GB1350166A - Non-crucible zone melting of crystalline semiconductor rods - Google Patents

Non-crucible zone melting of crystalline semiconductor rods

Info

Publication number
GB1350166A
GB1350166A GB3577572A GB3577572A GB1350166A GB 1350166 A GB1350166 A GB 1350166A GB 3577572 A GB3577572 A GB 3577572A GB 3577572 A GB3577572 A GB 3577572A GB 1350166 A GB1350166 A GB 1350166A
Authority
GB
United Kingdom
Prior art keywords
rod
indicated
arrow
eccentric
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB3577572A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1350166A publication Critical patent/GB1350166A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

1350166 Zone melting SIEMENS AG 1 Aug 1972 [30 Aug 1971] 35775/72 Heading B1S In the production of a monocrystalline semiconductor rod by zone melting techniques in which the rod to be treated which has a seed crystal attached to one end, is supported at each end by rod holders at least one rod holder is caused to execute a non-uniform, non- circular, substantially horizontal, periodic motion during the zone-melting operation, e.g. by means of an eccentric. The process is preferably carried out in a treatment chamber containing therein two substantially vertical rod holders and an annular induction coil which surrounds the rod and in which one of the rod holders is mechanically connected to a connecting rod of an eccentric device locatedoutside the chamber. As shown, upper rod holder 1, with silicon rod 2 in position is made to perform the motion indicated by arrow 3 by connecting holder 1 by pin 13 to connecting rod 4 which slides in a member pivotally attached by pin 5 to bracket 6 connected to eccentric shaft 7 and thereby follows the motion, indicated by arrow 8, of shaft 7. The eccentric shaft is secured by bearings 9, in an axially displacable sleeve 10 as indicated by the double-head arrow 11.
GB3577572A 1971-08-30 1972-08-01 Non-crucible zone melting of crystalline semiconductor rods Expired GB1350166A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712143394 DE2143394A1 (en) 1971-08-30 1971-08-30 METHOD AND DEVICE FOR ACHIEVING A UNIFORM RADIAL RESISTANCE PROGRESS DURING THE PRODUCTION OF A SEMI-CONDUCTOR CRYSTAL ROD BY CRUCIBLE-FREE ZONE MELTING

Publications (1)

Publication Number Publication Date
GB1350166A true GB1350166A (en) 1974-04-18

Family

ID=5818187

Family Applications (1)

Application Number Title Priority Date Filing Date
GB3577572A Expired GB1350166A (en) 1971-08-30 1972-08-01 Non-crucible zone melting of crystalline semiconductor rods

Country Status (7)

Country Link
JP (1) JPS4857576A (en)
BE (1) BE788181A (en)
DE (1) DE2143394A1 (en)
FR (1) FR2150935B1 (en)
GB (1) GB1350166A (en)
IT (1) IT964216B (en)
NL (1) NL7208665A (en)

Also Published As

Publication number Publication date
FR2150935A1 (en) 1973-04-13
BE788181A (en) 1972-12-18
NL7208665A (en) 1973-03-02
JPS4857576A (en) 1973-08-13
DE2143394A1 (en) 1973-03-08
FR2150935B1 (en) 1974-08-19
IT964216B (en) 1974-01-21

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees