GB1393937A - Methods for the fabrication of airisolated crossovers - Google Patents
Methods for the fabrication of airisolated crossoversInfo
- Publication number
- GB1393937A GB1393937A GB3938072A GB3938072A GB1393937A GB 1393937 A GB1393937 A GB 1393937A GB 3938072 A GB3938072 A GB 3938072A GB 3938072 A GB3938072 A GB 3938072A GB 1393937 A GB1393937 A GB 1393937A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- gold
- over
- copper
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010410 layer Substances 0.000 abstract 10
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 5
- 229910052737 gold Inorganic materials 0.000 abstract 5
- 239000010931 gold Substances 0.000 abstract 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 4
- 229910052802 copper Inorganic materials 0.000 abstract 4
- 239000010949 copper Substances 0.000 abstract 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 239000012790 adhesive layer Substances 0.000 abstract 2
- 229910000510 noble metal Inorganic materials 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 229910052703 rhodium Inorganic materials 0.000 abstract 1
- 239000010948 rhodium Substances 0.000 abstract 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 239000010936 titanium Substances 0.000 abstract 1
- 229910052719 titanium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4685—Manufacturing of cross-over conductors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N97/00—Electric solid-state thin-film or thick-film devices, not otherwise provided for
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Manufacturing Of Printed Wiring (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US17550171A | 1971-08-27 | 1971-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1393937A true GB1393937A (en) | 1975-05-14 |
Family
ID=22640466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB3938072A Expired GB1393937A (en) | 1971-08-27 | 1972-08-24 | Methods for the fabrication of airisolated crossovers |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE787995A (enrdf_load_stackoverflow) |
| CA (1) | CA954979A (enrdf_load_stackoverflow) |
| FR (1) | FR2150849B1 (enrdf_load_stackoverflow) |
| GB (1) | GB1393937A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3015356A1 (de) * | 1980-04-22 | 1981-10-29 | Robert Bosch Gmbh, 7000 Stuttgart | Freitragende schichten sowie verfahren zur herstellung freitragender schichten, insbesondere fuer sensoren fuer brennkraftmaschinen |
-
1972
- 1972-03-10 CA CA136,802A patent/CA954979A/en not_active Expired
- 1972-08-24 FR FR7230204A patent/FR2150849B1/fr not_active Expired
- 1972-08-24 GB GB3938072A patent/GB1393937A/en not_active Expired
- 1972-08-25 BE BE787995A patent/BE787995A/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| FR2150849B1 (enrdf_load_stackoverflow) | 1976-01-23 |
| FR2150849A1 (enrdf_load_stackoverflow) | 1973-04-13 |
| CA954979A (en) | 1974-09-17 |
| BE787995A (fr) | 1972-12-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |