FR2111278A5 - - Google Patents

Info

Publication number
FR2111278A5
FR2111278A5 FR7136644A FR7136644A FR2111278A5 FR 2111278 A5 FR2111278 A5 FR 2111278A5 FR 7136644 A FR7136644 A FR 7136644A FR 7136644 A FR7136644 A FR 7136644A FR 2111278 A5 FR2111278 A5 FR 2111278A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7136644A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Application granted granted Critical
Publication of FR2111278A5 publication Critical patent/FR2111278A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/10—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance
    • G01B7/105—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using magnetic means, e.g. by measuring change of reluctance for measuring thickness of coating

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
FR7136644A 1970-10-12 1971-10-12 Expired FR2111278A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702049976 DE2049976B2 (de) 1970-10-12 1970-10-12 Verfahren zur messung der dicke von schichten im bauwesen und vorrichtung zur durchfuehrung des verfahren

Publications (1)

Publication Number Publication Date
FR2111278A5 true FR2111278A5 (fr) 1972-06-02

Family

ID=5784839

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7136644A Expired FR2111278A5 (fr) 1970-10-12 1971-10-12

Country Status (4)

Country Link
US (1) US3815016A (fr)
DE (1) DE2049976B2 (fr)
FR (1) FR2111278A5 (fr)
GB (1) GB1360086A (fr)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4160208A (en) * 1976-01-27 1979-07-03 Elektro-Physik, Hans Nix & Dr. -Ing E. Steingroever Kg. Method of calibrating magnetic thickness gauges
SU1048302A1 (ru) * 1981-10-05 1983-10-15 Всесоюзный Научно-Исследовательский Институт По Разработке Неразрушающих Методов И Средств Контроля Качества Материалов Способ измерени толщины ферромагнитных изделий и покрытий
JPS58501551A (ja) * 1981-10-14 1983-09-16 コンバツシヨン　エンヂニアリング，インコ−ポレ−テツド． クラツド厚さ測定装置
DE3416659A1 (de) * 1984-05-05 1985-11-07 NATEC Institut für naturwissenschaftlich-technische Dienste GmbH, 2000 Hamburg Verfahren und vorrichtung zur zerstoerungsfreien schichtdickenmessung an miteinander verschweissten oder versiegelten metall-kunststoff-verbundfolien
CA1301280C (fr) * 1986-09-29 1992-05-19 University Of Western Australia (The) Detecteur inductif
EP0277421A1 (fr) * 1986-12-05 1988-08-10 The University Of Western Australia Dispositif de capteurs de la capacitance
US4814703A (en) * 1987-08-04 1989-03-21 The Boeing Company Method and apparatus for gap measurement between a graphite/epoxy structure and a metallic model
US5200704A (en) * 1991-02-28 1993-04-06 Westinghouse Electric Corp. System and method including a buried flexible sheet target impregnated with ferromagnetic particles and eddy current probe for determining proximity of a non-conductive underground structure
US5343146A (en) * 1992-10-05 1994-08-30 De Felsko Corporation Combination coating thickness gauge using a magnetic flux density sensor and an eddy current search coil
DE10001516B4 (de) * 2000-01-15 2014-05-08 Alstom Technology Ltd. Zerstörungsfreies Verfahren zur Bestimmung der Schichtdicke einer metallischen Schutzschicht auf einem metallischen Grundmaterial
US20040011462A1 (en) * 2002-06-28 2004-01-22 Lam Research Corporation Method and apparatus for applying differential removal rates to a surface of a substrate
US6808590B1 (en) 2002-06-28 2004-10-26 Lam Research Corporation Method and apparatus of arrayed sensors for metrological control
US7128803B2 (en) * 2002-06-28 2006-10-31 Lam Research Corporation Integration of sensor based metrology into semiconductor processing tools
US7205166B2 (en) * 2002-06-28 2007-04-17 Lam Research Corporation Method and apparatus of arrayed, clustered or coupled eddy current sensor configuration for measuring conductive film properties
US7309618B2 (en) * 2002-06-28 2007-12-18 Lam Research Corporation Method and apparatus for real time metal film thickness measurement
US7084621B2 (en) * 2002-09-25 2006-08-01 Lam Research Corporation Enhancement of eddy current based measurement capabilities
US6788050B2 (en) * 2002-12-23 2004-09-07 Lam Research Corp. System, method and apparatus for thin-film substrate signal separation using eddy current
US20050066739A1 (en) * 2003-09-26 2005-03-31 Lam Research Corporation Method and apparatus for wafer mechanical stress monitoring and wafer thermal stress monitoring
DE102004031626A1 (de) * 2004-06-30 2006-02-02 Robert Bosch Gmbh Verfahren und Vorrichtung zur Materialstärkenbestimmung auf Hochfrequenzbasis
CN103940902B (zh) * 2014-05-13 2016-08-03 爱德森（厦门）电子有限公司 利用涡流阻抗平面检测仪检测非金属材料不连续性方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2581394A (en) * 1945-08-20 1952-01-08 Jacob E Dinger Method of and apparatus for measuring the thickness of nonconducting coatings or films
US2665333A (en) * 1950-11-30 1954-01-05 Libbey Owens Ford Glass Co Apparatus for measuring thickness of sheet material
US2874349A (en) * 1955-06-02 1959-02-17 Henry N Staats Apparatus for detecting and measuring the depth of reinforcing rods
US3662225A (en) * 1970-01-09 1972-05-09 Qicsys Systems Inc Multi-printed circuit assembly

Also Published As

Publication number Publication date
US3815016A (en) 1974-06-04
DE2049976A1 (de) 1972-04-13
GB1360086A (en) 1974-07-17
DE2049976B2 (de) 1972-09-21

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Legal Events

Date Code Title Description
ST Notification of lapse