JPS63237219A - Production of magnetic recording medium - Google Patents
Production of magnetic recording mediumInfo
- Publication number
- JPS63237219A JPS63237219A JP7105187A JP7105187A JPS63237219A JP S63237219 A JPS63237219 A JP S63237219A JP 7105187 A JP7105187 A JP 7105187A JP 7105187 A JP7105187 A JP 7105187A JP S63237219 A JPS63237219 A JP S63237219A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- substrate
- magnetic recording
- iron nitride
- recording medium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 229910001337 iron nitride Inorganic materials 0.000 claims abstract description 18
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000000696 magnetic material Substances 0.000 claims abstract description 9
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 6
- 229910052742 iron Inorganic materials 0.000 claims abstract description 5
- -1 nitrogen ions Chemical class 0.000 claims description 7
- 238000001704 evaporation Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 description 15
- 239000010409 thin film Substances 0.000 description 15
- 239000010408 film Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 3
- 239000004744 fabric Substances 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- 229910000727 Fe4N Inorganic materials 0.000 description 1
- 229910002545 FeCoNi Inorganic materials 0.000 description 1
- 239000004962 Polyamide-imide Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229920002312 polyamide-imide Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は金属磁性薄膜型磁気記録媒体の製造方法に関す
る。特に本発明は、長手方向安定性、均一性に優れ、か
つ磁気特性に優れた窒化鉄薄膜型磁気記録媒体製造方法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a metal magnetic thin film magnetic recording medium. In particular, the present invention relates to a method for manufacturing an iron nitride thin film magnetic recording medium that has excellent longitudinal stability, uniformity, and magnetic properties.
磁気記録媒体としては強磁性粉末勿結合剤中に分散した
磁性層七有するいわゆる塗布型の磁気記録媒体が広く用
いられているが、近年高密度化記録への要求の高まりと
共に真空蒸着、スパッタリング等によるＣ ｏ ｓ Ｎ
ｉｓ Ｆ ｅ等の合金の薄膜型磁性層を有する磁気記
録媒体が注目されはじめている。これらの薄膜型磁気記
録媒体は、高密度化のための超薄層化が可能と云う利点
があるが、耐蝕性が悪く、長時間保存、使用すると錆び
が生ずるという欠点があった。As magnetic recording media, so-called coating-type magnetic recording media having seven magnetic layers dispersed in a ferromagnetic powder binder are widely used, but in recent years, with the increasing demand for high-density recording, vacuum evaporation, sputtering, etc. C o s N by
Magnetic recording media having thin film magnetic layers made of alloys such as is Fe are beginning to attract attention. These thin film magnetic recording media have the advantage of being able to be made into ultra-thin layers for higher density, but have the disadvantage of poor corrosion resistance and rusting when stored and used for long periods of time.
この欠点を除く１つの試みとして、最近、窒化鉄（Ｆｅ
ｘＮ：ｘはコ〜ｒ）磁性薄膜を形成した磁気記録媒体が
提案されている。As an attempt to eliminate this drawback, iron nitride (Fe
xN: x is co-r) A magnetic recording medium in which a magnetic thin film is formed has been proposed.
（例えば、特開昭４０−２３４／／３号公報）〔本発明
が解決しようとする問題点〕
上記の窒化鉄磁性薄膜有する磁気記録媒体は良好な磁気
特性を有すると同時に耐蝕性にも優れ、高密度磁気記録
媒体として適しているが、長尺原反を作成する場合の長
手方向安定性、および均一性に難点があった。即ち、窒
化鉄磁性薄膜の作成法として前記公報中に開示された反
応性イオンプレーティング法以外に、イオン銃ケ用いて
窒素イオンを基体に照射せしめる方法が利用さｎつつあ
るが、イオン銃の配置等に配慮がなされていないという
難があった。(For example, JP-A-40-234//3) [Problems to be solved by the present invention] The magnetic recording medium having the above iron nitride magnetic thin film has good magnetic properties and is also excellent in corrosion resistance. Although it is suitable as a high-density magnetic recording medium, it has problems with longitudinal stability and uniformity when producing a long original fabric. That is, in addition to the reactive ion plating method disclosed in the above-mentioned publication as a method for producing iron nitride magnetic thin films, a method in which a substrate is irradiated with nitrogen ions using an ion gun is increasingly being used. The problem was that no consideration was given to the placement, etc.
