NL7101804A - - Google Patents

Info

Publication number
NL7101804A
NL7101804A NL7101804A NL7101804A NL7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A NL 7101804 A NL7101804 A NL 7101804A
Authority
NL
Netherlands
Application number
NL7101804A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of NL7101804A publication Critical patent/NL7101804A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/246—Replenishment of source material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL7101804A 1970-02-12 1971-02-11 NL7101804A (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB678970 1970-02-12

Publications (1)

Publication Number Publication Date
NL7101804A true NL7101804A (enrdf_load_stackoverflow) 1971-08-16

Family

ID=9820788

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7101804A NL7101804A (enrdf_load_stackoverflow) 1970-02-12 1971-02-11

Country Status (6)

Country Link
BE (1) BE762825A (enrdf_load_stackoverflow)
CA (1) CA947584A (enrdf_load_stackoverflow)
DE (1) DE2106543A1 (enrdf_load_stackoverflow)
FR (1) FR2079384B1 (enrdf_load_stackoverflow)
GB (1) GB1354702A (enrdf_load_stackoverflow)
NL (1) NL7101804A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2916080C2 (de) * 1979-04-20 1984-12-06 Kišinevskij Gosudarstvennyj universitet imeni V.I. Lenina, Kišinev Verfahren zum Molekular-Aufdampfen von Halbleiterschichten und Vorrichtung zur Durchführung dieses Verfahrens
GB2101638B (en) * 1981-07-16 1985-07-24 Ampex Moveable cathodes/targets for high rate sputtering system
GB8425917D0 (en) * 1984-10-13 1984-11-21 Metal Box Plc Evaporating metal
DE102015112135B4 (de) 2015-07-24 2023-04-06 Kennametal Inc. Verdampferkörper mit Titanhydridbeschichtung, Verfahren zu dessen Herstellung und Verwendung

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2930879A (en) * 1957-12-16 1960-03-29 New York Air Brake Co Vaporization of metals
NL6713713A (enrdf_load_stackoverflow) * 1967-10-10 1969-04-14

Also Published As

Publication number Publication date
DE2106543A1 (de) 1971-08-26
BE762825A (fr) 1971-07-16
GB1354702A (en) 1974-06-05
FR2079384A1 (enrdf_load_stackoverflow) 1971-11-12
CA947584A (en) 1974-05-21
FR2079384B1 (enrdf_load_stackoverflow) 1974-10-11

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