GB1444098A - Electron microscopes - Google Patents

Electron microscopes

Info

Publication number
GB1444098A
GB1444098A GB2986173A GB2986173A GB1444098A GB 1444098 A GB1444098 A GB 1444098A GB 2986173 A GB2986173 A GB 2986173A GB 2986173 A GB2986173 A GB 2986173A GB 1444098 A GB1444098 A GB 1444098A
Authority
GB
United Kingdom
Prior art keywords
lens
electrode
anode
image
potential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2986173A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Corp
Original Assignee
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Corp filed Critical Siemens Corp
Publication of GB1444098A publication Critical patent/GB1444098A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
GB2986173A 1972-07-10 1973-07-10 Electron microscopes Expired GB1444098A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2234381A DE2234381C3 (de) 1972-07-10 1972-07-10 Elektronenstrahl-Beleuchtungssystem

Publications (1)

Publication Number Publication Date
GB1444098A true GB1444098A (en) 1976-07-28

Family

ID=5850513

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2986173A Expired GB1444098A (en) 1972-07-10 1973-07-10 Electron microscopes

Country Status (5)

Country Link
US (1) US3862419A (enrdf_load_stackoverflow)
JP (1) JPS5429075B2 (enrdf_load_stackoverflow)
DE (1) DE2234381C3 (enrdf_load_stackoverflow)
GB (1) GB1444098A (enrdf_load_stackoverflow)
NL (1) NL7309348A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204897A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb
US4426583A (en) * 1982-05-10 1984-01-17 International Business Machines Corporation Electron beam potential switching apparatus
FR2527383A1 (fr) * 1982-05-24 1983-11-25 Univ Reims Champagne Ardenne Canon a electrons avec cathode a emission de champ et lentille magnetique
JPH0619960B2 (ja) * 1986-12-27 1994-03-16 日本電子株式会社 熱電界放射型電子源を有した電子線装置
JP3998556B2 (ja) * 2002-10-17 2007-10-31 株式会社東研 高分解能ｘ線顕微検査装置
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS494972A (enrdf_load_stackoverflow) * 1972-04-26 1974-01-17

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2215907A (en) * 1987-07-14 1989-09-27 Jeol Ltd Charged particle apparatus
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam

Also Published As

Publication number Publication date
NL7309348A (enrdf_load_stackoverflow) 1974-01-14
DE2234381A1 (de) 1974-01-31
JPS5429075B2 (enrdf_load_stackoverflow) 1979-09-20
DE2234381B2 (de) 1975-02-27
JPS4946670A (enrdf_load_stackoverflow) 1974-05-04
US3862419A (en) 1975-01-21
DE2234381C3 (de) 1975-10-16

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee