US3914606A - Electron detector - Google Patents

Electron detector Download PDF

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Publication number
US3914606A
US3914606A US448480A US44848074A US3914606A US 3914606 A US3914606 A US 3914606A US 448480 A US448480 A US 448480A US 44848074 A US44848074 A US 44848074A US 3914606 A US3914606 A US 3914606A
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Prior art keywords
electrons
signal
density
energy level
background noise
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Expired - Lifetime
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US448480A
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English (en)
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Hiroshi Hashimoto
Akinori Mogami
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Jeol Ltd
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Jeol Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H01J49/488—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter with retarding grids

Definitions

  • ABSTRACT A device for measuring electron densities at a given [30] Foreign Application Priority Data energy level in an electron beam or the like having Mar. 12, 1973 Japan 48-28724 Strong background noise, for example in the detection of Auger electric energy spectrums.
  • CTID V 1 L 9 16 2] CIRCUIT I G-ATE PULSE INTEGRA- 14 cmcutT COUNTER I SUB TRA- c T10 CIRCUIT INTEG'RA- INTEcTRA- PULSE COUNTER PULSE COUNTER Sheet 1 of 6 GATE cmeurr GATE. cmcurr VOLTAGE G-EN.
  • Auger electron energy spectrum obtained by irradiating the specimen with primary electrons or X-rays.
  • Auger electrons are detected or analyzed along with secondary (or photo) electrons and backscattered electrons, all of which are ejected from the specimen simultaneously.
  • the density of the Auger electron energy spectrum is much weaker than that of the photo electron energy spectrum in that the former spectrum embodies a considerable amount of background noise, thus making it difficult to accurately measure the Auger electron energy spectrum with the apparatus presently available.
  • an advantage of this invention is to provide an analyzing device for measuring the density of the Auger electron energy spectrum peaks more pre cisely.
  • Another advantage of this invention is to provide an analyzing device capable of observing the change in the Auger electron spectrum peak height when the specimen temperature is varied with time.
  • a still further advantage of this invention is to provide an analyzing device for precisely measuring the density of the Auger electron energy spectrum peaks even when the detected signal is pulsed.
  • a typical analyzer device is provided with additional means for detecting a plurality of signals obtained by the electron energy analyzing means, such that said signals respectively correspond to the successive values of the electron beam energies and a function of at least one of said signals is subtracted from one of the other said signals by a processing circuit network.
  • FIG. 1 is a block schematic showing one embodiment of the analyzing device according to this invention.
  • FIGS. 2 and 3 are diagrams for explaining the operation of the embodiment shown in FIG. 1,
  • FIG. 4 is a block schematic showing one embodiment of the analyzing device according to this invention.
  • FIGS. 5(a), (b), (c) and (d) are diagrams for explaining the operation of the embodiment shown in FIG. 4,
  • FIGS. 6 and 7 are schematics showing the embodiments according to this invention.
  • FIG. 8 is a diagram for explaining the operation of the embodiment shown in FIG. 7,
  • FIGS. 9 and 11 are schematics showing the embodiments according to this invention.
  • FIGS. 10 and 12 are diagrams for explaining the operations of the embodiments shown in FIGs. 9 and 11 respectively.
  • an electron energy analyzer section 1 incorporates an electron gun 2 for irradiating a specimen 3 with a primary electron beam 4.
  • Two electrostatic electrodes 50 and 5b separate electrons 6 emanating from the specimen 3 according to energy.
  • Electrons 6 including Auger electrons and secondary electrons emanating from said specimen pass through an input slit 7 of the electrode 5b and are subjected to the electric field existing between the electrodes 5a and 5b.
  • the trajectory of the electrons is determined according to the energy of electrons so that only electrons having an energy properly corresponding to the electric field strength are able to pass through the output slit 8 for subsequent detection by an electron detector 9.
  • An adding circuit 10 determines the electric field strength, the output terminals of said adding circuit being connected to the two electrodes 5a and 5b.
  • a DC. voltage source 11 and a modulation voltage generator 12 are connected to the input terminals of the adding circuit 10.
  • a recorder 13 records the output voltage of the DC. voltage source 11 together with the processed output signal of the analyzer section 1.
