GB1416637A - Treatment of used copper etching solutions - Google Patents

Treatment of used copper etching solutions

Info

Publication number
GB1416637A
GB1416637A GB4171273A GB4171273A GB1416637A GB 1416637 A GB1416637 A GB 1416637A GB 4171273 A GB4171273 A GB 4171273A GB 4171273 A GB4171273 A GB 4171273A GB 1416637 A GB1416637 A GB 1416637A
Authority
GB
United Kingdom
Prior art keywords
copper
solution
treatment
etching solutions
sept
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4171273A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Loewe Opta GmbH
Original Assignee
Loewe Opta GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722244307 external-priority patent/DE2244307C3/de
Application filed by Loewe Opta GmbH filed Critical Loewe Opta GmbH
Publication of GB1416637A publication Critical patent/GB1416637A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
GB4171273A 1972-09-09 1973-09-05 Treatment of used copper etching solutions Expired GB1416637A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722244307 DE2244307C3 (de) 1972-09-09 Verfahren zur Herstellung von alkalischen Bädern zur autokatalytischen stromlosen Abscheidung von Kupfer

Publications (1)

Publication Number Publication Date
GB1416637A true GB1416637A (en) 1975-12-03

Family

ID=5855884

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4171273A Expired GB1416637A (en) 1972-09-09 1973-09-05 Treatment of used copper etching solutions

Country Status (8)

Country Link
US (1) US3855141A (enrdf_load_html_response)
JP (1) JPS5549155B2 (enrdf_load_html_response)
AT (1) AT324065B (enrdf_load_html_response)
CH (1) CH606470A5 (enrdf_load_html_response)
FR (1) FR2199009B1 (enrdf_load_html_response)
GB (1) GB1416637A (enrdf_load_html_response)
IT (1) IT993886B (enrdf_load_html_response)
SE (1) SE387966B (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0018592A1 (de) * 1979-04-30 1980-11-12 Siemens Aktiengesellschaft Verfahren zur Regenerierung ammoniakalischer Ätzlösungen zum Ätzen von metallischem Kupfer

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3919100A (en) * 1974-04-24 1975-11-11 Enthone Alkaline etchant compositions
JPS5124537A (en) * 1974-08-26 1976-02-27 Hitachi Ltd Etsuchinguyokuno saiseihoho
US5013395A (en) * 1987-08-28 1991-05-07 International Business Machines Corporation Continuous regeneration of acid solution
US5227010A (en) * 1991-04-03 1993-07-13 International Business Machines Corporation Regeneration of ferric chloride etchants
US5145553A (en) * 1991-05-06 1992-09-08 International Business Machines Corporation Method of making a flexible circuit member
US6503363B2 (en) * 2000-03-03 2003-01-07 Seh America, Inc. System for reducing wafer contamination using freshly, conditioned alkaline etching solution
US7404904B2 (en) * 2001-10-02 2008-07-29 Melvin Stanley Method and apparatus to clean particulate matter from a toxic fluid
SE531697C2 (sv) * 2007-07-11 2009-07-07 Sigma Engineering Ab Etsnings- och återvinningsförfarande
CN110790416B (zh) * 2018-08-02 2021-11-19 广州超邦化工有限公司 一种处理化学镀铜废水的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438901A (en) * 1965-10-22 1969-04-15 Neiko I Vassileff Metal treating bath and chelating agent for metal reactive acid baths
US3600244A (en) * 1969-02-20 1971-08-17 Ibm Process of etching metal with recovery or regeneration and recycling

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0018592A1 (de) * 1979-04-30 1980-11-12 Siemens Aktiengesellschaft Verfahren zur Regenerierung ammoniakalischer Ätzlösungen zum Ätzen von metallischem Kupfer

Also Published As

Publication number Publication date
AT324065B (de) 1975-08-11
JPS5549155B2 (enrdf_load_html_response) 1980-12-10
US3855141A (en) 1974-12-17
SE387966B (sv) 1976-09-20
FR2199009A1 (enrdf_load_html_response) 1974-04-05
DE2244307B2 (de) 1975-08-21
JPS50110948A (enrdf_load_html_response) 1975-09-01
DE2244307A1 (de) 1974-03-28
CH606470A5 (enrdf_load_html_response) 1978-10-31
FR2199009B1 (enrdf_load_html_response) 1978-03-10
IT993886B (it) 1975-09-30

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee