block filament with labyrinth conductive path
WO1985004015A1 (fr) Tube a decharge luminescente pour analyses
US6342139B1 (en) Sputtering system
CN111668080B (zh) 一种金属离子源发射装置
US4250433A (en) Vacuo spark generator for the spectrographic analysis of samples
US3798488A (en) Plasma source of charged particles
US5477106A (en) Cathode placement in a gas discharge closing switch
DE2523360B2 (de) Gasentladungselektronenstrahlerzeugungssystem zum erzeugen eines elektronenstrahls mit hilfe einer glimmentladung
JP2723455B2 (ja) グロー放電発光分光分析装置
Schmoranzer et al. A high− voltage telefocus electron gun with remote focusing
US5486696A (en) Procedure and apparatus for the analysis of surface and/or depth profiles
RU2008739C1 (ru) Источник ионов
Krastelev et al. Corona-stabilized gas spark gap switch for a double forming line with 300 kV working voltage
US3462595A (en) Ion source for mass spectrometers employing means for flattening equipotentials within the ion production region