  • FIG. 2(a) shows the output of the adding circuit 10 during a micro lapse of time.
  • the modulation voltage i.e. the output of the modulation voltage generator 12
  • the output voltage E of the DC. voltage source 11 varies at a much slower rate than the output of the generator 12.
  • Timing signals, t to are supplied by the generator 12 to a circuit network 14.
  • the circuit network 14 in this case, incorporates two pulse counters l5 and 16.
  • the processing sequence is as follows.
  • the subtraction circuit 22 generates zero signal when the subtraction value becomes minus.
  • FIG. 2(b) shows the energy distribution of the electrons detected by the detector 9.
  • the ordinate indicates the density of the detected electrons and the abscissa indicates the energy of the detected electrons which is proportional to the output voltage of the adding circuit 10.
  • the output voltage corresponding to peak P equals E and the modulation voltage width e includes peak P, the peak spread equalling E (e/4) and E (e/4).
  • the background noise level near peak P is shown as E (e/Z) and E (e/2), the outer limits of the modulated signal for the given sweep position.
  • Timing signals generated by modulation generator 12 control the gate circuit 18 so as to pass the input signal during time intervals T, and T Accordingly, the output of the integration circuit 20 is as shown in FIG. 2(a).
  • the final counting value Nn shown in FIG. 2(c) corresponds to the intensity background noise surrounding peak P.
  • Nn also corresponds to the density of the background signal component of the spread of peak P.
  • the remaining timing signals generated by generator 12 control the gate circuit 19 so as to pass the input signal during the time intervals T and T Accordingly, the output of the integration circuit 21 is as shown in FIG. 2(d).
  • the final counting value Np+n corresponds to the density of peak P plus that of the background signal component included in the peak spread.
  • the t timing signal operates the subtraction circuit 22, and more or less simultaneously, resets integration circuits and 21.
  • FIGS. 3(a), (b), (c) and (d) are graphical illustrations for explaining an operation mode of the embodiment shown in FIG. 1 which differs from that heretofore described.
  • the generator timing signals are generated at intervals t t t and t as shown in FIG. 3(a), where time interval T equals the sum of time intervals T and T
  • the gate circuit 18 is controlled so as to pass the input signal during time intervals T and T while the gate circuit 19 is controlled so as to pass the input signal during time interval T
  • the output of the integration circuit 20 appears as shown in FIG. 3(b) and that of the integration circuit 21 appears as shown in FIG. 3(c).
  • this operation mode is identical to the former as explained in the aforegoing.
  • the timing pattern of the generated signals in FIG. 3(a) is simpler than that in FIG. 2(a), peak measurement accuracy is not as good.
  • background noise surrounding the peak is almost constant or varies very gradually as shown in FIG. 3(d), it is possible to obtain sufficient accuracy to ensure effective peak measurement.
  • FIG. 4 is a block schematic showing another embodiment of the analyzing device according to this invention in which the circuit network 23 is different from that described in FIG. 1.
  • the modulation voltage generator 12 generates tming signals at instances t t,, t t, and t as'shown in FIG. 2(a), so as to control gate circuits 18 and 19.
  • the output (shown in FIG. 5(a) of the gate circuit 18 is supplied the reversible counter 24 becomes zero or the number of pulses fed into terminal b excess the number (Nn Nn of pulses fed into terminal a, the counter 24 generates signals as shown in FIG. 5(c), said signals being fed into the gate circuit 25 so as to open it.
  • the output of the gate circuit 19 is fed to a counter circuit 26 via the gate circuit 25 only during the time when the pulses passing through the gate circuit 19 are much larger than the pulses passing through the gate circuit 18. Accordingly, the output signals shown in FIG. 5(d) correspond to the peak density value itself as in the case of the prior embodiment.
  • FIG. 7 is a block schematic showing another embodiment of the analyzing device according to this invention.
  • the modulation voltage generator 12 has been dispensed with and three electron detectors 34, 35, and 36 are used instead of one.
  • the three detectors are arranged adjacently and below three slits 38, 39 and 40. Electrons having slightly different energies are focussed by the electric field existing between the electrodes 5a and 5b so as to pass through said three slits.
  • the electron trajectories 41, 42 and 43 are determined by the output of the DC voltage source 11. Accordingly, the position of the slits corresponds to the energy of the electrons focussed at the slits.
