GB1383165A - Manufacturing semiconductor devices - Google Patents
Manufacturing semiconductor devicesInfo
- Publication number
- GB1383165A GB1383165A GB2048273A GB2048273A GB1383165A GB 1383165 A GB1383165 A GB 1383165A GB 2048273 A GB2048273 A GB 2048273A GB 2048273 A GB2048273 A GB 2048273A GB 1383165 A GB1383165 A GB 1383165A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wafers
- rod
- plane
- spine
- april
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 title abstract 5
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 235000012431 wafers Nutrition 0.000 abstract 8
- 238000004140 cleaning Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 238000003776 cleavage reaction Methods 0.000 abstract 1
- 239000013078 crystal Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 239000007791 liquid phase Substances 0.000 abstract 1
- 230000007017 scission Effects 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Weting (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4306172A JPS495265A (zh) | 1972-04-28 | 1972-04-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1383165A true GB1383165A (en) | 1975-02-05 |
Family
ID=12653339
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB2048273A Expired GB1383165A (en) | 1972-04-28 | 1973-04-30 | Manufacturing semiconductor devices |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS495265A (zh) |
DE (1) | DE2321501A1 (zh) |
FR (1) | FR2182216B1 (zh) |
GB (1) | GB1383165A (zh) |
NL (1) | NL7305945A (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3840588C1 (en) * | 1988-12-02 | 1990-02-22 | Westdeutsche Quarzschmelze Gmbh & Co. Kg, 2054 Geesthacht, De | Quartz glass container for the thermal treatment of semiconductor wafers |
EP1342259A1 (en) * | 2000-11-29 | 2003-09-10 | Origin Energy Retail Limited | Semiconductor wafer processing to increase the usable planar surface area |
US7828983B2 (en) | 2001-11-29 | 2010-11-09 | Transform Solar Pty Ltd | Semiconductor texturing process |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5255537A (en) * | 1975-10-31 | 1977-05-07 | Sumitomo Electric Ind Ltd | Chargning device |
JPS5421727A (en) * | 1977-07-19 | 1979-02-19 | Ricoh Co Ltd | Detecting and treating method for wire rupture of corona discharge of copier |
DE102006060195A1 (de) * | 2006-12-18 | 2008-06-26 | Jacobs University Bremen Ggmbh | Kantenverrundung von Wafern |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3128213A (en) * | 1961-07-20 | 1964-04-07 | Int Rectifier Corp | Method of making a semiconductor device |
-
1972
- 1972-04-28 JP JP4306172A patent/JPS495265A/ja active Pending
-
1973
- 1973-04-27 FR FR7315498A patent/FR2182216B1/fr not_active Expired
- 1973-04-27 NL NL7305945A patent/NL7305945A/xx unknown
- 1973-04-27 DE DE19732321501 patent/DE2321501A1/de active Pending
- 1973-04-30 GB GB2048273A patent/GB1383165A/en not_active Expired
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3840588C1 (en) * | 1988-12-02 | 1990-02-22 | Westdeutsche Quarzschmelze Gmbh & Co. Kg, 2054 Geesthacht, De | Quartz glass container for the thermal treatment of semiconductor wafers |
EP1342259A1 (en) * | 2000-11-29 | 2003-09-10 | Origin Energy Retail Limited | Semiconductor wafer processing to increase the usable planar surface area |
EP1575087A3 (en) * | 2000-11-29 | 2006-01-18 | Origin Energy Solar Pty.Ltd | Semiconductor wafer processing to increase the usable planar surface area |
EP1342259A4 (en) * | 2000-11-29 | 2006-04-05 | Origin Energy Solar Pty Ltd | PROCESSING A SEMICONDUCTOR WAFER TO INCREASE THE EXTENT OF THE USEFUL PLANE SURFACE |
US7875794B2 (en) | 2000-11-29 | 2011-01-25 | Transform Solar Pty Ltd | Semiconductor wafer processing to increase the usable planar surface area |
US9583668B2 (en) | 2000-11-29 | 2017-02-28 | The Australian National University | Semiconductor device |
US7828983B2 (en) | 2001-11-29 | 2010-11-09 | Transform Solar Pty Ltd | Semiconductor texturing process |
Also Published As
Publication number | Publication date |
---|---|
DE2321501A1 (de) | 1973-11-15 |
FR2182216B1 (zh) | 1977-08-19 |
JPS495265A (zh) | 1974-01-17 |
FR2182216A1 (zh) | 1973-12-07 |
NL7305945A (zh) | 1973-10-30 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PE20 | Patent expired after termination of 20 years |
Effective date: 19930429 |