GB1461921A - Method and apparatus for thin film deposition on a substrate - Google Patents

Method and apparatus for thin film deposition on a substrate

Info

Publication number
GB1461921A
GB1461921A GB64474A GB64474A GB1461921A GB 1461921 A GB1461921 A GB 1461921A GB 64474 A GB64474 A GB 64474A GB 64474 A GB64474 A GB 64474A GB 1461921 A GB1461921 A GB 1461921A
Authority
GB
United Kingdom
Prior art keywords
drum
substrate
targets
sputtering
arcuate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB64474A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coulter Information Systems Inc
Original Assignee
Coulter Information Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Coulter Information Systems Inc filed Critical Coulter Information Systems Inc
Publication of GB1461921A publication Critical patent/GB1461921A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

1461921 Sputtering apparatus COULTER INFORMATION SYSTEMS Inc 7 Jan 1974 [12 Jan 1973] 00644/74 Heading C7F Apparatus for sputtering a coating on an elongate plastics substrate comprises a pressure vessel 112 containing a drum 118, round which the substrate 70 passes during sputtering, feed and takeup reels 132, 142 and arcuate targets 156, 158, 160 (containing material to be sputtered 164) forming a cylinder around the drum, Fig.4. A slotted cylindrical magnetic drum 206 is positionedwithin the drum 118, and together with magnets 214 creates a field which deflects secondary electrons from the substrate. The helical loops of substrate 70 around the drum 118 are shifted axially by a mechanism 87. The targets 156-160 and the drum 118 are cooled, e.g. by water or liquid N2. In another embodiment, Figs.7-9 (not shown) the loops are normal to the drum axis, and are shifted by forming a bight in each loop and feeding the advanced end of the bight into the adjacent position on the drum. The drum 118 may have a heat absorbent coating for cooling purposes, e.g. an Al drum with a black anodized surface or a stainless steel drum with a black Ni coating. A tungsten lamp 184 is provided in the chamber to neutralize the build up of electrons and hence decrease the surface charge on the substrate. The apparatus can be used for D.C., radio frequency, or reactive sputtering, examples of the latter being the deposition of cadmium sulphide or zinc indium sulphide by using targets of Cd or Zn-In in an atmosphere containing S. The targets may be in the form of arcuate plates or strips, or arcuate arrangements of rods, which may be individually cooled. The apparatus shown is for batch processes, but a continuous process is described, Fig.2 (not shown) where the supply and take-up reels are outside the vessel and the substrate passes through pressuretight passageways.
GB64474A 1973-01-12 1974-01-07 Method and apparatus for thin film deposition on a substrate Expired GB1461921A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US323133A US3884787A (en) 1973-01-12 1973-01-12 Sputtering method for thin film deposition on a substrate

Publications (1)

Publication Number Publication Date
GB1461921A true GB1461921A (en) 1977-01-19

Family

ID=23257860

Family Applications (1)

Application Number Title Priority Date Filing Date
GB64474A Expired GB1461921A (en) 1973-01-12 1974-01-07 Method and apparatus for thin film deposition on a substrate

Country Status (15)

Country Link
US (1) US3884787A (en)
JP (1) JPS5747267B2 (en)
AT (1) AT341335B (en)
BE (1) BE809464A (en)
CA (1) CA1018475A (en)
CH (1) CH597622A5 (en)
DD (1) DD109035A5 (en)
DE (1) DE2400587A1 (en)
FR (1) FR2322667A1 (en)
GB (1) GB1461921A (en)
IL (1) IL43966A (en)
IT (1) IT1002650B (en)
LU (1) LU69122A1 (en)
NL (1) NL7317670A (en)
SE (1) SE392919B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2150600A (en) * 1983-12-05 1985-07-03 Pilkington Brothers Plc Improvements in or relating to coating apparatus

