GB1354702A - Methods of and means for vacuum deposition - Google Patents

Methods of and means for vacuum deposition

Info

Publication number
GB1354702A
GB1354702A GB1354702DA GB1354702A GB 1354702 A GB1354702 A GB 1354702A GB 1354702D A GB1354702D A GB 1354702DA GB 1354702 A GB1354702 A GB 1354702A
Authority
GB
United Kingdom
Prior art keywords
spools
coating
source
conducting
runs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alexander Baxter Ltd
Original Assignee
Alexander Baxter Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alexander Baxter Ltd filed Critical Alexander Baxter Ltd
Publication of GB1354702A publication Critical patent/GB1354702A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB1354702D 1970-02-12 1970-02-12 Methods of and means for vacuum deposition Expired GB1354702A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (1)

Publication Number Publication Date
GB1354702A true GB1354702A (en) 1974-06-05

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1354702D Expired GB1354702A (en) 1970-02-12 1970-02-12 Methods of and means for vacuum deposition

Country Status (6)

Country Link
BE (1) BE762825A (enrdf_load_stackoverflow)
CA (1) CA947584A (enrdf_load_stackoverflow)
DE (1) DE2106543A1 (enrdf_load_stackoverflow)
FR (1) FR2079384B1 (enrdf_load_stackoverflow)
GB (1) GB1354702A (enrdf_load_stackoverflow)
NL (1) NL7101804A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2165554A (en) * 1984-10-13 1986-04-16 Metal Box Plc Vapour deposition of tin
US11846014B2 (en) 2015-07-24 2023-12-19 Kennametal Inc. Evaporator body with titanium hydride coating, method for the production and usage thereof

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
NL6713713A (enrdf_load_stackoverflow) * 1967-10-10 1969-04-14

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2165554A (en) * 1984-10-13 1986-04-16 Metal Box Plc Vapour deposition of tin
US4810531A (en) * 1984-10-13 1989-03-07 Metal Box Plc Vapor deposition of tin
US11846014B2 (en) 2015-07-24 2023-12-19 Kennametal Inc. Evaporator body with titanium hydride coating, method for the production and usage thereof

Also Published As

Publication number Publication date
FR2079384A1 (enrdf_load_stackoverflow) 1971-11-12
CA947584A (en) 1974-05-21
DE2106543A1 (de) 1971-08-26
FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11
BE762825A (fr) 1971-07-16
NL7101804A (enrdf_load_stackoverflow) 1971-08-16

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee