BE762825A - Procede et appareil nouveaux pour depot sous vide - Google Patents

Procede et appareil nouveaux pour depot sous vide

Info

Publication number
BE762825A
BE762825A BE762825A BE762825A BE762825A BE 762825 A BE762825 A BE 762825A BE 762825 A BE762825 A BE 762825A BE 762825 A BE762825 A BE 762825A BE 762825 A BE762825 A BE 762825A
Authority
BE
Belgium
Prior art keywords
new process
vacuum deposit
deposit
vacuum
new
Prior art date
Application number
BE762825A
Other languages
English (en)
French (fr)
Original Assignee
Baxter Ltd Alexander
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Baxter Ltd Alexander filed Critical Baxter Ltd Alexander
Publication of BE762825A publication Critical patent/BE762825A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
BE762825A 1970-02-12 1971-02-11 Procede et appareil nouveaux pour depot sous vide BE762825A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (1)

Publication Number Publication Date
BE762825A true BE762825A (fr) 1971-07-16

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
BE762825A BE762825A (fr) 1970-02-12 1971-02-11 Procede et appareil nouveaux pour depot sous vide

Country Status (6)

Country Link
BE (1) BE762825A (enrdf_load_stackoverflow)
CA (1) CA947584A (enrdf_load_stackoverflow)
DE (1) DE2106543A1 (enrdf_load_stackoverflow)
FR (1) FR2079384B1 (enrdf_load_stackoverflow)
GB (1) GB1354702A (enrdf_load_stackoverflow)
NL (1) NL7101804A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
DE102015112135B4 (de) 2015-07-24 2023-04-06 Kennametal Inc. Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
NL6713713A (enrdf_load_stackoverflow) * 1967-10-10 1969-04-14

Also Published As

Publication number Publication date
FR2079384A1 (enrdf_load_stackoverflow) 1971-11-12
GB1354702A (en) 1974-06-05
CA947584A (en) 1974-05-21
DE2106543A1 (de) 1971-08-26
FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11
NL7101804A (enrdf_load_stackoverflow) 1971-08-16

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