Families Citing this family (31)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3939052A (en) * 1975-01-15 1976-02-17 Riley Leon H Depositing optical fibers
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4331526A (en) * 1979-09-24 1982-05-25 Coulter Systems Corporation Continuous sputtering apparatus and method
US4290877A (en) * 1980-09-08 1981-09-22 The United States Of America As Represented By The Secretary Of The Interior Sputtering apparatus for coating elongated tubes and strips
US4384532A (en) * 1980-10-31 1983-05-24 Staff Arthur B Table extension for the handicapped
US4343881A (en) * 1981-07-06 1982-08-10 Savin Corporation Multilayer photoconductive assembly with intermediate heterojunction
US4389295A (en) * 1982-05-06 1983-06-21 Gte Products Corporation Thin film phosphor sputtering process
JPS5976571A (en) * 1982-10-25 1984-05-01 Natl House Ind Co Ltd Applicator
NL8602759A (en) * 1986-10-31 1988-05-16 Bekaert Sa Nv METHOD AND DEVICE FOR TREATING AN LONG-TERM SUBSTRATE COVERED; AND SUBSTRATES TREATED ACCORDING TO THAT METHOD AND ARTICLES OF POLYMER MATERIAL REINFORCED WITH THESE SUBSTRATES.
US5219668A (en) * 1986-10-31 1993-06-15 N.V. Bekaert S.A. Process and apparatus for the treatment of coated, elongated substrate, as well as substrates thus treated and articles of polymeric material reinforced with these substrates
US4849087A (en) * 1988-02-11 1989-07-18 Southwall Technologies Apparatus for obtaining transverse uniformity during thin film deposition on extended substrate
DE3886754D1 (en) * 1988-10-19 1994-02-10 Ibm Deutschland Device for plasma or reactive ion etching and method for etching poorly heat-conducting substrates.
DE29600991U1 (en) * 1996-01-20 1997-05-22 Straemke Siegfried Dr Ing Plasma reactor
US5725706A (en) * 1996-03-12 1998-03-10 The Whitaker Corporation Laser transfer deposition
US6066826A (en) * 1998-03-16 2000-05-23 Yializis; Angelo Apparatus for plasma treatment of moving webs
DE60211470T2 (en) * 2002-03-15 2006-11-09 Vhf Technologies S.A. Apparatus and method for manufacturing flexible semiconductor devices
CH696013A5 (en) * 2002-10-03 2006-11-15 Tetra Laval Holdings & Finance An apparatus for treating a strip-like material in a plasma-assisted process.
US6906008B2 (en) * 2003-06-26 2005-06-14 Superpower, Inc. Apparatus for consecutive deposition of high-temperature superconducting (HTS) buffer layers
US7169232B2 (en) * 2004-06-01 2007-01-30 Eastman Kodak Company Producing repetitive coatings on a flexible substrate
CA2586613C (en) * 2004-12-29 2011-11-08 Sca Hygiene Products Ab A hands-free paper towel dispenser and dispensing system
DE102005058869A1 (en) * 2005-12-09 2007-06-14 Cis Solartechnik Gmbh & Co. Kg Method and device for coating strips
KR100750654B1 (en) * 2006-09-15 2007-08-20 한국전기연구원 Long tape deposition apparatus
KR100928222B1 (en) * 2007-10-31 2009-11-24 한국전기연구원 Joist deposition apparatus with guide roller
US20090194505A1 (en) * 2008-01-24 2009-08-06 Microcontinuum, Inc. Vacuum coating techniques
EP2113585A1 (en) * 2008-04-29 2009-11-04 Applied Materials, Inc. Apparatus and method for coating of a web in vacuum by twisting and guiding the web multiple times along a roller past a processing region
TW201110831A (en) * 2009-09-03 2011-03-16 Chunghwa Picture Tubes Ltd Plasma apparatus and method of fabricating nano-crystalline silicon thin film
EP2508315B1 (en) 2011-04-07 2013-09-18 Gedore-Werkzeugfabrik GmbH & Co. KG Splitting wedge
EP2909355B1 (en) * 2012-10-22 2018-09-26 Proportional Technologies, Inc. Method and apparatus for coating thin foil with a boron coating
KR20140061808A (en) * 2012-11-14 2014-05-22 삼성디스플레이 주식회사 Apparatus for depositing organic material
US10112836B2 (en) * 2012-11-26 2018-10-30 The Regents Of The University Of Michigan Continuous nanosynthesis apparatus and process
WO2022040075A1 (en) * 2020-08-21 2022-02-24 Applied Materials, Inc. Processing system for processing a flexible substrate and method of measuring at least one of a property of a flexible substrate and a property of one or more coatings on the flexible substrate

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2249710A (en) * 1935-02-18 1941-07-15 Ind Rayon Corp Apparatus for continuously processing thread or the like
NL143409C (en) * 1947-11-20
US3068510A (en) * 1959-12-14 1962-12-18 Radiation Res Corp Polymerizing method and apparatus
NL260813A (en) * 1960-02-03
US3343207A (en) * 1963-10-14 1967-09-26 Monsanto Co Novelty yarn apparatus
US3272175A (en) * 1965-05-12 1966-09-13 Heraeus Gmbh W C Vapor deposition means for strip-coating continuously moving, helically wound ribbon
US3477902A (en) * 1965-10-14 1969-11-11 Radiation Res Corp Process for making tires by exposure to an ionized gas and treatment with resorcinol-formaldehyde/latex composition and the product
DE1802932B2 (en) * 1968-10-14 1974-11-14 W.C. Heraeus Gmbh, 6450 Hanau Method for producing an electrical switch contact
US3598639A (en) * 1968-12-09 1971-08-10 Bror Olov Nikolaus Hansson Method of continuously producing metal wire and profiles
US3700489A (en) * 1970-07-30 1972-10-24 Ethicon Inc Process for applying a thin coating of polytetrafluoroethylene

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2150600A (en) * 1983-12-05 1985-07-03 Pilkington Brothers Plc Improvements in or relating to coating apparatus

Also Published As

Publication number Publication date
LU69122A1 (en) 1975-12-09
AT341335B (en) 1978-02-10
IL43966A0 (en) 1974-06-30
IT1002650B (en) 1976-05-20
BE809464A (en) 1974-07-08
CH597622A5 (en) 1978-04-14
SE392919B (en) 1977-04-25
JPS5747267B2 (en) 1982-10-08
ATA9674A (en) 1977-05-15
DD109035A5 (en) 1974-10-12
JPS49104972A (en) 1974-10-04
US3884787A (en) 1975-05-20
DE2400587A1 (en) 1974-07-18
IL43966A (en) 1976-12-31
FR2322667A1 (en) 1977-04-01
CA1018475A (en) 1977-10-04
NL7317670A (en) 1974-07-16
FR2322667B1 (en) 1978-10-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee