GB1366991A - Semiconductor device manufacture - Google Patents

Semiconductor device manufacture

Info

Publication number
GB1366991A
GB1366991A GB50972A GB50972A GB1366991A GB 1366991 A GB1366991 A GB 1366991A GB 50972 A GB50972 A GB 50972A GB 50972 A GB50972 A GB 50972A GB 1366991 A GB1366991 A GB 1366991A
Authority
GB
United Kingdom
Prior art keywords
layer
plate
oxide
type
underside
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB50972A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Philips Electronics UK Ltd
Original Assignee
Philips Electronic and Associated Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Electronic and Associated Industries Ltd filed Critical Philips Electronic and Associated Industries Ltd
Publication of GB1366991A publication Critical patent/GB1366991A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00—Subject matter not provided for in other groups of this subclass
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43—Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/053—Field effect transistors fets
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/06—Gettering

Landscapes

  • Formation Of Insulating Films (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Light Receiving Elements (AREA)
  • Weting (AREA)
  • Solid State Image Pick-Up Elements (AREA)
GB50972A 1971-01-08 1972-01-05 Semiconductor device manufacture Expired GB1366991A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7100275A NL7100275A (https=) 1971-01-08 1971-01-08

Publications (1)

Publication Number Publication Date
GB1366991A true GB1366991A (en) 1974-09-18

Family

ID=19812221

Family Applications (1)

Application Number Title Priority Date Filing Date
GB50972A Expired GB1366991A (en) 1971-01-08 1972-01-05 Semiconductor device manufacture

Country Status (8)

Country Link
US (1) US3811975A (https=)
JP (1) JPS5340077B1 (https=)
AU (1) AU3742871A (https=)
CA (1) CA937496A (https=)
DE (1) DE2162445C3 (https=)
FR (1) FR2121664B1 (https=)
GB (1) GB1366991A (https=)
NL (1) NL7100275A (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010572A (https=) * 1973-05-25 1975-02-03
US3923567A (en) * 1974-08-09 1975-12-02 Silicon Materials Inc Method of reclaiming a semiconductor wafer
JPS51102556A (https=) * 1975-03-07 1976-09-10 Hitachi Ltd
US4040893A (en) * 1976-04-12 1977-08-09 General Electric Company Method of selective etching of materials utilizing masks of binary silicate glasses
US4125427A (en) * 1976-08-27 1978-11-14 Ncr Corporation Method of processing a semiconductor
DE3037316C2 (de) * 1979-10-03 1982-12-23 Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa Verfahren zur Herstellung von Leistungsthyristoren
US4388147A (en) * 1982-08-16 1983-06-14 Intel Corporation Method for steam leaching phosphorus from phosphosilicate glass during semiconductor fabrication
US4525239A (en) * 1984-04-23 1985-06-25 Hewlett-Packard Company Extrinsic gettering of GaAs wafers for MESFETS and integrated circuits
JPS6124240A (ja) * 1984-07-13 1986-02-01 Toshiba Corp 半導体基板
US4589928A (en) * 1984-08-21 1986-05-20 At&T Bell Laboratories Method of making semiconductor integrated circuits having backside gettered with phosphorus
JPH1140498A (ja) * 1997-07-22 1999-02-12 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
US7410901B2 (en) * 2006-04-27 2008-08-12 Honeywell International, Inc. Submicron device fabrication
US10276362B2 (en) * 2016-04-29 2019-04-30 Infineon Technologies Ag Method for processing a semiconductor region and an electronic device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209914A (en) * 1967-03-29 1970-10-21 Marconi Co Ltd Improvements in or relating to semi-conductor devices

Also Published As

Publication number Publication date
DE2162445B2 (de) 1980-08-28
FR2121664A1 (https=) 1972-08-25
CA937496A (en) 1973-11-27
FR2121664B1 (https=) 1977-09-02
DE2162445A1 (de) 1972-07-20
AU3742871A (en) 1973-07-05
NL7100275A (https=) 1972-07-11
DE2162445C3 (de) 1981-04-16
JPS4713870A (https=) 1972-07-21
JPS5340077B1 (https=) 1978-10-25
US3811975A (en) 1974-05-21

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee