FR2143292B1 - - Google Patents
Info
- Publication number
- FR2143292B1 FR2143292B1 FR727222560A FR7222560A FR2143292B1 FR 2143292 B1 FR2143292 B1 FR 2143292B1 FR 727222560 A FR727222560 A FR 727222560A FR 7222560 A FR7222560 A FR 7222560A FR 2143292 B1 FR2143292 B1 FR 2143292B1
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
- F16F15/0275—Control of stiffness
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB2952971A GB1400389A (en) | 1971-06-23 | 1971-06-23 | Arrangements for supporting a mass with vibration isolation |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2143292A1 FR2143292A1 (fr) | 1973-02-02 |
FR2143292B1 true FR2143292B1 (fr) | 1973-07-13 |
Family
ID=10292977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR727222560A Expired FR2143292B1 (fr) | 1971-06-23 | 1972-06-22 |
Country Status (3)
Country | Link |
---|---|
US (1) | US3772510A (fr) |
FR (1) | FR2143292B1 (fr) |
GB (1) | GB1400389A (fr) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2540595A1 (de) * | 1975-09-09 | 1977-03-10 | Siemens Ag | Korpuskularstrahlmikroskop, insbesondere elektronenmikroskop |
JPS595179B2 (ja) * | 1979-05-18 | 1984-02-03 | 富士通株式会社 | 真空機器の防振構造 |
EP0027195B1 (fr) * | 1979-10-11 | 1985-08-07 | Eaton-Optimetrix Inc. | Système d'isolation contre les chocs et vibrations |
FR2544820B1 (fr) * | 1983-04-22 | 1985-06-21 | Caoutchouc Manuf Plastique | Support moteur a depression |
EP0128971A1 (fr) * | 1983-06-21 | 1984-12-27 | International Business Machines Corporation | Filtre de vibrations |
IN2012DN00837A (fr) * | 2009-07-30 | 2015-06-26 | Hitachi High Tech Corp | |
JP6633986B2 (ja) * | 2016-07-20 | 2020-01-22 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
CN106594162A (zh) * | 2016-12-07 | 2017-04-26 | 上海交通大学 | 一种液压式动力反共振隔振装置 |
CN112392892B (zh) * | 2020-11-06 | 2021-12-10 | 中国科学院物理研究所 | 一种减振装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE437593A (fr) * | 1939-01-17 | |||
US3514600A (en) * | 1967-11-20 | 1970-05-26 | Parke Davis & Co | Flexible conduit means for connecting an electron microscope to a vacuum pump |
-
1971
- 1971-06-23 GB GB2952971A patent/GB1400389A/en not_active Expired
-
1972
- 1972-06-22 US US00265238A patent/US3772510A/en not_active Expired - Lifetime
- 1972-06-22 FR FR727222560A patent/FR2143292B1/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
GB1400389A (en) | 1975-07-16 |
US3772510A (en) | 1973-11-13 |
FR2143292A1 (fr) | 1973-02-02 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |