GB1354702A - Methods of and means for vacuum deposition - Google Patents
Methods of and means for vacuum depositionInfo
- Publication number
- GB1354702A GB1354702A GB1354702DA GB1354702A GB 1354702 A GB1354702 A GB 1354702A GB 1354702D A GB1354702D A GB 1354702DA GB 1354702 A GB1354702 A GB 1354702A
- Authority
- GB
- United Kingdom
- Prior art keywords
- spools
- coating
- source
- conducting
- runs
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
Abstract
1354702 Coating by vapour deposition ALEXANDER BAXTER Ltd 19 April 1971 [12 Feb 1970] 6789/70 Heading C7F [Also in Division B2] A vacuum depositing apparatus contains within a chamber 20 a filamentary coating material carrying source 31 which is wound on spools 29, 30 and runs between conducting spools 32, 33, 34, 35. Between the conducting spools, the passage of an electric current results in evaporation of the coating material on to a film substrate 10 e.g. polyethylene terephalate which is wound from a storage spool 11 to a take-up spool 17 via subsidiary spools 13, 14, 15 to give a "U" configuration (see Fig.1) The source 31 runs between the legs of the "U". The source 31 comprises C filaments, twisted, woven, plaited or braided together and treated with TiH 4 ZrH 3 TiB or TiN. By using two sources both sides of a substrate film may be coated. Magnetic recording tape is made by evaporating Fe, Ni, Co, Cr alloys on to a tape and preferably alternating the alloy coating with layers of nylon coating.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB678970 | 1970-02-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1354702A true GB1354702A (en) | 1974-06-05 |
Family
ID=9820788
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1354702D Expired GB1354702A (en) | 1970-02-12 | 1970-02-12 | Methods of and means for vacuum deposition |
Country Status (6)
Country | Link |
---|---|
BE (1) | BE762825A (en) |
CA (1) | CA947584A (en) |
DE (1) | DE2106543A1 (en) |
FR (1) | FR2079384B1 (en) |
GB (1) | GB1354702A (en) |
NL (1) | NL7101804A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2165554A (en) * | 1984-10-13 | 1986-04-16 | Metal Box Plc | Vapour deposition of tin |
US11846014B2 (en) | 2015-07-24 | 2023-12-19 | Kennametal Inc. | Evaporator body with titanium hydride coating, method for the production and usage thereof |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2916080C2 (en) * | 1979-04-20 | 1984-12-06 | Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev | Process for molecular vapor deposition of semiconductor layers and device for carrying out this process |
GB2101638B (en) * | 1981-07-16 | 1985-07-24 | Ampex | Moveable cathodes/targets for high rate sputtering system |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2930879A (en) * | 1957-12-16 | 1960-03-29 | New York Air Brake Co | Vaporization of metals |
NL6713713A (en) * | 1967-10-10 | 1969-04-14 |
-
1970
- 1970-02-12 GB GB1354702D patent/GB1354702A/en not_active Expired
-
1971
- 1971-02-08 CA CA104,703A patent/CA947584A/en not_active Expired
- 1971-02-11 NL NL7101804A patent/NL7101804A/xx unknown
- 1971-02-11 BE BE762825A patent/BE762825A/en unknown
- 1971-02-11 DE DE19712106543 patent/DE2106543A1/en active Pending
- 1971-02-11 FR FR7104673A patent/FR2079384B1/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2165554A (en) * | 1984-10-13 | 1986-04-16 | Metal Box Plc | Vapour deposition of tin |
US4810531A (en) * | 1984-10-13 | 1989-03-07 | Metal Box Plc | Vapor deposition of tin |
US11846014B2 (en) | 2015-07-24 | 2023-12-19 | Kennametal Inc. | Evaporator body with titanium hydride coating, method for the production and usage thereof |
Also Published As
Publication number | Publication date |
---|---|
BE762825A (en) | 1971-07-16 |
CA947584A (en) | 1974-05-21 |
NL7101804A (en) | 1971-08-16 |
DE2106543A1 (en) | 1971-08-26 |
FR2079384A1 (en) | 1971-11-12 |
FR2079384B1 (en) | 1974-10-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |