GB1400389A - Arrangements for supporting a mass with vibration isolation - Google Patents

Arrangements for supporting a mass with vibration isolation

Info

Publication number
GB1400389A
GB1400389A GB2952971A GB2952971A GB1400389A GB 1400389 A GB1400389 A GB 1400389A GB 2952971 A GB2952971 A GB 2952971A GB 2952971 A GB2952971 A GB 2952971A GB 1400389 A GB1400389 A GB 1400389A
Authority
GB
United Kingdom
Prior art keywords
arrangements
mass
microscope
supporting
vibration isolation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB2952971A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to GB2952971A priority Critical patent/GB1400389A/en
Priority to FR727222560A priority patent/FR2143292B1/fr
Priority to US00265238A priority patent/US3772510A/en
Publication of GB1400389A publication Critical patent/GB1400389A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Vibration Prevention Devices (AREA)
GB2952971A 1971-06-23 1971-06-23 Arrangements for supporting a mass with vibration isolation Expired GB1400389A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB2952971A GB1400389A (en) 1971-06-23 1971-06-23 Arrangements for supporting a mass with vibration isolation
FR727222560A FR2143292B1 (enExample) 1971-06-23 1972-06-22
US00265238A US3772510A (en) 1971-06-23 1972-06-22 Vibration isolators for evacuated scientific instruments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2952971A GB1400389A (en) 1971-06-23 1971-06-23 Arrangements for supporting a mass with vibration isolation

Publications (1)

Publication Number Publication Date
GB1400389A true GB1400389A (en) 1975-07-16

Family

ID=10292977

Family Applications (1)

Application Number Title Priority Date Filing Date
GB2952971A Expired GB1400389A (en) 1971-06-23 1971-06-23 Arrangements for supporting a mass with vibration isolation

Country Status (3)

Country Link
US (1) US3772510A (enExample)
FR (1) FR2143292B1 (enExample)
GB (1) GB1400389A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0027195A3 (en) * 1979-10-11 1981-05-06 Optimetrix Corporation Improved shock and vibration isolation system
US4336917A (en) 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
CN106594162A (zh) * 2016-12-07 2017-04-26 上海交通大学 一种液压式动力反共振隔振装置

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2540595A1 (de) * 1975-09-09 1977-03-10 Siemens Ag Korpuskularstrahlmikroskop, insbesondere elektronenmikroskop
JPS595179B2 (ja) * 1979-05-18 1984-02-03 富士通株式会社 真空機器の防振構造
FR2544820B1 (fr) * 1983-04-22 1985-06-21 Caoutchouc Manuf Plastique Support moteur a depression
EP0128971A1 (en) * 1983-06-21 1984-12-27 International Business Machines Corporation Vibration filter
US8809782B2 (en) * 2009-07-30 2014-08-19 Hitachi High-Technologies Corporation Scanning electron microscope
JP6633986B2 (ja) * 2016-07-20 2020-01-22 株式会社日立ハイテクノロジーズ 荷電粒子線装置
CN112392892B (zh) * 2020-11-06 2021-12-10 中国科学院物理研究所 一种减振装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL118005B (enExample) * 1939-01-17
US3514600A (en) * 1967-11-20 1970-05-26 Parke Davis & Co Flexible conduit means for connecting an electron microscope to a vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0027195A3 (en) * 1979-10-11 1981-05-06 Optimetrix Corporation Improved shock and vibration isolation system
US4336917A (en) 1979-10-11 1982-06-29 Optimetrix Corporation Shock and vibration isolation system
CN106594162A (zh) * 2016-12-07 2017-04-26 上海交通大学 一种液压式动力反共振隔振装置

Also Published As

Publication number Publication date
US3772510A (en) 1973-11-13
FR2143292A1 (enExample) 1973-02-02
FR2143292B1 (enExample) 1973-07-13

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees