GB1345899A - Measuring interferometers - Google Patents
Measuring interferometersInfo
- Publication number
- GB1345899A GB1345899A GB1782271A GB1782271A GB1345899A GB 1345899 A GB1345899 A GB 1345899A GB 1782271 A GB1782271 A GB 1782271A GB 1782271 A GB1782271 A GB 1782271A GB 1345899 A GB1345899 A GB 1345899A
- Authority
- GB
- United Kingdom
- Prior art keywords
- signal
- produced
- polarizing device
- interferometer
- environmental change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/60—Reference interferometer, i.e. additional interferometer not interacting with object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/70—Using polarization in the interferometer
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
1345899 Selective signalling INTERNATIONAL BUSINESS MACHINES CORP 28 May 1971 [6 June 1970] 17822/71 Heading G4H [Also in Divisions G1 and G2] An interferometer system wherein the measurement is produced by counting fringes by photosensitive devices 58, 59, includes means to combine and interfere two beams (2i and 2k) circularly polarized in different directions into a combined beam, a rotatably mounted polarizing device arranged to receive the combined beam, and drive means responsive to a control signal indicative of an environmental change affecting operation of the interferometer to rotate the polarizing device so as to compensate for variation in light intensity caused by the environmental change, e.g. in temperature or pressure. The control signal is derived from a reference interferometer, 5-8, in which one mirror is mounted on two piezoelectric elements 9 and 10, one of these being energized by an oscillator 24, the other having a signal applied to it which is produced by the difference between the oscillation signal and a signal produced at photosensitive detector 20. This signal is also used to produce the rotation of the polarizing device.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19702027983 DE2027983A1 (en) | 1970-06-06 | 1970-06-06 | Procedure for error compensation |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1345899A true GB1345899A (en) | 1974-02-06 |
Family
ID=5773286
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1782271A Expired GB1345899A (en) | 1970-06-06 | 1971-05-28 | Measuring interferometers |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS5435098B1 (en) |
DE (1) | DE2027983A1 (en) |
FR (1) | FR2095521A5 (en) |
GB (1) | GB1345899A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4215938A (en) * | 1978-09-28 | 1980-08-05 | Farrand Industries, Inc. | Method and apparatus for correcting the error of a position measuring interferometer |
DE3029716C2 (en) * | 1980-08-06 | 1985-05-15 | Krautkrämer GmbH, 5000 Köln | Method and device for automatically maintaining an adjustment of the coverage and the relative phase position of light beams in an optical interferometer used for ultrasonic reception |
DE3401900A1 (en) * | 1984-01-20 | 1985-08-01 | Fa. Carl Zeiss, 7920 Heidenheim | Interferometer for linear or angular measurement |
-
1970
- 1970-06-06 DE DE19702027983 patent/DE2027983A1/en active Pending
-
1971
- 1971-04-20 FR FR7115065A patent/FR2095521A5/fr not_active Expired
- 1971-05-21 JP JP3418771A patent/JPS5435098B1/ja active Pending
- 1971-05-28 GB GB1782271A patent/GB1345899A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5435098B1 (en) | 1979-10-31 |
DE2027983A1 (en) | 1971-12-16 |
FR2095521A5 (en) | 1972-02-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
PCNP | Patent ceased through non-payment of renewal fee |