JPS5429075B2 - - Google Patents

Info

Publication number
JPS5429075B2
JPS5429075B2 JP7781573A JP7781573A JPS5429075B2 JP S5429075 B2 JPS5429075 B2 JP S5429075B2 JP 7781573 A JP7781573 A JP 7781573A JP 7781573 A JP7781573 A JP 7781573A JP S5429075 B2 JPS5429075 B2 JP S5429075B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7781573A
Other languages
Japanese (ja)
Other versions
JPS4946670A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4946670A publication Critical patent/JPS4946670A/ja
Publication of JPS5429075B2 publication Critical patent/JPS5429075B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP7781573A 1972-07-10 1973-07-10 Expired JPS5429075B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2234381A DE2234381C3 (de) 1972-07-10 1972-07-10 Elektronenstrahl-Beleuchtungssystem

Publications (2)

Publication Number Publication Date
JPS4946670A JPS4946670A (enrdf_load_stackoverflow) 1974-05-04
JPS5429075B2 true JPS5429075B2 (enrdf_load_stackoverflow) 1979-09-20

Family

ID=5850513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7781573A Expired JPS5429075B2 (enrdf_load_stackoverflow) 1972-07-10 1973-07-10

Country Status (5)

Country Link
US (1) US3862419A (enrdf_load_stackoverflow)
JP (1) JPS5429075B2 (enrdf_load_stackoverflow)
DE (1) DE2234381C3 (enrdf_load_stackoverflow)
GB (1) GB1444098A (enrdf_load_stackoverflow)
NL (1) NL7309348A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3204897A1 (de) * 1982-02-12 1983-08-25 Siemens AG, 1000 Berlin und 8000 München Korpuskularstrahlerzeugendes system und verfahren zu seinem betrieb
US4426583A (en) * 1982-05-10 1984-01-17 International Business Machines Corporation Electron beam potential switching apparatus
FR2527383A1 (fr) * 1982-05-24 1983-11-25 Univ Reims Champagne Ardenne Canon a electrons avec cathode a emission de champ et lentille magnetique
JPH0619960B2 (ja) * 1986-12-27 1994-03-16 日本電子株式会社 熱電界放射型電子源を有した電子線装置
GB2215907B (en) * 1987-07-14 1992-04-15 Jeol Ltd Apparatus using a charged-particle beam
JP3998556B2 (ja) * 2002-10-17 2007-10-31 株式会社東研 高分解能ｘ線顕微検査装置
US7218703B2 (en) * 2003-11-21 2007-05-15 Tohken Co., Ltd. X-ray microscopic inspection apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
JPS494972A (enrdf_load_stackoverflow) * 1972-04-26 1974-01-17

Also Published As

Publication number Publication date
NL7309348A (enrdf_load_stackoverflow) 1974-01-14
DE2234381A1 (de) 1974-01-31
GB1444098A (en) 1976-07-28
DE2234381B2 (de) 1975-02-27
JPS4946670A (enrdf_load_stackoverflow) 1974-05-04
US3862419A (en) 1975-01-21
DE2234381C3 (de) 1975-10-16

Similar Documents

Publication Publication Date Title
CS154807B1 (enrdf_load_stackoverflow)
JPS4899172A (enrdf_load_stackoverflow)
CS158484B1 (enrdf_load_stackoverflow)
JPS4936960Y1 (enrdf_load_stackoverflow)
CS156698B1 (enrdf_load_stackoverflow)
CS156587B1 (enrdf_load_stackoverflow)
CS157599B1 (enrdf_load_stackoverflow)
CS157592B1 (enrdf_load_stackoverflow)
CS157565B1 (enrdf_load_stackoverflow)
CS156993B1 (enrdf_load_stackoverflow)
CS153677B1 (enrdf_load_stackoverflow)
CS156691B1 (enrdf_load_stackoverflow)
CS158338B1 (enrdf_load_stackoverflow)
CS157985B1 (enrdf_load_stackoverflow)
CS155790B1 (enrdf_load_stackoverflow)
CS155647B1 (enrdf_load_stackoverflow)
CS155640B1 (enrdf_load_stackoverflow)
CS155479B1 (enrdf_load_stackoverflow)
CS155013B1 (enrdf_load_stackoverflow)
CS154866B1 (enrdf_load_stackoverflow)
CS158509B1 (enrdf_load_stackoverflow)
CS154547B1 (enrdf_load_stackoverflow)
CS154493B1 (enrdf_load_stackoverflow)
CH565234A5 (enrdf_load_stackoverflow)
CH566533A5 (enrdf_load_stackoverflow)