GB1451668A - Semiconductor manufacturing systems - Google Patents
Semiconductor manufacturing systemsInfo
- Publication number
- GB1451668A GB1451668A GB5680673A GB5680673A GB1451668A GB 1451668 A GB1451668 A GB 1451668A GB 5680673 A GB5680673 A GB 5680673A GB 5680673 A GB5680673 A GB 5680673A GB 1451668 A GB1451668 A GB 1451668A
- Authority
- GB
- United Kingdom
- Prior art keywords
- substrate
- vacuum
- supported
- division
- tube ends
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automation & Control Theory (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US00319563A US3850105A (en) | 1972-12-29 | 1972-12-29 | Apparatus for transferring articles through various processing sectors of a manufacturing system |
US329920A US3889355A (en) | 1973-02-05 | 1973-02-05 | Continuous processing system |
US00329494A US3845286A (en) | 1973-02-05 | 1973-02-05 | Manufacturing control system for processing workpieces |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1451668A true GB1451668A (en) | 1976-10-06 |
Family
ID=27406059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5680673A Expired GB1451668A (en) | 1972-12-29 | 1973-12-07 | Semiconductor manufacturing systems |
Country Status (6)
Country | Link |
---|---|
CH (1) | CH566843A5 (ru) |
DE (1) | DE2364790C2 (ru) |
ES (1) | ES421844A1 (ru) |
FR (1) | FR2212965A5 (ru) |
GB (1) | GB1451668A (ru) |
NL (1) | NL184986C (ru) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2126374A (en) * | 1982-06-23 | 1984-03-21 | Nec Corp | A production system for the manufacture of semiconductor devices |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60184678A (ja) * | 1984-03-02 | 1985-09-20 | Canon Inc | 真空処理装置 |
EP0162703A3 (en) * | 1984-05-23 | 1987-02-04 | Machine Technology Inc. | Modular processing apparatus and modules for use therewith |
JPS6126229A (ja) * | 1984-07-16 | 1986-02-05 | Oki Electric Ind Co Ltd | 半導体装置の製造装置 |
GB2191310A (en) * | 1986-05-29 | 1987-12-09 | Ford Motor Co | Conveying system |
JP2598305B2 (ja) * | 1988-06-06 | 1997-04-09 | 日東電工株式会社 | 半導体ウエハの処理システム |
DE19821389B4 (de) * | 1998-02-12 | 2010-02-18 | Claas Fertigungstechnik Gmbh | Verfahren und Vorrichtung zum Handling von Werkstücken |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE635201A (ru) * | 1962-07-20 | |||
AT288112B (de) * | 1966-05-12 | 1971-02-25 | Molins Machine Co Ltd | Werkzeugmaschinenanlage mit einem zentralen Steuergerät |
US3543392A (en) * | 1967-12-15 | 1970-12-01 | Cincinnati Milacron Inc | Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools |
-
1973
- 1973-11-28 FR FR7343094A patent/FR2212965A5/fr not_active Expired
- 1973-12-07 GB GB5680673A patent/GB1451668A/en not_active Expired
- 1973-12-20 CH CH1797473A patent/CH566843A5/xx not_active IP Right Cessation
- 1973-12-27 DE DE19732364790 patent/DE2364790C2/de not_active Expired
- 1973-12-28 ES ES421844A patent/ES421844A1/es not_active Expired
- 1973-12-28 NL NL7317755A patent/NL184986C/xx not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2126374A (en) * | 1982-06-23 | 1984-03-21 | Nec Corp | A production system for the manufacture of semiconductor devices |
Also Published As
Publication number | Publication date |
---|---|
DE2364790A1 (de) | 1974-07-04 |
FR2212965A5 (ru) | 1974-07-26 |
AU6308273A (en) | 1975-06-05 |
CH566843A5 (ru) | 1975-09-30 |
NL184986B (nl) | 1989-07-17 |
ES421844A1 (es) | 1976-05-01 |
NL7317755A (ru) | 1974-07-02 |
DE2364790C2 (de) | 1985-11-28 |
NL184986C (nl) | 1989-12-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19921207 |