FR2079384B1 - - Google Patents

Info

Publication number
FR2079384B1
FR2079384B1 FR7104673A FR7104673A FR2079384B1 FR 2079384 B1 FR2079384 B1 FR 2079384B1 FR 7104673 A FR7104673 A FR 7104673A FR 7104673 A FR7104673 A FR 7104673A FR 2079384 B1 FR2079384 B1 FR 2079384B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7104673A
Other languages
French (fr)
Other versions
FR2079384A1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alexander Baxter Ltd
Original Assignee
Alexander Baxter Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alexander Baxter Ltd filed Critical Alexander Baxter Ltd
Publication of FR2079384A1 publication Critical patent/FR2079384A1/fr
Application granted granted Critical
Publication of FR2079384B1 publication Critical patent/FR2079384B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7104673A 1970-02-12 1971-02-11 Expired FR2079384B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (2)

Publication Number Publication Date
FR2079384A1 FR2079384A1 (en) 1971-11-12
FR2079384B1 true FR2079384B1 (en) 1974-10-11

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7104673A Expired FR2079384B1 (en) 1970-02-12 1971-02-11

Country Status (6)

Country Link
BE (1) BE762825A (en)
CA (1) CA947584A (en)
DE (1) DE2106543A1 (en)
FR (1) FR2079384B1 (en)
GB (1) GB1354702A (en)
NL (1) NL7101804A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (en) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Process for molecular vapor deposition of semiconductor layers and device for carrying out this process
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
DE102015112135B4 (en) 2015-07-24 2023-04-06 Kennametal Inc. Evaporator body with titanium hydride coating, method for its manufacture and use

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
NL6713713A (en) * 1967-10-10 1969-04-14

Also Published As

Publication number Publication date
NL7101804A (en) 1971-08-16
CA947584A (en) 1974-05-21
BE762825A (en) 1971-07-16
DE2106543A1 (en) 1971-08-26
GB1354702A (en) 1974-06-05
FR2079384A1 (en) 1971-11-12

Similar Documents

Publication Publication Date Title
FR2079384B1 (en)
AU1146470A (en)
AU1473870A (en)
AU2044470A (en)
AU2085370A (en)
AU1326870A (en)
AU1336970A (en)
AU1517670A (en)
AU1716970A (en)
AU1833270A (en)
AU2017870A (en)
AU1832970A (en)
AU1603270A (en)
AU1328670A (en)
AU1343870A (en)
AU1581370A (en)
AU2144270A (en)
AU2131570A (en)
AU2130770A (en)
AU2130570A (en)
AU2119370A (en)
AU1591370A (en)
AU2112570A (en)
AU1235770A (en)
AU2061170A (en)

Legal Events

Date Code Title Description
ST Notification of lapse