  • the abscissa indicates the slit position and the ordinate indicate the density of the electrons passing through the respective slits. Electrons corresponding to the spectrum peak P are focussed to the center of the slit 39 having a slit width d, and electrons corresponding to the background noise enveloping the spectrum peak P are focussed at the center of slits 38 and 40 each having a slit width (d/2). Accordingly, when the background noise component contained in the spectrum varies linearly as shown in FIG. 8, the net density of the spectrum peak P is obtained by subtracting the sum of the outputs of the detectors 34 and 36 from the output of the detectors 35.
  • This subtracting process is effected by the circuit network 44.
  • the analogue output of the detectors 34 and 36 are fed into the input of the adding circuit 45 via amplifiers 46 and 47, and the added output of the adding circuit 45 is fed into the input terminal b of the subtraction circuit 48.
  • the analogue output of the detector 35 is fed into the input terminal a of the subtraction circuit 48 via amplifier 49.
  • the output signal of the subtraction circuit 48 is fed into the recorder 13 and recorded together with the output signal of the DC. voltage source 11 which is varied continuously. In this case, the subtraction circuit 48 generates zero signal when the subtraction count value (a-b) becomes minus. Thus, the net energy spectrum peaks of the electrons emanating from the specimen are recorded.
  • FIG. 9 is a block schematic showing another embodiment of the analyzing device according to the invention.
  • the three detectors 34, 35 and 36 are characterized in that their outputs are pulsed and the three slits 51, 52 and 53 are of the same width. Accordingly, the construction of the circuit-network 54 is different from that of the previous embodiments.
  • the output of amplifiers 46 and 47 are as shown in FIG. 10(b) and (0) respectively, and both outputs are fed into the same input terminal of a flip-flop circuit 55 in the circuit network 54.
  • number of output pulses of the circuit 55 is equal to the mean number of the outputpulses of the amplifiers 46 and 47 as shown in FIG. l0(d).-The output of the circuit 55 is fed into the input terminal b of a square pulse generator 56. And another input terminal a of the gen erator 56 is fed with the output pulses (shown in FIG. (a) of the amplifier 48 via delay circuit 57 which slightly delays its input pulses.
  • the square pulse generator 56 generates square pulses as shown in FIG. 10(e) by using the input pulses from terminal a as rise signals of square pulses and by using the input pulses from terminal b as fall signals of square pulses.
  • a gate circuit 58 iscontrolled so as to pass the input pulses only during the time when thesquare pulsessare fed from the generator 56.
  • the number of input pulses fed into a pulse counter 59 equals the difference be tween the pulse number from the detector 35 and the mean pulse number from the'detectors 34 and 36.
  • the output of the pulse counter 59 corresponds to the net energy spectrum peak strength of the electron beam. And this output is fedinto the brightness control grid of the cathode-ray tube 32.
  • FIG. 11 is a block schematic showing the other embodiment according to the inventionrThis embodiment shown in F lg. 9 in that number of the detectors is two in analyzer section 60. This embodiment having two detectors is effective only when the energy spectrum background noise of the electrons is constant or nearly constant. I a t In an analyzer section 60, two electron detectors 61 and 62 are arranged adjacently and'below two slits 63 and 64' each having same slit width.
  • the output pulses of the detectors'6l' and 62 are amplified by amplifiers 65' and 66 and'processed by a circuit network 67 so as to subtract the pulses of the output of the amplifier 66 from that of the amplifier 65.
  • Output of the amplifier 65 is split and one output is fed into the gate circuit 58 and another output is fed into the input terminal a of the square pulse generator 56 via delay circuit 57 which slightly delays its input signal: Input pulses of the gate circuit 58 are as shown in FIG. 12(0).
  • the output of the amplifier 66 is shown in FIG. 12(b) and is fed to the input terminal b of the generator 56.
  • the square pulse generator 56 generates square pulses, as shown in FIG.
  • the gate circuit 58 is controlled so as to pass the input pulses only during time when the square pulses are fed from the generator 56. Accordingly, the number of input pulses of a pulse counter 68 is equal to the difference between the number of output pulses of the detector 61 and that of the detector 62'as shown in FIG.
  • FIG. 6 isa'block schematic showing another embodiment of the analyzing device according to this invention.
  • the primary electron beam 4 is focussed on the surface of l a specimen 3 by a condenser lens 28 and is made to scanning signal generator 30.
  • the detector 9, in this case, is designed to detect electron density directly. Accordingly,'the circuit network 31 does not require any counting circuits.
  • the output of the detector 9 depends on the position at which the specimen surface is irradiated by the primary electron beam.
  • the output signal of the detector 9, thus dependent, is amplified by the amplifier l7 and processed by the circuit network 31.
  • the signal is supplied to the brightness control grid of a cathode-ray tube 32.
  • Deflection coils33X and 33Y are'energized by the generator 30 which also energizes scanning coils 29X and 29Y as previously mentioned. In this way, a scanning Auger electron image is displayed on the screen of the cathode-ray tube 32.
  • a device for detecting signals indicative of the density of electrons of given energy level absent background noise in an electron beam having high background noise for all energy levels comprising:
  • detecting and integrating means associated with said analyzer for detecting the electrons passed by said analyzer and producing a first signal indicative of the density of electrons of the given energy level and at least one second signal indicative of the density of the electrons of at least one different adjacent energy level, I I c. processing means for subtracting a function of the at least one second signal from the firstsignal to provide a signal indicative of the density of electrons .of the given energy level absent background noise.
  • a device for detecting an electron energy spectrum of an electron beam having strong background noise at all energy levels comprising:
  • analyzing means for spatially dispersing and separately focussing electrons according to their re-.
  • control means for modulating the conditions of the analyzer with an alternating signal periodically varying the energy level of the electrons passed by the analyzer about a detecting energy level which is slowly and continuously swept,
  • detection and integration means associated with said analyzing'means and synchronized with said alternating signal for detecting electrons passed by said analyzer producing a first signal indicative of the density of electrons of the detection energy level and producing at least one second signal indicative of the density of the electrons in at least one different adjacent energy level
  • processing means for subtracting a function of at least one second signal from the first signal to provide a signal indicative of the density of the electrons at the detection level absent background noise and thereby producing a spectrum as the detection level is swept.
  • control means modulates the analyzer symmetrically about the detection level and the detection and integration means detects a first signal indicative of the density of the electron level during two periods including the instances in which the analyzer passes electrons at the detection level and detects second signals during periods when the first signals are not being detected.
  • a device for displaying a scanning image of the Auger electrons comprising:
  • subtraction means for subtracting output of said analyzing means during the background noise detection period from the output of said analyzing means during the background noise and spectrum signal detection period
  • display means for displaying a scanning image brightness modulated by the output signal of said subtraction means, said display means being synchronized with the scanning means.
  • analyzing means for spatially separating and separately focussing the electrons according to their respective energies
  • detecting means comprising a plurality of detectors for producing a signal indicative of the density of the electrons focussed by said analyzing means on said detectors, said detectors being located adjacently such that their signals are indicative of the densities of the electrons at adjacent energy levels, and
  • processing means for subtracting a function of the signal indicative of the density of electrons at adjacent energy levels from the signal indicative of the given energy level to provide a signal indicative of the density of electrons of the given energy level absent background noise.
  • the detecting means comprises three adjacent detectors for detecting different adjacent energy levels in which the processing means subtracts a function of the signal from the detectors detecting the high and low energy levels from the signal of the other detector.
  • a device for displaying a scanning image of the Auger electrons of a given energy level comprising:
  • detecting and integrating means comprising a plurality of adjacent detectors for detecting the electrons focussed by said analyzing means providing signals indicative of the density of the electrons of the given and adjacent energy levels
  • processing means for subtracting a function of the signals indicative of the given energy levels from a signal indicative of the adjacent energy levels to provide a signal indicative of the electron density of electrons of the given energy level absent background noise

