GB1473154A - - Google Patents
Info
- Publication number
- GB1473154A GB1473154A GB3352274A GB3352274A GB1473154A GB 1473154 A GB1473154 A GB 1473154A GB 3352274 A GB3352274 A GB 3352274A GB 3352274 A GB3352274 A GB 3352274A GB 1473154 A GB1473154 A GB 1473154A
- Authority
- GB
- United Kingdom
- Prior art keywords
- reels
- reel
- nozzles
- flanges
- degrees
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004140 cleaning Methods 0.000 abstract 2
- 239000002245 particle Substances 0.000 abstract 2
- 230000003068 static effect Effects 0.000 abstract 2
- 238000007599 discharging Methods 0.000 abstract 1
- 239000000428 dust Substances 0.000 abstract 1
- 230000005611 electricity Effects 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
Landscapes
- Cleaning In General (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19732338939 DE2338939C3 (de) | 1973-08-01 | Reinigungseinrichtung für leere Bandspulen, insbesondere für Magnetbandspulen |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1473154A true GB1473154A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1977-05-11 |
Family
ID=5888555
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB3352274A Expired GB1473154A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1973-08-01 | 1974-07-30 |
Country Status (5)
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4701973A (en) * | 1984-08-27 | 1987-10-27 | William J. McBrady | Bottle duster |
US4677704A (en) * | 1986-04-22 | 1987-07-07 | Huggins Richard A | Cleaning system for static charged semiconductor wafer surface |
US4727614A (en) * | 1987-01-20 | 1988-03-01 | Shape Inc. | Ground corona comb |
US5173988A (en) * | 1991-06-17 | 1992-12-29 | Videojet Systems International, Inc. | Dewatering apparatus for drop marking bottles and cans |
US5350428A (en) * | 1993-06-17 | 1994-09-27 | Vlsi Technology, Inc. | Electrostatic apparatus and method for removing particles from semiconductor wafers |
JP3452676B2 (ja) * | 1995-02-15 | 2003-09-29 | 宮崎沖電気株式会社 | 半導体ウエハ面のパーティクルの除去装置及びそれを用いた半導体ウエハ面のパーティクルの除去方法 |
US5839455A (en) * | 1995-04-13 | 1998-11-24 | Texas Instruments Incorporated | Enhanced high pressure cleansing system for wafer handling implements |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2413937A (en) * | 1941-08-19 | 1947-01-07 | Metalwash Machinery Co | Sectional nozzle structure for driers |
US3668008A (en) * | 1969-06-04 | 1972-06-06 | Xerox Corp | Ionized air cleaning device |
-
1974
- 1974-07-22 JP JP1974086184U patent/JPS5533513Y2/ja not_active Expired
- 1974-07-30 US US05/493,055 patent/US3939526A/en not_active Expired - Lifetime
- 1974-07-30 FR FR7426394A patent/FR2239731B3/fr not_active Expired
- 1974-07-30 IT IT52342/74A patent/IT1018759B/it active
- 1974-07-30 GB GB3352274A patent/GB1473154A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5533513Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-08-08 |
FR2239731A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-02-28 |
US3939526A (en) | 1976-02-24 |
DE2338939B2 (de) | 1977-05-18 |
JPS5084010U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-07-18 |
IT1018759B (it) | 1977-10-20 |
FR2239731B3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1978-05-19 |
DE2338939A1 (de) | 1975-02-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19930730 |