GB1375995A - Electron beam apparatus - Google Patents

Electron beam apparatus

Info

Publication number
GB1375995A
GB1375995A GB5900671A GB5900671A GB1375995A GB 1375995 A GB1375995 A GB 1375995A GB 5900671 A GB5900671 A GB 5900671A GB 5900671 A GB5900671 A GB 5900671A GB 1375995 A GB1375995 A GB 1375995A
Authority
GB
United Kingdom
Prior art keywords
wire
electron
dec
anode
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5900671A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1375995A publication Critical patent/GB1375995A/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03GELECTROGRAPHY; ELECTROPHOTOGRAPHY; MAGNETOGRAPHY
    • G03G15/00Apparatus for electrographic processes using a charge pattern
    • G03G15/06Apparatus for electrographic processes using a charge pattern for developing
    • G03G15/08Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer
    • G03G15/09Apparatus for electrographic processes using a charge pattern for developing using a solid developer, e.g. powder developer using magnetic brush
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02Electron guns
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Sources, Ion Sources (AREA)
GB5900671A 1970-12-23 1971-12-20 Electron beam apparatus Expired GB1375995A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7018701A NL7018701A (enrdf_load_stackoverflow) 1970-12-23 1970-12-23

Publications (1)

Publication Number Publication Date
GB1375995A true GB1375995A (en) 1974-12-04

Family

ID=19811873

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5900671A Expired GB1375995A (en) 1970-12-23 1971-12-20 Electron beam apparatus

Country Status (7)

Country Link
US (1) US3745342A (enrdf_load_stackoverflow)
JP (1) JPS568140Y2 (enrdf_load_stackoverflow)
CA (1) CA957787A (enrdf_load_stackoverflow)
DE (1) DE2161027C3 (enrdf_load_stackoverflow)
FR (1) FR2119692A5 (enrdf_load_stackoverflow)
GB (1) GB1375995A (enrdf_load_stackoverflow)
NL (1) NL7018701A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4115720A (en) * 1977-03-31 1978-09-19 Rca Corporation Device having thermionic cathode heated by field-emitted electrons
NL7906958A (nl) * 1979-09-19 1981-03-23 Philips Nv Metaaldraadkathode voor elektronenstraalapparaat.
US4388560A (en) * 1981-05-26 1983-06-14 Hughes Aircraft Company Filament dispenser cathode
US4560897A (en) * 1983-06-06 1985-12-24 The United States Of America As Represented By The Department Of Energy Rigid indented cylindrical cathode for X-ray tube
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
JPH0810637B2 (ja) * 1990-08-04 1996-01-31 三菱電機株式会社 高周波電子銃装置
US6091187A (en) * 1998-04-08 2000-07-18 International Business Machines Corporation High emittance electron source having high illumination uniformity

Also Published As

Publication number Publication date
JPS568140Y2 (enrdf_load_stackoverflow) 1981-02-23
CA957787A (en) 1974-11-12
DE2161027B2 (de) 1979-03-08
FR2119692A5 (enrdf_load_stackoverflow) 1972-08-04
JPS5380361U (enrdf_load_stackoverflow) 1978-07-04
DE2161027A1 (de) 1972-07-13
US3745342A (en) 1973-07-10
NL7018701A (enrdf_load_stackoverflow) 1972-06-27
DE2161027C3 (de) 1979-11-15

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee