CA947584A - Methods of and means for vacuum deposition - Google Patents

Methods of and means for vacuum deposition

Info

Publication number
CA947584A
CA947584A CA104,703A CA104703A CA947584A CA 947584 A CA947584 A CA 947584A CA 104703 A CA104703 A CA 104703A CA 947584 A CA947584 A CA 947584A
Authority
CA
Canada
Prior art keywords
methods
vacuum deposition
deposition
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA104,703A
Other languages
English (en)
Inventor
Alexander S. Baxter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alexander Baxter Ltd
Original Assignee
Alexander Baxter Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alexander Baxter Ltd filed Critical Alexander Baxter Ltd
Application granted granted Critical
Publication of CA947584A publication Critical patent/CA947584A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CA104,703A 1970-02-12 1971-02-08 Methods of and means for vacuum deposition Expired CA947584A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (1)

Publication Number Publication Date
CA947584A true CA947584A (en) 1974-05-21

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
CA104,703A Expired CA947584A (en) 1970-02-12 1971-02-08 Methods of and means for vacuum deposition

Country Status (6)

Country Link
BE (1) BE762825A (enrdf_load_stackoverflow)
CA (1) CA947584A (enrdf_load_stackoverflow)
DE (1) DE2106543A1 (enrdf_load_stackoverflow)
FR (1) FR2079384B1 (enrdf_load_stackoverflow)
GB (1) GB1354702A (enrdf_load_stackoverflow)
NL (1) NL7101804A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
DE102015112135B4 (de) 2015-07-24 2023-04-06 Kennametal Inc. Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
NL6713713A (enrdf_load_stackoverflow) * 1967-10-10 1969-04-14

Also Published As

Publication number Publication date
FR2079384A1 (enrdf_load_stackoverflow) 1971-11-12
GB1354702A (en) 1974-06-05
DE2106543A1 (de) 1971-08-26
FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11
BE762825A (fr) 1971-07-16
NL7101804A (enrdf_load_stackoverflow) 1971-08-16

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