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
US448480A 1973-03-12 1974-03-06 Electron detector Expired - Lifetime US3914606A (en)

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JP48028724A JPS49118493A (enrdf_load_stackoverflow) 1973-03-12 1973-03-12

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JP (1) JPS49118493A (enrdf_load_stackoverflow)
DE (1) DE2411841C3 (enrdf_load_stackoverflow)
FR (1) FR2221729B1 (enrdf_load_stackoverflow)
GB (1) GB1431736A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4126781A (en) * 1977-05-10 1978-11-21 Extranuclear Laboratories, Inc. Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis
US4459482A (en) * 1982-05-06 1984-07-10 Bales Maurice J Auger spectroscopic technique measuring the number of electrons emitted from a surface as a function of the energy level of those electrons
US4638446A (en) * 1983-05-31 1987-01-20 The Perkin-Elmer Corporation Apparatus and method for reducing topographical effects in an auger image
US4860224A (en) * 1985-05-21 1989-08-22 501 Tekscan Limited Surface analysis spectroscopy apparatus
EP0357145A1 (en) * 1988-09-02 1990-03-07 Koninklijke Philips Electronics N.V. Energy analyser and spectrometer for low-energy electrons
US5464978A (en) * 1993-09-03 1995-11-07 Jeol Ltd. Method and apparatus for electron energy analysis
WO1999014785A1 (en) * 1997-09-13 1999-03-25 University Of York Electron detectors
US10948436B2 (en) 2016-09-30 2021-03-16 Rigaku Corporation Wavelength dispersive X-ray fluorescence spectrometer

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02145950A (ja) * 1988-11-26 1990-06-05 Shimadzu Corp Ｘ線光電子分析装置
US8283631B2 (en) * 2008-05-08 2012-10-09 Kla-Tencor Corporation In-situ differential spectroscopy

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy
US3718818A (en) * 1969-09-29 1973-02-27 Bbc Brown Boveri & Cie Measuring cerenkov radiation produced by charged particles passing through a gas as indicative of the energy of the charged particles
US3723713A (en) * 1969-04-15 1973-03-27 Aei Mass measurement system for mass spectrometers
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723713A (en) * 1969-04-15 1973-03-27 Aei Mass measurement system for mass spectrometers
US3718818A (en) * 1969-09-29 1973-02-27 Bbc Brown Boveri & Cie Measuring cerenkov radiation produced by charged particles passing through a gas as indicative of the energy of the charged particles
US3631238A (en) * 1969-11-17 1971-12-28 North American Rockwell Method of measuring electric potential on an object surface using auger electron spectroscopy
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3833811A (en) * 1972-07-11 1974-09-03 Jeol Ltd Scanning electron microscope with improved means for focusing

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4126781A (en) * 1977-05-10 1978-11-21 Extranuclear Laboratories, Inc. Method and apparatus for producing electrostatic fields by surface currents on resistive materials with applications to charged particle optics and energy analysis
US4459482A (en) * 1982-05-06 1984-07-10 Bales Maurice J Auger spectroscopic technique measuring the number of electrons emitted from a surface as a function of the energy level of those electrons
US4638446A (en) * 1983-05-31 1987-01-20 The Perkin-Elmer Corporation Apparatus and method for reducing topographical effects in an auger image
US4860224A (en) * 1985-05-21 1989-08-22 501 Tekscan Limited Surface analysis spectroscopy apparatus
EP0357145A1 (en) * 1988-09-02 1990-03-07 Koninklijke Philips Electronics N.V. Energy analyser and spectrometer for low-energy electrons
US5464978A (en) * 1993-09-03 1995-11-07 Jeol Ltd. Method and apparatus for electron energy analysis
WO1999014785A1 (en) * 1997-09-13 1999-03-25 University Of York Electron detectors
US6570163B1 (en) 1997-09-13 2003-05-27 University Of York Electron detectors
US10948436B2 (en) 2016-09-30 2021-03-16 Rigaku Corporation Wavelength dispersive X-ray fluorescence spectrometer

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JPS49118493A (enrdf_load_stackoverflow) 1974-11-12
GB1431736A (en) 1976-04-14
DE2411841B2 (de) 1979-05-31
FR2221729A1 (enrdf_load_stackoverflow) 1974-10-11
DE2411841A1 (de) 1974-09-19
DE2411841C3 (de) 1980-02-07
FR2221729B1 (enrdf_load_stackoverflow) 1976-06-25

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