本発明の目的は、第一に長手方向安定性、および均一性
に優れた窒化鉄磁性薄膜型磁気記録媒体の製造方法を提
供することにある。The first object of the present invention is to provide a method for manufacturing an iron nitride magnetic thin film magnetic recording medium that has excellent longitudinal stability and uniformity.
第二に、磁気特性に優れた製造方法全提供することにあ
る。The second objective is to provide a manufacturing method with excellent magnetic properties.
本発明者らは前記間粗点に関して種々検討？重ね、イオ
ン銃等の配置によυ長手方向安定性、均一性および磁気
特性の向上の見られることを見出し本発明に至った。The inventors have made various studies regarding the above-mentioned rough points. The inventors have discovered that the longitudinal stability, uniformity, and magnetic properties can be improved by stacking, ion gun arrangement, etc., leading to the present invention.
すなわち本発明は、非磁性基体金円筒状ドラムの外周に
沿って搬送しつつ斜め蒸着法により鉄を主成分とする磁
性材料の蒸気流上基体に差し向けると同時に窒素イオン
を主成分とするイオンビーム會基体上に照射せしめ窒化
鉄磁性薄膜を形成させる磁気記録媒体の製造方法におい
て、前記円筒状ドラムに相対して、円筒状ドラムの幅方
向に磁性材料蒸発源とイオンビーム発生源ケ並蓋せしめ
窒化鉄磁性薄膜全形成させることを特徴とする磁気記録
媒体の製造方法に関する。That is, in the present invention, while conveying along the outer periphery of a non-magnetic substrate gold cylindrical drum, a vapor of a magnetic material mainly composed of iron is directed onto a substrate by an oblique evaporation method, and at the same time, ions mainly composed of nitrogen ions are In a method of manufacturing a magnetic recording medium in which a magnetic thin film of iron nitride is formed by irradiation on a beam-forming substrate, a magnetic material evaporation source and an ion beam generation source are arranged in the width direction of the cylindrical drum, facing the cylindrical drum. The present invention relates to a method of manufacturing a magnetic recording medium characterized in that a magnetic iron nitride thin film is entirely formed.
以下本発明の詳細な説明する。The present invention will be explained in detail below.
本発明で用いる基体の素材としては、ポリエチレンテレ
フタレート、ホリエテレ７．２．ｔ−ナフタレートなど
のポリエステル類；ポリエチレン、ポリプロピレンなど
のポリオレフィン類、セルローストリアセテートなどの
セルロース誘導体、ポリカーボネート、ポリイミド、ポ
リアミドイミドなどのプラスチック、等がある。The base material used in the present invention is polyethylene terephthalate, Holietere 7.2. Examples include polyesters such as t-naphthalate; polyolefins such as polyethylene and polypropylene; cellulose derivatives such as cellulose triacetate; and plastics such as polycarbonate, polyimide, and polyamideimide.
本発明の製造方法？具現する真空蒸着装置は、第１図に
示すごときものである。すなわち、非磁性基体２は円筒
状ドラムあるいは冷却ドラムｌの周囲に沿って搬送され
つつ、その上に磁性薄膜？堆積せしめる。このとき、純
Ｆｅ１ＦｅＣｏ。Manufacturing method of the present invention? The vacuum evaporation apparatus to be realized is as shown in FIG. That is, the non-magnetic substrate 2 is conveyed along the periphery of a cylindrical drum or a cooling drum l, and a magnetic thin film is deposited thereon. Let it accumulate. At this time, pure Fe1FeCo.
