GB1431736A - Device for measuring electron signals accompanied by strong back-ground noise - Google Patents

Device for measuring electron signals accompanied by strong back-ground noise

Info

Publication number
GB1431736A
GB1431736A GB1106374A GB1106374A GB1431736A GB 1431736 A GB1431736 A GB 1431736A GB 1106374 A GB1106374 A GB 1106374A GB 1106374 A GB1106374 A GB 1106374A GB 1431736 A GB1431736 A GB 1431736A
Authority
GB
United Kingdom
Prior art keywords
analyser
spectrum
output
electron beam
peak
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1106374A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of GB1431736A publication Critical patent/GB1431736A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
GB1106374A 1973-03-12 1974-03-12 Device for measuring electron signals accompanied by strong back-ground noise Expired GB1431736A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48028724A JPS49118493A (enrdf_load_stackoverflow) 1973-03-12 1973-03-12

Publications (1)

Publication Number Publication Date
GB1431736A true GB1431736A (en) 1976-04-14

Family

ID=12256375

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1106374A Expired GB1431736A (en) 1973-03-12 1974-03-12 Device for measuring electron signals accompanied by strong back-ground noise

Country Status (5)

Country Link
US (1) US3914606A (enrdf_load_stackoverflow)
JP (1) JPS49118493A (enrdf_load_stackoverflow)
DE (1) DE2411841C3 (enrdf_load_stackoverflow)
FR (1) FR2221729B1 (enrdf_load_stackoverflow)
GB (1) GB1431736A (enrdf_load_stackoverflow)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4126781A (en) * 1977-05-10 1978-11-21 Extranuclear Laboratories, Inc. Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis
US4459482A (en) * 1982-05-06 1984-07-10 Bales Maurice J Auger spectroscopic technique measuring the number of electrons emitted from a surface as a function of the energy level of those electrons
US4638446A (en) * 1983-05-31 1987-01-20 The Perkin-Elmer Corporation Apparatus and method for reducing topographical effects in an auger image
IE58049B1 (en) * 1985-05-21 1993-06-16 Tekscan Ltd Surface analysis microscopy apparatus
US5008535A (en) * 1988-09-02 1991-04-16 U.S. Philips Corporation Energy analyzer and spectrometer for low-energy electrons
JPH02145950A (ja) * 1988-11-26 1990-06-05 Shimadzu Corp Ｘ線光電子分析装置
JP3143279B2 (ja) * 1993-09-03 2001-03-07 日本電子株式会社 電子エネルギー分析器
GB9719417D0 (en) * 1997-09-13 1997-11-12 Univ York Electron microscope
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1240385A (en) * 1969-04-15 1971-07-21 Ass Elect Ind Improvements in or relating to waveform measuring
CH505393A (de) * 1969-09-29 1971-03-31 Bbc Brown Boveri & Cie Gerät zur Messung der Energie von elektrisch geladenen Teilchen oder zum Erzeugen elektrisch geladener Teilchen bestimmter Energie und Verfahren zum Betrieb dieses Gerätes
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
JPS521869B2 (enrdf_load_stackoverflow) * 1972-07-11 1977-01-18

Also Published As

Publication number Publication date
JPS49118493A (enrdf_load_stackoverflow) 1974-11-12
DE2411841B2 (de) 1979-05-31
FR2221729A1 (enrdf_load_stackoverflow) 1974-10-11
DE2411841A1 (de) 1974-09-19
DE2411841C3 (de) 1980-02-07
US3914606A (en) 1975-10-21
FR2221729B1 (enrdf_load_stackoverflow) 1976-06-25

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee