GB1375995A - Electron beam apparatus - Google Patents
Electron beam apparatusInfo
- Publication number
- GB1375995A GB1375995A GB5900671A GB5900671A GB1375995A GB 1375995 A GB1375995 A GB 1375995A GB 5900671 A GB5900671 A GB 5900671A GB 5900671 A GB5900671 A GB 5900671A GB 1375995 A GB1375995 A GB 1375995A
- Authority
- GB
- United Kingdom
- Prior art keywords
- wire
- electron
- dec
- anode
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 238000012544 monitoring process Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03G—ELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
- G03G15/00—Apparatus for electrographic processes using a charge pattern
- G03G15/06—Apparatus for electrographic processes using a charge pattern for developing
- G03G15/08—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer
- G03G15/09—Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer using magnetic brush
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/02—Electron guns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7018701A NL7018701A (enrdf_load_stackoverflow) | 1970-12-23 | 1970-12-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1375995A true GB1375995A (en) | 1974-12-04 |
Family
ID=19811873
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5900671A Expired GB1375995A (en) | 1970-12-23 | 1971-12-20 | Electron beam apparatus |
Country Status (7)
Country | Link |
---|---|
US (1) | US3745342A (enrdf_load_stackoverflow) |
JP (1) | JPS568140Y2 (enrdf_load_stackoverflow) |
CA (1) | CA957787A (enrdf_load_stackoverflow) |
DE (1) | DE2161027C3 (enrdf_load_stackoverflow) |
FR (1) | FR2119692A5 (enrdf_load_stackoverflow) |
GB (1) | GB1375995A (enrdf_load_stackoverflow) |
NL (1) | NL7018701A (enrdf_load_stackoverflow) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4115720A (en) * | 1977-03-31 | 1978-09-19 | Rca Corporation | Device having thermionic cathode heated by field-emitted electrons |
NL7906958A (nl) * | 1979-09-19 | 1981-03-23 | Philips Nv | Metaaldraadkathode voor elektronenstraalapparaat. |
US4388560A (en) * | 1981-05-26 | 1983-06-14 | Hughes Aircraft Company | Filament dispenser cathode |
US4560897A (en) * | 1983-06-06 | 1985-12-24 | The United States Of America As Represented By The Department Of Energy | Rigid indented cylindrical cathode for X-ray tube |
NL8302275A (nl) * | 1983-06-28 | 1985-01-16 | Philips Nv | Electronenstraalapparaat met metaaldraadbron. |
JPH0810637B2 (ja) * | 1990-08-04 | 1996-01-31 | 三菱電機株式会社 | 高周波電子銃装置 |
US6091187A (en) * | 1998-04-08 | 2000-07-18 | International Business Machines Corporation | High emittance electron source having high illumination uniformity |
-
1970
- 1970-12-23 NL NL7018701A patent/NL7018701A/xx unknown
-
1971
- 1971-12-01 US US00203708A patent/US3745342A/en not_active Expired - Lifetime
- 1971-12-09 DE DE2161027A patent/DE2161027C3/de not_active Expired
- 1971-12-20 CA CA130,503A patent/CA957787A/en not_active Expired
- 1971-12-20 GB GB5900671A patent/GB1375995A/en not_active Expired
- 1971-12-23 FR FR7146402A patent/FR2119692A5/fr not_active Expired
-
1977
- 1977-11-18 JP JP1977154238U patent/JPS568140Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS568140Y2 (enrdf_load_stackoverflow) | 1981-02-23 |
CA957787A (en) | 1974-11-12 |
DE2161027B2 (de) | 1979-03-08 |
FR2119692A5 (enrdf_load_stackoverflow) | 1972-08-04 |
JPS5380361U (enrdf_load_stackoverflow) | 1978-07-04 |
DE2161027A1 (de) | 1972-07-13 |
US3745342A (en) | 1973-07-10 |
NL7018701A (enrdf_load_stackoverflow) | 1972-06-27 |
DE2161027C3 (de) | 1979-11-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed [section 19, patents act 1949] | ||
PCNP | Patent ceased through non-payment of renewal fee |