FR2163945A5 - - Google Patents

Info

Publication number
FR2163945A5
FR2163945A5 FR7143944A FR7143944A FR2163945A5 FR 2163945 A5 FR2163945 A5 FR 2163945A5 FR 7143944 A FR7143944 A FR 7143944A FR 7143944 A FR7143944 A FR 7143944A FR 2163945 A5 FR2163945 A5 FR 2163945A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7143944A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Priority to FR7143944A priority Critical patent/FR2163945A5/fr
Priority to DE2259808A priority patent/DE2259808A1/de
Priority to GB5647972A priority patent/GB1386316A/en
Priority to US00312891A priority patent/US3785162A/en
Application granted granted Critical
Publication of FR2163945A5 publication Critical patent/FR2163945A5/fr
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/15—Cold traps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
FR7143944A 1971-12-07 1971-12-07 Expired FR2163945A5 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR7143944A FR2163945A5 (fr) 1971-12-07 1971-12-07
DE2259808A DE2259808A1 (de) 1971-12-07 1972-12-06 Leicht zerlegbare diffusionspumpe
GB5647972A GB1386316A (en) 1971-12-07 1972-12-07 Diffusion pump
US00312891A US3785162A (en) 1971-12-07 1972-12-07 Diffusion pump assembly

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7143944A FR2163945A5 (fr) 1971-12-07 1971-12-07

Publications (1)

Publication Number Publication Date
FR2163945A5 true FR2163945A5 (fr) 1973-07-27

Family

ID=9087087

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7143944A Expired FR2163945A5 (fr) 1971-12-07 1971-12-07

Country Status (4)

Country Link
US (1) US3785162A (fr)
DE (1) DE2259808A1 (fr)
FR (1) FR2163945A5 (fr)
GB (1) GB1386316A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996034669A1 (fr) * 1995-05-02 1996-11-07 Helix Technology Corporation Piege cryogenique protege

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1448752A (en) * 1973-03-08 1976-09-08 Boc International Ltd Vacuum pumping assembly
US4214853A (en) * 1978-05-15 1980-07-29 Cha Industries Evacuation apparatus with cryogenic pump and trap assembly
JP2719298B2 (ja) * 1993-07-29 1998-02-25 アプライド マテリアルズ インコーポレイテッド 真空装置の冷却構造
GB9504260D0 (en) * 1995-03-03 1995-04-19 Boc Group Plc Improvements in diffusion pumps
DE19632123A1 (de) * 1996-08-09 1998-02-12 Leybold Vakuum Gmbh Kryopumpe
US6063197A (en) * 1997-09-29 2000-05-16 Advanced Micro Devices, Inc. Trap for capturing waste by-product generated by a chemical vapor deposition system
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6319299B1 (en) * 2000-03-30 2001-11-20 Vanguard International Semiconductor Corporation Adjustable cold trap with different stages
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
JP5822747B2 (ja) * 2012-02-02 2015-11-24 住友重機械工業株式会社 クライオポンプ
DE202020104944U1 (de) * 2020-08-26 2021-11-29 Leybold Gmbh Leitvorrichtung, Kühlmitteldurchführung und Diffusionsvakuumpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3410100A (en) * 1965-03-18 1968-11-12 Commerce Usa High-vacuum baffle using cooled, chevron-shaped members

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1996034669A1 (fr) * 1995-05-02 1996-11-07 Helix Technology Corporation Piege cryogenique protege
FR2733801A1 (fr) * 1995-05-02 1996-11-08 Helix Tech Corp Piege cryogenique, arrangement cryogenique, pompe a vide et procede de piegeage cryogenique

Also Published As

Publication number Publication date
DE2259808A1 (de) 1973-06-14
US3785162A (en) 1974-01-15
GB1386316A (en) 1975-03-05

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Legal Events

Date Code Title Description
ST Notification of lapse