ＦｅＣｏＮ ｉ等の鉄を主成分とする磁性材料７はルツ
ボ６内に収容され、例えば電子ビームにより加熱蒸発さ
れる。また同時５にイオン銃ｊ中にＮ２を主成分とする
ガスを導入しつつイオン銃を作動せしめ、イオンビーム
ｒ：ｉ＆体上に照射せしめる。A magnetic material 7 containing iron as a main component, such as FeCoNi, is housed in a crucible 6, and is heated and evaporated by, for example, an electron beam. At the same time, the ion gun is operated while introducing a gas containing N2 as a main component into the ion gun j, and the ion beam r:i& is irradiated onto the body.
ζこで、本発明では第１図ならびに第２図に示すように
磁性材料蒸発源とイオン銃とを円筒状ドラムに相対して
円筒状ドラムの幅方向に並置せしめる。ζ Therefore, in the present invention, as shown in FIGS. 1 and 2, the magnetic material evaporation source and the ion gun are arranged side by side in the width direction of the cylindrical drum, facing the cylindrical drum.
窒化鉄は、一般にＦｅｘＮ（ｘ：、２〜Ｆ）で表わされ
る種々の構造のものが存在し、例えばε−Ｆｅ２〜３Ｎ
、ｒ−Ｆｅ４Ｎ％ＦｅＢＮ ’４が知らｎているが、こ
こでは、これらをまとめて窒化鉄という。蒸着条件、イ
オン銃作動条件等により薄膜中の組成分布、構造等はあ
る程度制御されうる。Iron nitride generally has various structures represented by FexN (x:, 2~F), such as ε-Fe2~3N
, r-Fe4N%FeBN'4 are known, but here they are collectively referred to as iron nitride. The compositional distribution, structure, etc. in the thin film can be controlled to some extent by vapor deposition conditions, ion gun operating conditions, and the like.
蒸着中の真空度は／ ０ ’Ｔｏｒｒ 〜／ ０
”Ｙｏｒｒ程度、更に窒化鉄薄膜の厚さはｚｏｏ−ｚｏ
ｏ。The degree of vacuum during deposition is / 0 'Torr ~ / 0
”The thickness of the iron nitride thin film is about
o.
Ａ程度である。It is about A.
第１図に示す真空蒸着装置を用い窒化鉄薄ａｔ作成した
。円筒状ドラムは直径弘ｏｏｍであり、基体として厚さ
１３μｍ１幅１００龍のポリエチレンテレフタレートを
使用した。イオン銃は口径３０龍のカウフマン型イオン
銃を採取し窒素ガスを導入、作動せしめた。真空槽内圧
力は／、コ×１０ ’Ｔｏｒｒとし、イオン銃作動条
件會加速電圧Ｏ０りｋＶ１イオン電流ｆｆｍＡとした。A thin iron nitride film was prepared using the vacuum evaporation apparatus shown in FIG. The cylindrical drum had a diameter of 100 mm, and polyethylene terephthalate with a thickness of 13 μm and a width of 100 mm was used as the substrate. The ion gun was a Kaufmann type ion gun with a caliber of 30 dragons, nitrogen gas was introduced, and it was activated. The pressure inside the vacuum chamber was set to /, 10' Torr, and the ion gun operating conditions were set to an acceleration voltage of O0 to kV1 and an ion current of ffmA.
膜厚は／１００Ａであり、かつ斜め蒸着の入射角は７！
０である。The film thickness is /100A, and the angle of incidence of oblique deposition is 7!
It is 0.
第７図のｊの位置にイオン銃を配置することにより成膜
した。更に比較例として第１図のｊＨの位置にイオン銃
を配置した他は上記実施例と同一条件にて窒化鉄薄膜の
形成奮行なった。The film was formed by placing an ion gun at position j in FIG. Further, as a comparative example, an iron nitride thin film was formed under the same conditions as in the above embodiment except that an ion gun was placed at the position jH in FIG.
成膜途中でのイオン銃放ｔ’ｔモニターしたところ、本
実施例では３０分間成膜中／回も放電を発生しなかった
のに対し、比較例では平均してλ〉３分間に／ｑの放電
が生じ、その結果、蒸着原反の長手方向にて膜厚および
磁気特性の不均一が生じた。また原反中央部の磁気特性
を測定したところ、＊施例Ｈｃ ＩＩＡＯＯｅ ＳＱ
Ｏ，Ｉｒで；Ｊ＞るに対し比較例ではＨｃ ｒＡＯＯ＝
ＳＱｏ、７３と角形比の顕著な向上が認められた。When we monitored the ion gun discharge during film formation, in this example, no discharge occurred even during 30 minutes of film formation, whereas in the comparative example, on average, no discharge occurred during λ>3 minutes/q. A discharge occurred, and as a result, the film thickness and magnetic properties became non-uniform in the longitudinal direction of the vapor-deposited original fabric. In addition, when the magnetic properties of the central part of the original fabric were measured, *Example Hc IIAOOe SQ
O, Ir: J>ru, whereas in the comparative example Hc rAOO=
A remarkable improvement in squareness ratio was observed with SQo of 73.
本発明の製造方法により、長手方向均一性に優ｎ、かつ
磁気特性、とくに角型比の向上した窒化鉄薄膜型磁気記
録媒体がえらｎる。By the manufacturing method of the present invention, an iron nitride thin film magnetic recording medium with excellent longitudinal uniformity and improved magnetic properties, particularly squareness ratio, can be selected.
第１図は本発明に用いられる蒸着装置の一例金示す。 第２図は本発明に用いられる蒸着装置の側面図ｒ示す。 ／：送り出しロール ２＝基体 ｌ：円筒ドラム よ、よａ：イオン銃７；鉄源 FIG. 1 shows an example of a vapor deposition apparatus used in the present invention. FIG. 2 shows a side view of the vapor deposition apparatus used in the present invention. /: Feeding roll 2 = base body l: Cylindrical drum Yo, Yo a: Ion gun 7; Iron source
Claims (1)
法により鉄を主成分とする磁性材料の蒸気流を基体に差
し向けると同時に窒素イオンを主成分とするイオンビー
ムを基体上に照射せしめ窒化鉄磁性薄膜を形成させる磁
気記録媒体の製造方法において、前記円筒状ドラムに相
対して、円筒状ドラムの幅方向に磁性材料蒸発源とイオ
ンビーム発生源を並置せしめ、窒化鉄磁性薄膜を形成さ
せることを特徴とする磁気記録媒体の製造方法。While a non-magnetic substrate is conveyed along a cylindrical drum, a vapor flow of magnetic material mainly composed of iron is directed onto the substrate using an oblique evaporation method, and at the same time, an ion beam mainly composed of nitrogen ions is irradiated onto the substrate. In a method for manufacturing a magnetic recording medium in which a magnetic iron nitride film is formed, a magnetic material evaporation source and an ion beam generation source are juxtaposed in the width direction of the cylindrical drum, facing the cylindrical drum, to form a magnetic iron nitride film. A method of manufacturing a magnetic recording medium, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7105187A JPS63237219A (en) | 1987-03-25 | 1987-03-25 | Production of magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7105187A JPS63237219A (en) | 1987-03-25 | 1987-03-25 | Production of magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63237219A true JPS63237219A (en) | 1988-10-03 |
Family
ID=13449336
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7105187A Pending JPS63237219A (en) | 1987-03-25 | 1987-03-25 | Production of magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63237219A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538802A (en) * | 1992-09-18 | 1996-07-23 | Kao Corporation | Magnetic recording medium and process for producing the same |
-
1987
- 1987-03-25 JP JP7105187A patent/JPS63237219A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538802A (en) * | 1992-09-18 | 1996-07-23 | Kao Corporation | Magnetic recording medium and process for producing the same |
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