AT324065B - Bad zur autokatalytischen stromlosen abscheidung von kupper - Google Patents

Bad zur autokatalytischen stromlosen abscheidung von kupper

Info

Publication number
AT324065B
AT324065B AT700673A AT700673A AT324065B AT 324065 B AT324065 B AT 324065B AT 700673 A AT700673 A AT 700673A AT 700673 A AT700673 A AT 700673A AT 324065 B AT324065 B AT 324065B
Authority
AT
Austria
Prior art keywords
autocatalytic
bath
copper
electronic deposition
deposition
Prior art date
Application number
AT700673A
Other languages
English (en)
Original Assignee
Loewe Opta Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19722244307 external-priority patent/DE2244307C3/de
Application filed by Loewe Opta Gmbh filed Critical Loewe Opta Gmbh
Application granted granted Critical
Publication of AT324065B publication Critical patent/AT324065B/de

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/31—Coating with metals
    • C23C18/38—Coating with copper

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • ing And Chemical Polishing (AREA)
  • Chemically Coating (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
AT700673A 1972-09-09 1973-08-09 Bad zur autokatalytischen stromlosen abscheidung von kupper AT324065B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722244307 DE2244307C3 (de) 1972-09-09 Verfahren zur Herstellung von alkalischen Bädern zur autokatalytischen stromlosen Abscheidung von Kupfer

Publications (1)

Publication Number Publication Date
AT324065B true AT324065B (de) 1975-08-11

Family

ID=5855884

Family Applications (1)

Application Number Title Priority Date Filing Date
AT700673A AT324065B (de) 1972-09-09 1973-08-09 Bad zur autokatalytischen stromlosen abscheidung von kupper

Country Status (8)

Country Link
US (1) US3855141A (de)
JP (1) JPS5549155B2 (de)
AT (1) AT324065B (de)
CH (1) CH606470A5 (de)
FR (1) FR2199009B1 (de)
GB (1) GB1416637A (de)
IT (1) IT993886B (de)
SE (1) SE387966B (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3919100A (en) * 1974-04-24 1975-11-11 Enthone Alkaline etchant compositions
JPS5124537A (en) * 1974-08-26 1976-02-27 Hitachi Ltd Etsuchinguyokuno saiseihoho
DE2917597A1 (de) * 1979-04-30 1980-11-13 Siemens Ag Verfahren zur regenerierung ammoniakalischer aetzloesungen zum aetzen von metallischem kupfer
US5013395A (en) * 1987-08-28 1991-05-07 International Business Machines Corporation Continuous regeneration of acid solution
US5227010A (en) * 1991-04-03 1993-07-13 International Business Machines Corporation Regeneration of ferric chloride etchants
US5145553A (en) * 1991-05-06 1992-09-08 International Business Machines Corporation Method of making a flexible circuit member
US6503363B2 (en) * 2000-03-03 2003-01-07 Seh America, Inc. System for reducing wafer contamination using freshly, conditioned alkaline etching solution
US7404904B2 (en) * 2001-10-02 2008-07-29 Melvin Stanley Method and apparatus to clean particulate matter from a toxic fluid
SE531697C2 (sv) * 2007-07-11 2009-07-07 Sigma Engineering Ab Etsnings- och återvinningsförfarande
CN110790416B (zh) * 2018-08-02 2021-11-19 广州超邦化工有限公司 一种处理化学镀铜废水的方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3438901A (en) * 1965-10-22 1969-04-15 Neiko I Vassileff Metal treating bath and chelating agent for metal reactive acid baths
US3600244A (en) * 1969-02-20 1971-08-17 Ibm Process of etching metal with recovery or regeneration and recycling

Also Published As

Publication number Publication date
US3855141A (en) 1974-12-17
FR2199009B1 (de) 1978-03-10
JPS5549155B2 (de) 1980-12-10
CH606470A5 (de) 1978-10-31
SE387966B (sv) 1976-09-20
IT993886B (it) 1975-09-30
JPS50110948A (de) 1975-09-01
FR2199009A1 (de) 1974-04-05
DE2244307B2 (de) 1975-08-21
GB1416637A (en) 1975-12-03
DE2244307A1 (de) 1974-03-28

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Legal Events

Date Code Title Description
ELJ Ceased due to non-payment of the annual fee