US3785162A - Diffusion pump assembly - Google Patents

Diffusion pump assembly Download PDF

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Publication number
US3785162A
US3785162A US00312891A US3785162DA US3785162A US 3785162 A US3785162 A US 3785162A US 00312891 A US00312891 A US 00312891A US 3785162D A US3785162D A US 3785162DA US 3785162 A US3785162 A US 3785162A
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US
United States
Prior art keywords
condensation
pump body
tank
pump assembly
fins
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US00312891A
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English (en)
Inventor
J Long
J Bessot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nokia Inc
Original Assignee
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nokia Inc filed Critical Nokia Inc
Application granted granted Critical
Publication of US3785162A publication Critical patent/US3785162A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F9/00—Diffusion pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S55/00—Gas separation
    • Y10S55/15—Cold traps

Definitions

  • ABSTRACT Pumping assembly in which the condensation elements for preventing oil from entering the enclosure to be emptied consists of a baffle cooled by conduction coming from a cold source and by a liquid nitrogen trap in communication with a liquid nitrogen receptacle.
  • the cold source of the baffle is incorporated in the wall of the pump body; the liquid nitrogen receptacle is fixed under the pump cover, so that the assembly is easy to dismantle and to clean.
  • the object of the invention is a diffusion pump which may easily be dismantled with a view to cleaning the elements constituting the pump.
  • diffusion pumps comprise, essentially, above a heater, an oil receptacle above which is installed a diffuser which tends to discharge oil vapor at high speed against the cooled wall forming the pump body and surrounding the oil receptacle. These vapors are condensed on that wall before being made to enter the receptacle again.
  • the present invention is directed to a pumping assembly in which the various superimposed components are very easy to dismantle so that the inner wall of the pump body is then easily accessible and the cleaning thereof becomes very easy. Moreover, the various components of the pump, having been removed from inside the pump body, may, in their turn, be cleaned very minutely.
  • the object of the invention is therefore a diffusion pump assembly which is easy to dismantle, comprising, in a cylindrical pump body 1, closed by its cover locked in the closed position by a rim 11 by suitable locking devices, such as clamps, an oil receptacle arranged in the bottom of the pump body and above which is installed its diffuser 21, as well as two superimposed condensation elements placed at the level of the discharge pipe 23, constituted by a baffle 9 provided with fins 7, by a protection cap 22 and by a liquid nitrogen trap 24 provided with fins 16, characterized in that the connection established between the pump body 1 and the components of the pump enable the extraction of the said components by a simple linear upward movement, after the unlocking of the rim 11.
  • An analogous device may be implemented for producing the liquid nitrogen trap, the surface of the bases of the ribs in contact with the surface of the cold source is then much greater and the cross section of the conductive ribs is appreciably greater.
  • liquid nitrogen trap circuit with the pump cover, this enabling, as previously, the connection of the nitrogen tubing to be kept outside the pump.
  • the action of the trap is then made more energetic without giving rise to any difficulty in dismantling. Indeed, when the cover is removed, the trap and the liquid nitrogen tank which are connected to it are removed simultaneously.
  • FIG. 1 showing diagrammatically a sectional view of an example of an embodiment of a diffusion pump according to the invention, in which the baffle is cooled by conduction, whereas the liquid nitrogen trap is connected to the cover.
  • the single FIGURE shows the pump body 1 surrounded by a water cooling coil 2, above which is installed a tank 3 forming the cold source of the baffle 9.
  • the latter itself is constituted by a set of ribs such as 4 to which are thermally and mechanically connected the fins such as 7 and 8 forming an opaque screen.
  • These ribs 4 are provided, at both ends, with a dressed base 5 which rests against a component having a surface 6 which is also perfectly plane, on the upper part of the tank 3.
  • the oil receptacle 20 above which its diffuser 21 is installed is separated from the baffle by a cap 22 mechanically and thermally connected to the baffle 9.
  • the baffle is arranged substantially at the level of the tubing 23 making the pump communicate with the space to be emptied through a valve (not shown).
  • the cover 10 closing the pumping column is placed above the baffle. That-cover is connected to the pump body 1 by a rim 1 1 which has an O ring (not shown) arranged in an annular groove 12.
  • the liquid nitrogen trap 24 is supported by the cover 10.
  • the liquid nitro gen tank 13 forming the cold source of the liquid nitrogen is extended downwards by tubing such as 18 and 19 supporting the circular fins such as 16 in close thermal connection with the said tubing.
  • the tank As its upper part, the tank is extended by two tubes: a supply tube 15 closed by a stopper 17 and a discharge tube 14.
  • connection means between the various components make the dismantling of the pump very easy; when the cover 10 is removed after having released the rim 11, the condensation device constituted by the liquid nitrogen trap which is mechanically connected to the cover is removed simultaneously. It is then sufficient to remove the second condensation device formed by the baffle. That dismantling is also very easy, since the baffle rests simply on its cooling tank 3, the thermal connection having been made very good by the contact between the dressed base 5 and the perfectly plane surface 6 of the tank 3. No connection by screw or rivet is established between the baffle and the pump body.
  • the cap 22 which protects the baffle 9 from the direct discharge of the diffuser 21, but which is connected to the ribs 4 of the baffle 9 is removed simultaneously.
  • the diffuser 21 is then accessible. It is also possible to remove the diffuser 21 and the oil receptacle 20. The pump body 1 is then completely released.
  • a diffusion pump assembly comprising a generally cylindrical body having one open end closed by a cover, a discharge pipe communicating with the interior of said pump body through the side thereof, an oil receptacle within said pump body supported on the bottom thereof, a diffuser supported above said oil receptacle, first and second superimposed condensation elements disposed within said pump body substantially at the level of said discharge pipe, said first condensation element being supported on an annular inset portion of said pump body and including a baffle provided with fins and a protection cap disposed above said dif- I fuser, said second condensation element being supported by said cover above said first condensation element and including a liquid nitrogen trap provided with fins, whereby the disposition and support of the components of the pump assembly enable the extraction of said components by a simple linear upward movement.
  • a diffusion pump assembly as defined in claim 1 further including a condensation tank associated with said first condensation element and disposed around said pump body against the outer surface of said annular inset portion thereof.
  • a diffusion pump assembly as defined in claim 4 wherein said pump body is constituted by two cylindrical components having a common axis, placed one above the other and being connected at the level of the discharge duct by a horizontal circular shoulder forming said annular inset portion which also constitutes the upper part of said condensation tank.
  • a diffusion pump assembly as defined in claim 2 wherein said pump body is constituted by two cylindrical components having a common axis, placed one above the other and being connected at the level of the discharge duct by a horizontal circular shoulder forming said annular inset portion which also constitutes the upper part of said condensation tank.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
US00312891A 1971-12-07 1972-12-07 Diffusion pump assembly Expired - Lifetime US3785162A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7143944A FR2163945A5 (enrdf_load_stackoverflow) 1971-12-07 1971-12-07

Publications (1)

Publication Number Publication Date
US3785162A true US3785162A (en) 1974-01-15

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ID=9087087

Family Applications (1)

Application Number Title Priority Date Filing Date
US00312891A Expired - Lifetime US3785162A (en) 1971-12-07 1972-12-07 Diffusion pump assembly

Country Status (4)

Country Link
US (1) US3785162A (enrdf_load_stackoverflow)
DE (1) DE2259808A1 (enrdf_load_stackoverflow)
FR (1) FR2163945A5 (enrdf_load_stackoverflow)
GB (1) GB1386316A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902330A (en) * 1973-03-08 1975-09-02 British Oxygen Co Ltd Vacuum pump
US4214853A (en) * 1978-05-15 1980-07-29 Cha Industries Evacuation apparatus with cryogenic pump and trap assembly
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US5548964A (en) * 1993-07-29 1996-08-27 Applied Materials, Inc. Method and apparatus for cooling a vacuum device
US5700134A (en) * 1995-03-03 1997-12-23 The Boc Group Plc Diffusion pumps
WO1998006943A1 (de) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Kryopumpe
US6063197A (en) * 1997-09-29 2000-05-16 Advanced Micro Devices, Inc. Trap for capturing waste by-product generated by a chemical vapor deposition system
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6319299B1 (en) * 2000-03-30 2001-11-20 Vanguard International Semiconductor Corporation Adjustable cold trap with different stages
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
US20130199210A1 (en) * 2012-02-02 2013-08-08 Sumitomo Heavy Industries, Ltd. Cryopump
US20230323899A1 (en) * 2020-08-26 2023-10-12 Leybold Gmbh Guide device, coolant duct and diffusion vacuum pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3410100A (en) * 1965-03-18 1968-11-12 Commerce Usa High-vacuum baffle using cooled, chevron-shaped members

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3137551A (en) * 1959-10-02 1964-06-16 John T Mark Ultra high vacuum device
US3081068A (en) * 1959-10-16 1963-03-12 Milleron Norman Cold trap
US3168819A (en) * 1961-03-06 1965-02-09 Gen Electric Vacuum system
US3321927A (en) * 1965-02-12 1967-05-30 Jr Charles B Hood Spiral liquid cooled baffle for shielding diffusion pumps
US3410100A (en) * 1965-03-18 1968-11-12 Commerce Usa High-vacuum baffle using cooled, chevron-shaped members

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3902330A (en) * 1973-03-08 1975-09-02 British Oxygen Co Ltd Vacuum pump
US4214853A (en) * 1978-05-15 1980-07-29 Cha Industries Evacuation apparatus with cryogenic pump and trap assembly
US5548964A (en) * 1993-07-29 1996-08-27 Applied Materials, Inc. Method and apparatus for cooling a vacuum device
US5700134A (en) * 1995-03-03 1997-12-23 The Boc Group Plc Diffusion pumps
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US6092373A (en) * 1996-08-09 2000-07-25 Leybold Vakuum Gmbh Cryopump
WO1998006943A1 (de) * 1996-08-09 1998-02-19 Leybold Vakuum Gmbh Kryopumpe
US6063197A (en) * 1997-09-29 2000-05-16 Advanced Micro Devices, Inc. Trap for capturing waste by-product generated by a chemical vapor deposition system
US6155059A (en) * 1999-01-13 2000-12-05 Helix Technology Corporation High capacity cryopump
US6319299B1 (en) * 2000-03-30 2001-11-20 Vanguard International Semiconductor Corporation Adjustable cold trap with different stages
US20100011784A1 (en) * 2008-07-17 2010-01-21 Sumitomo Heavy Industries, Ltd. Cryopump louver extension
US20130199210A1 (en) * 2012-02-02 2013-08-08 Sumitomo Heavy Industries, Ltd. Cryopump
US9737828B2 (en) * 2012-02-02 2017-08-22 Sumitomo Heavy Industries, Ltd. Cryopump having inlet cryopanel extension
US20230323899A1 (en) * 2020-08-26 2023-10-12 Leybold Gmbh Guide device, coolant duct and diffusion vacuum pump

Also Published As

Publication number Publication date
GB1386316A (en) 1975-03-05
DE2259808A1 (de) 1973-06-14
FR2163945A5 (enrdf_load_stackoverflow) 1973-07-27

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