GB1345899A - Measuring interferometers - Google Patents

Measuring interferometers

Info

Publication number
GB1345899A
GB1345899A GB1782271A GB1782271A GB1345899A GB 1345899 A GB1345899 A GB 1345899A GB 1782271 A GB1782271 A GB 1782271A GB 1782271 A GB1782271 A GB 1782271A GB 1345899 A GB1345899 A GB 1345899A
Authority
GB
United Kingdom
Prior art keywords
signal
produced
polarizing device
interferometer
environmental change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1782271A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of GB1345899A publication Critical patent/GB1345899A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
GB1782271A 1970-06-06 1971-05-28 Measuring interferometers Expired GB1345899A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702027983 DE2027983A1 (de) 1970-06-06 1970-06-06 Verfahren zur Fehlerkompensation

Publications (1)

Publication Number Publication Date
GB1345899A true GB1345899A (en) 1974-02-06

Family

ID=5773286

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1782271A Expired GB1345899A (en) 1970-06-06 1971-05-28 Measuring interferometers

Country Status (4)

Country Link
JP (1) JPS5435098B1 (enExample)
DE (1) DE2027983A1 (enExample)
FR (1) FR2095521A5 (enExample)
GB (1) GB1345899A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111879729A (zh) * 2020-08-10 2020-11-03 上海乾曜光学科技有限公司 柔性板结构移相器

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer
DE3029716C2 (de) * 1980-08-06 1985-05-15 Krautkrämer GmbH, 5000 Köln Verfahren und Vorrichtung zur automatischen Aufrechterhaltung einer Justage der Deckung und der relativen Phasenlage von Lichtstrahlen in einem für den Ultraschallempfang benutzten optischen Interferometer
DE3401900A1 (de) * 1984-01-20 1985-08-01 Fa. Carl Zeiss, 7920 Heidenheim Interferometer zur laengen- oder winkelmessung

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111879729A (zh) * 2020-08-10 2020-11-03 上海乾曜光学科技有限公司 柔性板结构移相器

Also Published As

Publication number Publication date
DE2027983A1 (de) 1971-12-16
FR2095521A5 (enExample) 1972-02-11
JPS5435098B1 (enExample) 1979-10-31

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee