GB1386316A - Diffusion pump - Google Patents

Diffusion pump

Info

Publication number
GB1386316A
GB1386316A GB5647972A GB5647972A GB1386316A GB 1386316 A GB1386316 A GB 1386316A GB 5647972 A GB5647972 A GB 5647972A GB 5647972 A GB5647972 A GB 5647972A GB 1386316 A GB1386316 A GB 1386316A
Authority
GB
United Kingdom
Prior art keywords
dec
baffle
diffusion pump
plane surface
removable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5647972A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Compagnie Industrielle de Telecommunication CIT Alcatel SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Industrielle de Telecommunication CIT Alcatel SA, Nokia Inc filed Critical Compagnie Industrielle de Telecommunication CIT Alcatel SA
Publication of GB1386316A publication Critical patent/GB1386316A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/15—Cold traps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
GB5647972A 1971-12-07 1972-12-07 Diffusion pump Expired GB1386316A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7143944A FR2163945A5 (enrdf_load_stackoverflow) 1971-12-07 1971-12-07

Publications (1)

Publication Number Publication Date
GB1386316A true GB1386316A (en) 1975-03-05

Family

ID=9087087

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5647972A Expired GB1386316A (en) 1971-12-07 1972-12-07 Diffusion pump

Country Status (4)

Country Link
US (1) US3785162A (enrdf_load_stackoverflow)
DE (1) DE2259808A1 (enrdf_load_stackoverflow)
FR (1) FR2163945A5 (enrdf_load_stackoverflow)
GB (1) GB1386316A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1448752A (en) * 1973-03-08 1976-09-08 Boc International Ltd Vacuum pumping assembly
US4214853A (en) * 1978-05-15 1980-07-29 Cha Industries Evacuation apparatus with cryogenic pump and trap assembly
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造
GB9504260D0 (en) * 1995-03-03 1995-04-19 Boc Group Plc Improvements in diffusion pumps
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
US6063197A (en) * 1997-09-29 2000-05-16 Advanced Micro Devices, Inc. Trap for capturing waste by-product generated by a chemical vapor deposition system
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6319299B1 (en) * 2000-03-30 2001-11-20 Vanguard International Semiconductor Corporation Adjustable cold trap with different stages
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
DE202020104944U1 (de) * 2020-08-26 2021-11-29 Leybold Gmbh Leitvorrichtung, Kühlmitteldurchführung und Diffusionsvakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3410100A (en) * 1965-03-18 1968-11-12 Commerce Usa High-vacuum baffle using cooled, chevron-shaped members

Also Published As

Publication number Publication date
US3785162A (en) 1974-01-15
DE2259808A1 (de) 1973-06-14
FR2163945A5 (enrdf_load_stackoverflow) 1973-07-27

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee