FR2095521A5 - - Google Patents

Info

Publication number
FR2095521A5
FR2095521A5 FR7115065A FR7115065A FR2095521A5 FR 2095521 A5 FR2095521 A5 FR 2095521A5 FR 7115065 A FR7115065 A FR 7115065A FR 7115065 A FR7115065 A FR 7115065A FR 2095521 A5 FR2095521 A5 FR 2095521A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7115065A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2095521A5 publication Critical patent/FR2095521A5/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00Measuring instruments characterised by the use of optical techniques
    • G01B9/02Interferometers
    • G01B9/02055Reduction or prevention of errors; Testing; Calibration
    • G01B9/0207Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/60Reference interferometer, i.e. additional interferometer not interacting with object
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7115065A 1970-06-06 1971-04-20 Expired FR2095521A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702027983 DE2027983A1 (de) 1970-06-06 1970-06-06 Verfahren zur Fehlerkompensation

Publications (1)

Publication Number Publication Date
FR2095521A5 true FR2095521A5 (enExample) 1972-02-11

Family

ID=5773286

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7115065A Expired FR2095521A5 (enExample) 1970-06-06 1971-04-20

Country Status (4)

Country Link
JP (1) JPS5435098B1 (enExample)
DE (1) DE2027983A1 (enExample)
FR (1) FR2095521A5 (enExample)
GB (1) GB1345899A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4215938A (en) * 1978-09-28 1980-08-05 Farrand Industries, Inc. Method and apparatus for correcting the error of a position measuring interferometer
DE3029716C2 (de) * 1980-08-06 1985-05-15 Krautkrämer GmbH, 5000 Köln Verfahren und Vorrichtung zur automatischen Aufrechterhaltung einer Justage der Deckung und der relativen Phasenlage von Lichtstrahlen in einem für den Ultraschallempfang benutzten optischen Interferometer
DE3401900A1 (de) * 1984-01-20 1985-08-01 Fa. Carl Zeiss, 7920 Heidenheim Interferometer zur laengen- oder winkelmessung
CN111879729B (zh) * 2020-08-10 2025-06-06 上海乾曜光学科技有限公司 柔性板结构移相器

Also Published As

Publication number Publication date
DE2027983A1 (de) 1971-12-16
GB1345899A (en) 1974-02-06
JPS5435098B1 (enExample) 1979-10-31

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Legal Events

Date Code Title Description
ST Notification of lapse