GB1360086A - Method of and apparatus for measuring the thickness of layers - Google Patents

Method of and apparatus for measuring the thickness of layers

Info

Publication number
GB1360086A
GB1360086A GB4746071A GB4746071A GB1360086A GB 1360086 A GB1360086 A GB 1360086A GB 4746071 A GB4746071 A GB 4746071A GB 4746071 A GB4746071 A GB 4746071A GB 1360086 A GB1360086 A GB 1360086A
Authority
GB
United Kingdom
Prior art keywords
reflector
coil
layer
layers
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB4746071A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIX STEINGROEVE ELEKTRO PHYSIK
Original Assignee
NIX STEINGROEVE ELEKTRO PHYSIK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NIX STEINGROEVE ELEKTRO PHYSIK filed Critical NIX STEINGROEVE ELEKTRO PHYSIK
Publication of GB1360086A publication Critical patent/GB1360086A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
GB4746071A 1970-10-12 1971-10-12 Method of and apparatus for measuring the thickness of layers Expired GB1360086A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702049976 DE2049976B2 (de) 1970-10-12 1970-10-12 Verfahren zur messung der dicke von schichten im bauwesen und vorrichtung zur durchfuehrung des verfahren

Publications (1)

Publication Number Publication Date
GB1360086A true GB1360086A (en) 1974-07-17

Family

ID=5784839

Family Applications (1)

Application Number Title Priority Date Filing Date
GB4746071A Expired GB1360086A (en) 1970-10-12 1971-10-12 Method of and apparatus for measuring the thickness of layers

Country Status (4)

Country Link
US (1) US3815016A (https=)
DE (1) DE2049976B2 (https=)
FR (1) FR2111278A5 (https=)
GB (1) GB1360086A (https=)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4160208A (en) * 1976-01-27 1979-07-03 Elektro-Physik, Hans Nix & Dr. -Ing E. Steingroever Kg. Method of calibrating magnetic thickness gauges
SU1048302A1 (ru) * 1981-10-05 1983-10-15 Всесоюзный Научно-Исследовательский Институт По Разработке Неразрушающих Методов И Средств Контроля Качества Материалов Способ измерени толщины ферромагнитных изделий и покрытий
DE3176014D1 (en) * 1981-10-14 1987-04-23 Combustion Eng Clad thickness measuring device
DE3416659A1 (de) * 1984-05-05 1985-11-07 NATEC Institut für naturwissenschaftlich-technische Dienste GmbH, 2000 Hamburg Verfahren und vorrichtung zur zerstoerungsfreien schichtdickenmessung an miteinander verschweissten oder versiegelten metall-kunststoff-verbundfolien
EP0276540A1 (en) * 1986-09-29 1988-08-03 The University Of Western Australia Inductive sensing
EP0277421A1 (en) * 1986-12-05 1988-08-10 The University Of Western Australia Capacitance sensor arrangement
US4814703A (en) * 1987-08-04 1989-03-21 The Boeing Company Method and apparatus for gap measurement between a graphite/epoxy structure and a metallic model
US5200704A (en) * 1991-02-28 1993-04-06 Westinghouse Electric Corp. System and method including a buried flexible sheet target impregnated with ferromagnetic particles and eddy current probe for determining proximity of a non-conductive underground structure
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
DE10001516B4 (de) * 2000-01-15 2014-05-08 Alstom Technology Ltd. Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metallischen Grundmaterial
US20040011462A1 (en) * 2002-06-28 2004-01-22 Lam Research Corporation Method and apparatus for applying differential removal rates to a surface of a substrate
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7309618B2 (en) * 2002-06-28 2007-12-18 Lam Research Corporation Method and apparatus for real time metal film thickness measurement
US6808590B1 (en) 2002-06-28 2004-10-26 Lam Research Corporation Method and apparatus of arrayed sensors for metrological control
US7128803B2 (en) * 2002-06-28 2006-10-31 Lam Research Corporation Integration of sensor based metrology into semiconductor processing tools
US7084621B2 (en) * 2002-09-25 2006-08-01 Lam Research Corporation Enhancement of eddy current based measurement capabilities
US6788050B2 (en) * 2002-12-23 2004-09-07 Lam Research Corp. System, method and apparatus for thin-film substrate signal separation using eddy current
US20050066739A1 (en) * 2003-09-26 2005-03-31 Lam Research Corporation Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring
DE102004031626A1 (de) * 2004-06-30 2006-02-02 Robert Bosch Gmbh Verfahren und Vorrichtung zur Materialstärkenbestimmung auf Hochfrequenzbasis
CN103940902B (zh) * 2014-05-13 2016-08-03 爱德森（厦门）电子有限公司 利用涡流阻抗平面检测仪检测非金属材料不连续性方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2581394A (en) * 1945-08-20 1952-01-08 Jacob E Dinger Method of and apparatus for measuring the thickness of nonconducting coatings or films
US2665333A (en) * 1950-11-30 1954-01-05 Libbey Owens Ford Glass Co Apparatus for measuring thickness of sheet material
US2874349A (en) * 1955-06-02 1959-02-17 Henry N Staats Apparatus for detecting and measuring the depth of reinforcing rods
US3662225A (en) * 1970-01-09 1972-05-09 Qicsys Systems Inc Multi-printed circuit assembly

Also Published As

Publication number Publication date
DE2049976A1 (de) 1972-04-13
US3815016A (en) 1974-06-04
DE2049976B2 (de) 1972-09-21
FR2111278A5 (https=) 1972-06-02

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PLNP Patent lapsed through nonpayment of renewal fees