JPS5435098B1 - - Google Patents
Info
- Publication number
- JPS5435098B1 JPS5435098B1 JP3418771A JP3418771A JPS5435098B1 JP S5435098 B1 JPS5435098 B1 JP S5435098B1 JP 3418771 A JP3418771 A JP 3418771A JP 3418771 A JP3418771 A JP 3418771A JP S5435098 B1 JPS5435098 B1 JP S5435098B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19702027983 DE2027983A1 (de) | 1970-06-06 | 1970-06-06 | Verfahren zur Fehlerkompensation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5435098B1 true JPS5435098B1 (enExample) | 1979-10-31 |
Family
ID=5773286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3418771A Pending JPS5435098B1 (enExample) | 1970-06-06 | 1971-05-21 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5435098B1 (enExample) |
| DE (1) | DE2027983A1 (enExample) |
| FR (1) | FR2095521A5 (enExample) |
| GB (1) | GB1345899A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4215938A (en) * | 1978-09-28 | 1980-08-05 | Farrand Industries, Inc. | Method and apparatus for correcting the error of a position measuring interferometer |
| DE3029716C2 (de) * | 1980-08-06 | 1985-05-15 | Krautkrämer GmbH, 5000 Köln | Verfahren und Vorrichtung zur automatischen Aufrechterhaltung einer Justage der Deckung und der relativen Phasenlage von Lichtstrahlen in einem für den Ultraschallempfang benutzten optischen Interferometer |
| DE3401900A1 (de) * | 1984-01-20 | 1985-08-01 | Fa. Carl Zeiss, 7920 Heidenheim | Interferometer zur laengen- oder winkelmessung |
| CN111879729B (zh) * | 2020-08-10 | 2025-06-06 | 上海乾曜光学科技有限公司 | 柔性板结构移相器 |
-
1970
- 1970-06-06 DE DE19702027983 patent/DE2027983A1/de active Pending
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1971
- 1971-04-20 FR FR7115065A patent/FR2095521A5/fr not_active Expired
- 1971-05-21 JP JP3418771A patent/JPS5435098B1/ja active Pending
- 1971-05-28 GB GB1782271A patent/GB1345899A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2027983A1 (de) | 1971-12-16 |
| FR2095521A5 (enExample) | 1972-02-11 |
| GB1345899A (en) | 1974-02-06 |