FR2079384A1 - - Google Patents

Info

Publication number
FR2079384A1
FR2079384A1 FR7104673A FR7104673A FR2079384A1 FR 2079384 A1 FR2079384 A1 FR 2079384A1 FR 7104673 A FR7104673 A FR 7104673A FR 7104673 A FR7104673 A FR 7104673A FR 2079384 A1 FR2079384 A1 FR 2079384A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7104673A
Other languages
French (fr)
Other versions
FR2079384B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alexander Baxter Ltd
Original Assignee
Alexander Baxter Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alexander Baxter Ltd filed Critical Alexander Baxter Ltd
Publication of FR2079384A1 publication Critical patent/FR2079384A1/fr
Application granted granted Critical
Publication of FR2079384B1 publication Critical patent/FR2079384B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7104673A 1970-02-12 1971-02-11 Expired FR2079384B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (2)

Publication Number Publication Date
FR2079384A1 true FR2079384A1 (enrdf_load_stackoverflow) 1971-11-12
FR2079384B1 FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7104673A Expired FR2079384B1 (enrdf_load_stackoverflow) 1970-02-12 1971-02-11

Country Status (6)

Country Link
BE (1) BE762825A (enrdf_load_stackoverflow)
CA (1) CA947584A (enrdf_load_stackoverflow)
DE (1) DE2106543A1 (enrdf_load_stackoverflow)
FR (1) FR2079384B1 (enrdf_load_stackoverflow)
GB (1) GB1354702A (enrdf_load_stackoverflow)
NL (1) NL7101804A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2456144A1 (fr) * 1979-04-20 1980-12-05 Kishinevsky G Unive Procede et dispositif pour la deposition de couches de semi-conducteurs par evaporation sous vide
FR2509755A1 (fr) * 1981-07-16 1983-01-21 Ampex Appareil et procede de pulverisation cathodique a grande vitesse

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
DE102015112135B4 (de) 2015-07-24 2023-04-06 Kennametal Inc. Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU172169A1 (enrdf_load_stackoverflow) *
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
FR1589261A (enrdf_load_stackoverflow) * 1967-10-10 1970-03-23

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU172169A1 (enrdf_load_stackoverflow) *
SU173828A1 (ru) * Предпри тие Государственного комитета электронной Способ изготовления высокоомных пленочных
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
FR1589261A (enrdf_load_stackoverflow) * 1967-10-10 1970-03-23

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2456144A1 (fr) * 1979-04-20 1980-12-05 Kishinevsky G Unive Procede et dispositif pour la deposition de couches de semi-conducteurs par evaporation sous vide
FR2509755A1 (fr) * 1981-07-16 1983-01-21 Ampex Appareil et procede de pulverisation cathodique a grande vitesse

Also Published As

Publication number Publication date
DE2106543A1 (de) 1971-08-26
BE762825A (fr) 1971-07-16
GB1354702A (en) 1974-06-05
NL7101804A (enrdf_load_stackoverflow) 1971-08-16
CA947584A (en) 1974-05-21
FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11

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Legal Events

Date Code Title Description
ST Notification of lapse