GB1373478A - Generation of electron beams - Google Patents

Generation of electron beams

Info

Publication number
GB1373478A
GB1373478A GB1709373A GB1709373A GB1373478A GB 1373478 A GB1373478 A GB 1373478A GB 1709373 A GB1709373 A GB 1709373A GB 1709373 A GB1709373 A GB 1709373A GB 1373478 A GB1373478 A GB 1373478A
Authority
GB
United Kingdom
Prior art keywords
field
april
winding
generation
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1709373A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of GB1373478A publication Critical patent/GB1373478A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/063—Geometrical arrangement of electrodes for beam-forming
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • B23K15/002—Devices involving relative movement between electronbeam and workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)

Abstract

1373478 Electron beam apparatus BALZERS PATENT- & BETEILIGUNGS AG 10 April 1973 [26 April 1972] 17093/73 Heading H1D An apparatus for treating an object 14 with an electron beam 1 comprises a cathode 2, a focusing electrode 3 and an anode 12, means being provided for generating a magnetic field 6 to direct the electrons in a curved path to the object 14 and further means for producing a magnetic field perpendicular to the field 6 which can be periodically varied to scan the beam along a direction perpendicular to Fig. 1. The further means can be a single straight conductor 15 or can be a portion of a winding, Figs. 3 and 4 (not shown). In the case of a single conductor this can also form one edge of an anode slit. The field 6 can be produced by a winding or permanent magnet 11 between polepieces 4, (5).
GB1709373A 1972-04-26 1973-04-10 Generation of electron beams Expired GB1373478A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH624972A CH551083A (en) 1972-04-26 1972-04-26 ELECTRON BEAM GENERATING SYSTEM FOR MATERIAL PROCESSING.

Publications (1)

Publication Number Publication Date
GB1373478A true GB1373478A (en) 1974-11-13

Family

ID=4306605

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1709373A Expired GB1373478A (en) 1972-04-26 1973-04-10 Generation of electron beams

Country Status (6)

Country Link
JP (1) JPS5418439B2 (en)
CH (1) CH551083A (en)
DE (1) DE7312299U (en)
FR (1) FR2182047B1 (en)
GB (1) GB1373478A (en)
NL (1) NL152401B (en)

Also Published As

Publication number Publication date
NL7208078A (en) 1973-10-30
NL152401B (en) 1977-02-15
JPS5418439B2 (en) 1979-07-07
DE2316257A1 (en) 1973-11-15
JPS4954799A (en) 1974-05-28
FR2182047A1 (en) 1973-12-07
DE7312299U (en) 1977-09-08
CH551083A (en) 1974-06-28
DE2316257B2 (en) 1975-03-27
FR2182047B1 (en) 1978-06-23

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee