FR2212965A5 - - Google Patents

Info

Publication number
FR2212965A5
FR2212965A5 FR7343094A FR7343094A FR2212965A5 FR 2212965 A5 FR2212965 A5 FR 2212965A5 FR 7343094 A FR7343094 A FR 7343094A FR 7343094 A FR7343094 A FR 7343094A FR 2212965 A5 FR2212965 A5 FR 2212965A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7343094A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00319563A external-priority patent/US3850105A/en
Priority claimed from US329920A external-priority patent/US3889355A/en
Priority claimed from US00329494A external-priority patent/US3845286A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2212965A5 publication Critical patent/FR2212965A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
FR7343094A 1972-12-29 1973-11-28 Expired FR2212965A5 (ru)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US00319563A US3850105A (en) 1972-12-29 1972-12-29 Apparatus for transferring articles through various processing sectors of a manufacturing system
US329920A US3889355A (en) 1973-02-05 1973-02-05 Continuous processing system
US00329494A US3845286A (en) 1973-02-05 1973-02-05 Manufacturing control system for processing workpieces

Publications (1)

Publication Number Publication Date
FR2212965A5 true FR2212965A5 (ru) 1974-07-26

Family

ID=27406059

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7343094A Expired FR2212965A5 (ru) 1972-12-29 1973-11-28

Country Status (6)

Country Link
CH (1) CH566843A5 (ru)
DE (1) DE2364790C2 (ru)
ES (1) ES421844A1 (ru)
FR (1) FR2212965A5 (ru)
GB (1) GB1451668A (ru)
NL (1) NL184986C (ru)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2560528A1 (fr) * 1984-03-02 1985-09-06 Canon Kk Appareil de traitement sous vide
EP0162703A2 (en) * 1984-05-23 1985-11-27 Machine Technology Inc. Modular processing apparatus and modules for use therewith
FR2567708A1 (fr) * 1984-07-16 1986-01-17 Oki Electric Ind Co Ltd Systeme d'assemblage automatise pour dispositif a semi-conducteur

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4571685A (en) * 1982-06-23 1986-02-18 Nec Corporation Production system for manufacturing semiconductor devices
GB2191310A (en) * 1986-05-29 1987-12-09 Ford Motor Co Conveying system
JP2598305B2 (ja) * 1988-06-06 1997-04-09 日東電工株式会社 半導体ウエハの処理システム
DE19821389B4 (de) * 1998-02-12 2010-02-18 Claas Fertigungstechnik Gmbh Verfahren und Vorrichtung zum Handling von Werkstücken

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE635201A (ru) * 1962-07-20
AT288112B (de) * 1966-05-12 1971-02-25 Molins Machine Co Ltd Werkzeugmaschinenanlage mit einem zentralen Steuergerät
US3543392A (en) * 1967-12-15 1970-12-01 Cincinnati Milacron Inc Machine tools having conveyor means extending therebetween and carrying pallet means which are selectively connectable to the machine tools

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2560528A1 (fr) * 1984-03-02 1985-09-06 Canon Kk Appareil de traitement sous vide
EP0162703A2 (en) * 1984-05-23 1985-11-27 Machine Technology Inc. Modular processing apparatus and modules for use therewith
EP0162703A3 (en) * 1984-05-23 1987-02-04 Machine Technology Inc. Modular processing apparatus and modules for use therewith
FR2567708A1 (fr) * 1984-07-16 1986-01-17 Oki Electric Ind Co Ltd Systeme d'assemblage automatise pour dispositif a semi-conducteur

Also Published As

Publication number Publication date
DE2364790A1 (de) 1974-07-04
AU6308273A (en) 1975-06-05
CH566843A5 (ru) 1975-09-30
NL184986B (nl) 1989-07-17
ES421844A1 (es) 1976-05-01
NL7317755A (ru) 1974-07-02
DE2364790C2 (de) 1985-11-28
GB1451668A (en) 1976-10-06
NL184986C (nl) 1989-12-18

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Legal Events

Date Code Title Description
ST Notification of lapse