JPS4713870A - - Google Patents

Info

Publication number
JPS4713870A
JPS4713870A JP5772A JP5772A JPS4713870A JP S4713870 A JPS4713870 A JP S4713870A JP 5772 A JP5772 A JP 5772A JP 5772 A JP5772 A JP 5772A JP S4713870 A JPS4713870 A JP S4713870A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5772A
Other languages
Japanese (ja)
Other versions
JPS5340077B1 (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4713870A publication Critical patent/JPS4713870A/ja
Publication of JPS5340077B1 publication Critical patent/JPS5340077B1/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D99/00Subject matter not provided for in other groups of this subclass
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00Encapsulations, e.g. protective coatings
    • H10W74/40Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/43Encapsulations, e.g. protective coatings characterised by their materials comprising oxides, nitrides or carbides, e.g. ceramics or glasses
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/053Field effect transistors fets
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/06Gettering

Landscapes

  • Formation Of Insulating Films (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Weting (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP5772A 1971-01-08 1972-01-05 Pending JPS5340077B1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7100275A NL7100275A (https=) 1971-01-08 1971-01-08

Publications (2)

Publication Number Publication Date
JPS4713870A true JPS4713870A (https=) 1972-07-21
JPS5340077B1 JPS5340077B1 (https=) 1978-10-25

Family

ID=19812221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5772A Pending JPS5340077B1 (https=) 1971-01-08 1972-01-05

Country Status (8)

Country Link
US (1) US3811975A (https=)
JP (1) JPS5340077B1 (https=)
AU (1) AU3742871A (https=)
CA (1) CA937496A (https=)
DE (1) DE2162445C3 (https=)
FR (1) FR2121664B1 (https=)
GB (1) GB1366991A (https=)
NL (1) NL7100275A (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010572A (https=) * 1973-05-25 1975-02-03
JPS51102556A (https=) * 1975-03-07 1976-09-10 Hitachi Ltd

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3923567A (en) * 1974-08-09 1975-12-02 Silicon Materials Inc Method of reclaiming a semiconductor wafer
US4040893A (en) * 1976-04-12 1977-08-09 General Electric Company Method of selective etching of materials utilizing masks of binary silicate glasses
US4125427A (en) * 1976-08-27 1978-11-14 Ncr Corporation Method of processing a semiconductor
DE3037316C2 (de) * 1979-10-03 1982-12-23 Tokyo Shibaura Denki K.K., Kawasaki, Kanagawa Verfahren zur Herstellung von Leistungsthyristoren
US4388147A (en) * 1982-08-16 1983-06-14 Intel Corporation Method for steam leaching phosphorus from phosphosilicate glass during semiconductor fabrication
US4525239A (en) * 1984-04-23 1985-06-25 Hewlett-Packard Company Extrinsic gettering of GaAs wafers for MESFETS and integrated circuits
JPS6124240A (ja) * 1984-07-13 1986-02-01 Toshiba Corp 半導体基板
US4589928A (en) * 1984-08-21 1986-05-20 At&T Bell Laboratories Method of making semiconductor integrated circuits having backside gettered with phosphorus
JPH1140498A (ja) 1997-07-22 1999-02-12 Semiconductor Energy Lab Co Ltd 半導体装置の作製方法
US7410901B2 (en) * 2006-04-27 2008-08-12 Honeywell International, Inc. Submicron device fabrication
US10276362B2 (en) * 2016-04-29 2019-04-30 Infineon Technologies Ag Method for processing a semiconductor region and an electronic device

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1209914A (en) * 1967-03-29 1970-10-21 Marconi Co Ltd Improvements in or relating to semi-conductor devices

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010572A (https=) * 1973-05-25 1975-02-03
JPS51102556A (https=) * 1975-03-07 1976-09-10 Hitachi Ltd

Also Published As

Publication number Publication date
CA937496A (en) 1973-11-27
AU3742871A (en) 1973-07-05
GB1366991A (en) 1974-09-18
JPS5340077B1 (https=) 1978-10-25
US3811975A (en) 1974-05-21
FR2121664A1 (https=) 1972-08-25
FR2121664B1 (https=) 1977-09-02
NL7100275A (https=) 1972-07-11
DE2162445C3 (de) 1981-04-16
DE2162445A1 (de) 1972-07-20
DE2162445B2 (de) 1980-08-28

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